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Film formation by thermoelectron activation RF ion plating and it's controle.

Research Project

Project/Area Number 60550502
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 金属材料(含表面処理・腐食防食)
Research InstitutionFaculty of Engineering, Ibaraki University.

Principal Investigator

URAO Ryoichi  Ibaraki University, Associate professor., 工学部, 助教授 (10007776)

Project Period (FY) 1985 – 1986
Project Status Completed (Fiscal Year 1986)
Budget Amount *help
¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1986: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1985: ¥600,000 (Direct Cost: ¥600,000)
KeywordsIon plating / Dry plating / coating / RF plasma / 窒化チタン
Research Abstract

A tungsten filament to emit thermoelectrons was installed to a radio frequency ion plating apparatus. Using this apparatus, a steel and Zn-Al eutectic alloy were coated with TiN by thermoelectron activation RF ion plating method. Vias voltages of -200 to -400 are applied. The voltages have fairly large effects on the crystal orientation of TiN TiN films. Gas pressure can be lowered to 3/ <10^(-4)> torr. Gas pressure and deposition rate relates to film colour and composition.
Using the same apparatus, Zr, Nb and Al were ion plated in nitogen gas atmosphere, These metals have high melting points or high thermal conductivity, so RF source of high power is needed to melt and evapolate the metals with a water cooled copper hearth.

Report

(1 results)
  • 1986 Final Research Report Summary
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] 浦尾亮一 他: 茨城大学工学部研究集報. 34. 45-50 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] 町井律雄,浦尾亮一 他: 日本機械学会・精機学会共催日立地方講演会講演論文集. (1960)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] Ryoichi Urao, Makoto Oishi, etc.: "TiN coating of a Zn-Al eutectic alloy by thermoelectron activation RF ion plating method." Journal of the Faculty of Engineering Ibaraki University.34. 45-50 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] Ritsuo Machii, Ryoichi Urao, etc.: "Titanium nitride coating by thermoelectron activation RF ion plating and the property of coating layer." Proc. Conference in Hitachi, JSME and JSPE.39. 144-146 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary

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Published: 1987-03-31   Modified: 2016-04-21  

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