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%development of ac Calorimetric Method for Thermal Diffusivity Measurement of Thin Films.

Research Project

Project/Area Number 60850004
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionNagoya University

Principal Investigator

HATTA Ichiro  Nagoya University, School of Engineering, Professor, 工学部, 教授 (70016070)

Co-Investigator(Kenkyū-buntansha) KATO Ryozo  SINKU-RIKO Inc., Manager (, AE事業部, 室長
Project Period (FY) 1985 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 1987: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 1986: ¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 1985: ¥6,000,000 (Direct Cost: ¥6,000,000)
Keywordsac calorimetry / thermal measurement / experimental technique / thin film / thermal diffusivity / thermophysical property / 熱物性 / 材料評価
Research Abstract

a new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed< In principle, this method can be applied no matter how thin a sample may be. This method is applicable to materials not only with low thermal diffusivity such as polymer films but also with ones with high thermal diffusivity such as a diamond film. In a very thin sample, the contribution of addenda, thermocouple, glue etc., to the precise measurement should be considered. From both theory and experiment, it is verified that the addenda do not affect determination of the thermal diffusivity. We used rectangular plate-like samples which were partly shadowed by a mask. The sample dimension required for the measurement was considered. For the sample length, the distance between the thermocouple and the sample bundary on which ac light is irradiated should be sufficiently long so that thermal waves reflected at the boundary decay. On the other hand, there is no restriction on the other boundary shadowed by the mask, i. e., the thermocouple can be placed just at the boundary.

Report

(3 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • 1985 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] 八田一郎,貴家泰長,加藤良三,前園明一: Review of Scientific Instruments. 56. 1643-1647 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎,江間健二,加藤良三,前園明一: 固体物理. 21. 277-282 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎: 熱測定. 13. 142-146 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎,加藤良三,前園明一: Japanese Journal of Applied Physics. 25. L493-L495 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎,加藤良三,前園明一: Japanese Journal of Applied Physics. 475-478 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎: 学術月報. 622 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田晴彦,八田一郎: easurement in a Small Amount of LiquidJapanese Journal of Applied Physics. 27. L121-L122 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎: "熱測定の進歩第3巻"acカロリメトリの最近の進歩" (株)私学技術社, 11 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎,加藤良三: "高機能性無機材料の先端的技術開発の現状と将来-我が国の知識集約型産業の今後の動向調査研究-"薄膜材料の熱物性試験"" (財)日本産業技術振興会, 4 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 八田一郎,船本宏幸: "ダイヤモンド薄膜"ダイヤモンド薄膜の熱伝導特性の評価法"" (株)総合技術センター出版事業部, (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta, Y. Sasuaga, R. Kato and A. Maesono: "Thermal Diffusivity Measuement of Thin Films by Means of an ac Calorimetric Method" Review of Scientific Instruments. 56. 1643-1647 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta, K. Ema, R. Kato and A. Maesono: "A New Method for Thermal Diffusivity Measurement---Its Application to Materials Chracterization" Kotai Butsuri. 21. 277-282 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta: "Thermal Diffusivity Measurement by Means of Light-Irradiation Type ac Calorimetry" Netsu Sokutei. 13. 142-146 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta, R. Kato and A. Maesono: "Development of ac Calorimetric Method for Thermal Diffusivity Measurement I. Contribution of Thermocouple Attachment in a Thin Sample" Japanese Jouranl of Applied Physics. 25. l493-l495 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. hatta, R. Kato and A. Maesono: "Development of ac Calorimetric Method for Thermal Diffusivity Measurement II. Sample Dimension Required for the Measurement" Japanses Journal of Applied Physics. 26. 475-478 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta: "Development of ac Calorimetric Method for Thermal Diffusivity Measrement of Thin Films" Gakujutsu Geppo. 40. 622 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H.Yao and I. Hatta: "An ac Microcalorimetric Method for Precise Heat Capacity Measurement in a Small Amount of Liquid" Japanese Journal of Applied Physics. 27. l121-l122 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta: Kagaku Gijutsu Sha. Recent Progress in ac Calorimetry in Netsu Sokutei no Shinpo, 1-11 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta and R. Kato: Zaidan Hojin - Nihon Sangyo Gijutsu Shinko Kyokai. Characterization of Thermal Physical Properties in Thin Film Materials, 164-167 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] I. Hatta and Hiroyuki Funamoto: Sogo Gijutsu Center Pulishing Co.Characterization of Thermal Condactance in Diamond Films, (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] Ichiro Hatta: Japanese Journal of Applied Physics. 25. L493-L495 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Ichiro Hatta: Japanese Journal of Applied Physics. 26. 475-478 (1987)

    • Related Report
      1986 Annual Research Report
  • [Publications] 八田一郎: 熱測定. 13. 142-146 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 八田一郎: 固体物理. 21. 277-282 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] Rev.Sci.Instrum.56-8. (1985)

    • Related Report
      1985 Annual Research Report
  • [Publications] 熱測定の進歩. 第3巻. (1985)

    • Related Report
      1985 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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