| Project/Area Number |
60870001
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
General anatomy (including Histology/Embryology)
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| Research Institution | YAMAGATA UNIVERSITY |
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Principal Investigator |
TONOSAKI Akira YAMAGATA UNIVERSITY SCHOOL OF MEDICINE, 医学部, 教授 (90004572)
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| Co-Investigator(Kenkyū-buntansha) |
会田 瑳武朗 日本電子株式会社, 電子工学機器技術本部, 研究室長
WATANABE Hiroshi YAMAGATA UNIVERSITY SCHOOL OF MEDICINE, 医学部, 助手 (20091845)
渡辺 晧 (渡辺 皓) 山形大学, 医学部, 助教授 (80004662)
TOKUNAGA Fumio TOHOKU UNIVERSITY FACULTY OF SCIENCE, 理学部, 助教授 (80025452)
AITA Saburo JAPAN ELECTRON OPTICS LABORATORY, CO. LTD.
松尾 達也 日本電子(株), 部長
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| Project Period (FY) |
1985 – 1987
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| Project Status |
Completed (Fiscal Year 1987)
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| Budget Amount *help |
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 1987: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1986: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1985: ¥8,500,000 (Direct Cost: ¥8,500,000)
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| Keywords | Clean vacuum / Deep-etching / Cryopump / Vacuum evaporation / 電顕試料 / 凍結レプリカ法 / 真空蒸着装置 / 電顕試料作製法 / フリーズ・エッチング法 |
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| Research Abstract |
SUB-CHAMBER HOUSING A DEEP-ETCHING STAGE AND PROVEDED WITH A CRYOPUMP, CRYO-U6 (ALVAC), WAS CONJUGATED WITH A UNIT OF VACUUM EVAPORATER. JFD-7000 (JEOL), WHICH HAD BEEN EARLIER DEVELOPED BY THE MEMBERS OF THE PRESENT PROJECT AND WAS CHARACTERIZED BY ITS TWO-WAY EVACUATION BY MEANS OF TWO SETS OF OIL-DIFFUSION PUMPS. MANY VACUUM-SPECIALISTS WERE SCEPTICAL OF SUCH A PLAN BECAUSE OF APPARENT DEMERIT OF HYBRIDIZING OF so-called clean and wet vacuum system. a vacuum of 10^<-9> ORDER WAS EVENTUALLY OBTAINED IN NUDE-GAUGE MONITORING MODE IN THE SUB-CHAMBER.
THE SUB- AND MAIN CHAMBERS WERE ACTUALLY CONNECTED ONLY UPON USE BY A PASSAGE TGHROUGH WHICH A SPECIAMEN-HOLDER WAS PUSHED IN AND PULLED OUT. THE PASSAGE OTHERWISE STAYED CLOSED BY A SLIDE-VALVE TO KEEP THE VACUUM SYSTEM SEPARATED FROM EACH OTHER. BAKING HEATER AND METAL SEALS, BOTH REQUIREMENT FOR CLEAN-VACUUM MAINTAINANCE, WERE GIVEN UP BECAUSE THEY WERE SUPPOSED TO TAKE TOO MUCH SPACE OF DESIGNED SUB-CHAMBERS AND LOOKED UNREALISTIC FOR SUCH A CASUAL WORK AS FREEZE-ETCHING EXPERIMENTS, USED TO BE REPEATED INCESSANTLY EVERY TIME TO RUIN THE VACUUM.
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