• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

DEVELOPMENT OF CARBON COATING BY PLASMA CVD

Research Project

Project/Area Number 60880001
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field プラズマ理工学
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

SUGAI HIDEO  FACULTY OF ENGINEERING, NAGOYA UNIVERSITY, 工学部, 助教授 (40005517)

Co-Investigator(Kenkyū-buntansha) OKUDA TAKAYOSHI  FACULTY OF ENGINEERING, NAGOYA UNIVERSITY, 工学部, 教授 (30022990)
Project Period (FY) 1985 – 1986
Project Status Completed (Fiscal Year 1986)
Budget Amount *help
¥4,900,000 (Direct Cost: ¥4,900,000)
Fiscal Year 1986: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1985: ¥4,200,000 (Direct Cost: ¥4,200,000)
KeywordsPlasma CVD / Carbon / Coating / Carbonization / Hydrogen Recycling / ダイアモンド状薄膜 / プラズマ / 不純物 / メタン / 核融合 / 薄膜 / 壁
Research Abstract

A CARBON COATING TECHNIQUE, WHICH HAS BEEN EXPECTED AS A NEW IMPURITY CONTROL IN NUCLEAR FUSION, IS BASICALLY STUDIED. A PRESENT URGENT SUBJECT IN FUSION DEVICE COATING IS HOW TO REDUCE A LARGE AMOUNT OF HYDROGEN DESORBED FROM THE COATED WALLS. SO, WE SYSTEMATICALLY STUDIED THE COATING CONDITIONS TO MINIMIZE THE HYDROGEN CONTENT OF CARBON FILMS.
A HOT-CATHODE DISCHARGE IN A TOROIDAL MAGNETIC FIELD AND A COLD-CATHODE GLOW DISCHARGE WITHOUT MAGNETIC FIELDS WERE USED FOR COATING. BESIDE THESE, WE DEVELOPED A NEW COATING METHOD CALLED A DOUBLE PLASMA. FROM THESE COATING EXPERIMENTS, WE OBTAINED A GUIDING PRINCIPLE OF REDUCING THE HYDROGEN CONTENT OF FILMS AS FOLLOWS:
(1) COATING THE WALLS AT TEMPERATURES HIGHER THAN 400゜C. (2) COATING WITH SEVERE ION BOMBARDMENT ON THE WALLS. (3)ACETYLENE DISCHARGES REDUCE THE HYDROGEN CONTENT BY HALF, COMPARED WITH METHANE DISCHARGES.
IN ADDITION, THE HYDROGEN CONTENT TURNED OUT TO BE ALMOST INDEPENDENT OF ADMIXING HYDROGEN OR HELIUM GASES, WHILE THE CARBON DENSITY OF FILMS IS DECREASED BY ADMIXED HYDROGEN. ON THE OTHER HAND, WE FOUND THAT THE HYDROGENS CAN BE DESORBED FROM THE CARBON FILMS BY HELIUM DISCHARGES. THIS HELIUM-DISCHARGE TREATMENT LOWERS THE HYDROGEN RECYCLING RATE LESS THAN 1. THUS, THE HELIUM GLOW DISCHARGE CAN BE USED AS A NEW RECYCLING CONTROL TECHNIQUE.
BESIDES THE FUSION ORIENTED STUDIES CITED ABOVE, WE DEVELOPED AN ORIGINAL COATING METHOD, i.e., A DOUBLE PLASMA METHOD WHICH ENABLES US TO FORM DIAMOND-LIKE FILMS WITH HIGH QUALITY AND CONTROLLABILITY.

Report

(2 results)
  • 1986 Final Research Report Summary
  • 1985 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] H.Sugai;H.Kojima;T.Mori;S.Aoki;T.Okuda: Journal of Nuclear Materials. 128&129. 169-171 (1984)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Kojima;H.Sugai;T.Mori;H.Toyoda;T.Okuda: Journal of Nuclear Materials. 128&129. 965-968 (1984)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Kojima;H.Kako;M.Terada;H.Sugai;T.Okuda: Japanese Journal of Applied Physics. 24. 1432-1435 (1985)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Sugai;H.Kako;T.Okuda: Proc. 6th Int. Workshop on Inelastic Ion Surface Collisions. (Argonne). 80- (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Sugai;S.Urano;S.Amemiya;K.Ishikawa;N.Noda;T.Okuda: Japanese Journal of Applied Plhysics. 25. L749-L751 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Sugai;H.Kako;T.Okuda: Nuclear Instruments and Methods B.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Sugai;H.Kojima;H.Kako;S.Urano;T.Okuda: Journal of Nuclear Materials.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H.Sugai;S.Urano;S.Ohshita;T.Okuda: 8th International Symposium on Plasma Chemistry (Tokyo).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] 奥田孝美: 核融合研究. 57. 16-23 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] 菅井秀郎: 核融合研究. 57. (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, H. Kojima, T. Mori, S. Aoki and T. Okuda: "Composition of Boundary-Layer Hydrogen Plasma" Journal of Nuclear Materials. 128 & 129. 169-171 (1984)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Kojima, H. Sugai, T. Mori, H. Toyoda and T. Okuda: "A Mass Spectrometer for Boundary Plasma Diagnostics" Journal of Nuclear Materials. 128 & 129. 965-968 (1984)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Kojima, H. Kako, M. Terada, H. Sugai and T. Okuda: "Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge" Japanese Journal of Applied Physics. 24. 1432-1435 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, H. Kako and T. Okuda: "Carbon Thin Film Formation by Ion Beam System in a Double Plasma Device" Proc. 6th Int. Workshop on Inelastic Ion Surface Collisions (Argonne, 1986). 80 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, S. Urano, S. Amemiya, K. Ishikawa, N. Noda and T. Okuda: "Hydrogen-Reduced Carbonization by Acetylene Discharges" Japanese Journal of Applied Physics. 25. L749-L751 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, H. Kako and T. Okuda: "Ion Impact Effect on Carbon Coating Studied in a Double Plasma Device" Nuclear Instruments and Methods B. (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, H. Kojima, H. Kako, S. Urano and T. Okuda: "in-situ Coating of Carbon Thin Films in DC Toroidal Discharges" Journal of Nuclear Materials.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai, S. Urano, S. Ohshita and T. Okuda: "in-situ Carbon Coating by Toroidal Discharges Using Methane, Acetylene and Benzen" 8th International Symposium on Plasma Chemistry (Tokyo, 1987).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] T. Okuda: "Basic Properties and Internal Structure of Processing Plasmas" Kaku-Yugo Kenkyu (in Japanese). 57. 16-23 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] H. Sugai: "Formation and Application of Hard Carbon Films" Kaku-Yugo Kenkyu (in Japanese). 57. (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1986 Final Research Report Summary
  • [Publications] Japanese Journal of Applied Physics. 24-11. (1985)

    • Related Report
      1985 Annual Research Report

URL: 

Published: 1987-03-31   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi