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Application of New Materials to Designing of "Nano-mechanism"

Research Project

Project/Area Number 61302037
Research Category

Grant-in-Aid for Co-operative Research (A)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionTokyo Metropolitan University

Principal Investigator

FURUKAWA Yuji  Tokyo Metropolitan Univ., 工学部, 教授 (10087190)

Co-Investigator(Kenkyū-buntansha) MORONUKI Nobuyuki  Tokyo Metropolitan Univ., 工学部, 助手 (90166463)
OHISHI Susumu  Tokyo Metropolitan Univ., 工学部, 助教授 (70094258)
TANI Yasuhiro  Institute of Industrial Science, Univ. of Tokyo, 生産技術研究所, 助教授 (80143527)
TSUTSUMI Masaomi  Tokyo Agriculture and Technical Univ., 工学部, 助教授 (90108217)
MORIWAKI Toshimichi  Kobe Univ., 工学部, 教授 (00031104)
Project Period (FY) 1986 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥7,300,000 (Direct Cost: ¥7,300,000)
Fiscal Year 1987: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 1986: ¥5,700,000 (Direct Cost: ¥5,700,000)
Keywordsnew material / ceramics / resin concrete / linear motor / piezo-electric actuater / sintered nylon / ナイロン焼接体 / セラミクス / 送り機構 / 異方性エッチング
Research Abstract

The applications of so-called new materials; resin concrete, fine ceramics, piezo-electric actuater and so on, to the ultra precise machine tool design are investigated. Resin concrete suits for the base material of the machine mainly because of its high damping ratio and low coefficient of thermal conductivity. Its mechanical properties were tested and design rules were considered. Fine ceramics; alumina and zirconia, have high wear resistance and considered to be suitable for the slideway face material. Their frictional characteristics were tested both in atmospheric and vacuum environment, comparing with the fluoric resin. Alumina ceramics have high specific rigidity resulting in smaller deformation by its own weight and are easy to be finished precisely by lapping. Therefore it is preferable as the ultra precision linear guide structural material. Such applications were also tested. Linear motor can drive slider very reasonably without the need of screw and nut. But the slideway friction affects the stability of feed velocity and other performances. Its effect as well as the control method are investigated. Piezo-electric actuater is expected to be able to realize the precise linear feed motion with very high resolution. It was applied to the depth of cut control, showing the results of nanometer order feed with acceptable linearity. Also the piezo was applied to the precise alignment mechanism, for example, a special machine tool for optical-fiber plug machining. The workpiece deformation due to chucking should be restrained as small as possible.Porous sintered nylon were tested as the vacuum chuck face material, and the chucking properties are investigated.

Report

(2 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] Y.FURUKAWA: Annals of the CIRP.35-1. 279-282 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 古川 勇二: 精密工学会誌. 53-5. 698-700 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 森脇 俊道: 昭和62年度精密工学会秋季大会講演論文集. 335-336 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 堤 正臣: 昭和63年度精密工学会春季大会講演論文集. 1988.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 上村 康幸: 昭和61年度精密工学会秋季大会講演論文集. 699-700 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 谷 泰弘: 日本機械学会第946回講演会.構演概要集. 870-7. 17-17 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] Y. FURUKAWA et al.: "Development of Ultra Precision Machine Tool Made of Ceramics" Annals of the CIRP. 35-1. 279-282 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] T. MORIWAKI et al.: "Development of Intelligent-type Ultra Precision Tool Feed Control Syste" Preprint of JSPE. 335-336 (1987-10)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] M. TSUTSUMI et al.: "Development of Ultra Precision Lathe using the New Materials" Preprint of JSPE. (1988-3)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] Y.KAMIMURA et al.: "Application of Linear Motor to the Machine Tool (1st Report)" Preprint of JSPE. 699-700 (1986-10)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] Y.TANI: "Application of Sintered Nylon to the Vacuum Chuck" Preprint of JSME. 870-7. 17-17 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 上村ほか: 昭和61年度精密工学会秋季大会学術講演会講演論文集. 699-700 (1986)

    • Related Report
      1986 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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