The Basic Research of Three-dimensional Measurements and Assessment of High-precision Contour Profile

Research Project

Project/Area Number	61460092
Research Category	Grant-in-Aid for General Scientific Research (B)
Allocation Type	Single-year Grants
Research Field	機械工作
Research Institution	Tokyo Institute of Technology
Principal Investigator	TSUKADA Tadao Professor, Tokyo Institute of Technology, 工学部, 教授 (00016437)
Co-Investigator(Kenkyū-buntansha)	SASAJIMA Kazuyuki Assistant, Tokyo Institute of Technology, 工学部, 助手 (80170702)
Project Period (FY)	1986 – 1987
Project Status	Completed (Fiscal Year 1987)
Budget Amount *help	¥6,600,000 (Direct Cost: ¥6,600,000) Fiscal Year 1987: ¥1,700,000 (Direct Cost: ¥1,700,000) Fiscal Year 1986: ¥4,900,000 (Direct Cost: ¥4,900,000)
Keywords	Measurement / Three-dimension / Spline function / Contour profile / Form / 超精密
Research Abstract	This researching objects are to develop the three-dimensional measuring system with wide measuring range and high resolution, and to buid up the algorythm of processing contour profile measured. The main results of this research were as follows. (1) The investigators developed the orthogonal three-coordinate measuring device which had the working volume of 150mmWide x 150mmDepth x 25mmHeight with the resolution of 0.5<mu>m in the horizontal plane and 0.01<mu>m in the vertical direction. This device was made up of 16 bits micro-computer to control the device and acquirde the profile data. (2) The spline function were introduced to fit the set of profile data by using the criterion of "TREND". This method reduced the data volume to 1/4. (3) The investigators provided the software to evaluate contour profiles measured by the three-coordinate system and the poler-coordinate system.