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Real Time Electron Beam Testing Method

Research Project

Project/Area Number 61460141
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionOsaka University

Principal Investigator

FUJIOKA Hiromu  Faculty of Engineering,Osaka University, 工学部, 助教授 (40029228)

Project Period (FY) 1986 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1987: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1986: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsElectron Beam Testing / Real Time Measurement / 2次電子検出器 / 超広帯域二次電子検出器
Research Abstract

With the trend in integrated circuit developments towards faster operating speed and increasing packing density, electron beam testing by scanning electron microscope stroboscopy has becme an indispensably important method and has been widely used in the various phases of semiconductor manufacturing. This stroboscopic method, however, has a basic drawback that signals with low repetition rates or nonrepetitive signals cannot be detected.
To overcme this drawback, a real time electron beam testing system which consists of a scanning electron microscope, a broadband signal detection system, and a digitizing oscilloscope has been developed.
By using the real time system, voltage signals on the integrated circuits with low repetition rates of 0.1 ms- 20 ms can be measured with a high time resolution of 10 ns.

Report

(2 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • Research Products

    (7 results)

All Other

All Publications (7 results)

  • [Publications] H. Fujioka: J. Appl. Phys. E: Sci. Instrum. ,.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 藤岡弘: 日本学術振興会第132委員会第101回研究会資料. 17-22 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 藤岡弘: 第35回応用物理学関係連合講演会資料, 29pK5. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H,Fujioka, K,Nakamae, M,Hirota, K,Ura, and S,Takashima: "Real time electron beam testing and its applications" J. Appl. Phys. E. Sci. Intrum., to be submitted.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H,Fujioka, K,Nakamae, M,Hirota, K,Ura, and S,Takashima: "Real time electron beam testing and its applications" Proc. Symposium on Electron beam Testing, Osaka. 17-22 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H,Fujioka, K,Nakamae, M,Hirota, K,Ura, and S,Takashima: "Wideband signal detection system for real time electron beam testing" Joint Conv. Record of Japanese Society of Applied Physics, No. 29pK5. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 藤岡弘: 日本学術振興会第132委員会研究会(電子ビームテスティングシンポジウム).

    • Related Report
      1986 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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