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3D microscopy by using acoustic wave and electron beam

Research Project

Project/Area Number 61550285
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionOsaka Institute of Technology

Principal Investigator

SUGA Hiroshi  Professor,Faculty of Engineering,Osaka Institute of Technology, 工学部, 教授 (80079574)

Co-Investigator(Kenkyū-buntansha) KOTERA Masatoshi  Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (40170279)
OCHI Kanyoshi  Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 講師 (80079582)
UMEDA Wataru  Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 講師 (30079579)
NISHIKAWA Haruyoshi  Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (00079568)
IMAI Kenzo  Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (50079571)
Project Period (FY) 1986 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1987: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1986: ¥800,000 (Direct Cost: ¥800,000)
KeywordsAcoustic microscopy / 3D Microscopy / 赤外線顕微鏡 / ホログラム顕微鏡 / 超音波ホログラム顕微鏡
Research Abstract

The main of this project is to get some bacic concepts of three dimensional microscopy which is especially for observing inner structure of various small devices such as integrated circuits. We obtained the following two new resulys. 1. An acoustic image arising from the three dimensional stucture was observed. Two acoustic transtic transducers and one specially made piezoelectric film were set on each side of right prism. In this arrangement,acoustic image on the film was observed by the scanning electrn microscope. 2. Because infrared light penetratc some of specimens like silicon wafer as good as acoustic wave,it is also used to see through the inside of the specimen three dimensionally with the stereoscopic technique.

Report

(2 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • Research Products

    (2 results)

All Other

All Publications (2 results)

  • [Publications] Masatoshi Kotera, Hiroshi Suga: "A simulation of keV electron scattering in a charged-up spacimen" Journal of Applied Physics. 63,No.2. 261-268 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 菅博,小寺正敏: 電子情報通信学会論文誌. 70. (1987)

    • Related Report
      1986 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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