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Developmental Research on the Magnetic-Field-Superimposed Field Emission Gum for Low Accelerating Voltage

Research Project

Project/Area Number 61850011
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 物理計測・光学
Research InstitutionNagoya University

Principal Investigator

MARUSE Susumu  Faculty of Engineering, Nagoya University. Professor, 工学部, 教授 (20022981)

Co-Investigator(Kenkyū-buntansha) HANAI Takaaki  Fac. of Eng., Nagoya University. Research Associate, 工学部, 助手 (00156366)
SHIMOYAMA Hiroshi  Fac. of Eng., Nagoya University. Associate Professor, 工学部, 助教授 (30023261)
UCHIKAWA Yoshiki  Faculty of Engineering, Nagoya University. Professor, 工学部, 教授 (20023260)
HIBINO Michio  Faculty of Engineering, Nagoya University. Professor, 工学部, 教授 (40023139)
Project Period (FY) 1986 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥11,500,000 (Direct Cost: ¥11,500,000)
Fiscal Year 1987: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1986: ¥9,500,000 (Direct Cost: ¥9,500,000)
KeywordsElectron Gum / Loe Voltage Electron Gun / Field Emission Gun / Magnetic-Field-Superimposed Electron Gun / Accelerating Lens / Decelerating Lens / 超高真空
Research Abstract

A new field emission gum (FEG) has been developed in which a magnetic field is superimposed upon th eelectric field in the diode region between the FE tip and the first anode. Both theoretical and experimental studiec on the electron opeical properties of the FEG habe been conducted, and are summatized as follows:
1. Electron optical propertied of the diode region are almost uniquely determined by thr excitationparameter defined by k =NI/ ROO<V_1>V1, where NI is the value of Ampere turuns equivalent to an effetice magnetic field in the diode region and V_1 is the EF tip-to-fitst anode voltage.
2. The angular confinement of the electron beam in the diode region is greatly improved by superimposing the magnetic field, so that an effective use can be made of the emission current.
3. The source position produced by the diode region is arbitrarily controlled by changing the value od the excitaion parameter k, which cancels great invonveniences arising from the change of the electron optical properties od the accelerating/decelerationg region berween the first and second anodes when the voltage ratio V_2/V_1 is changed, where V_2 is the FE tip-to second anode volrage.
4. The beam current which can be extracted from the FEG througn the first and second anode apertures can greatly be incresed by superimposing the magnetic field.
5. An optimum value of the excitation parameter whick maked the extracted beam current meximum can be determined as a function of the voltage ratio V_2/V_1.
6. The performance of the probe forming system has been found to be greatly improved when it is incorporated with the newly developed magnetic-field-supermposed FEG.

Report

(2 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • Research Products

    (49 results)

All Other

All Publications (49 results)

  • [Publications] 飯吉 僚: J.Electron Microscopy,Supplement. 35. 235-238 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: J.Electron Microscopy,Supplement. 35. 255-258 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 花井 孝明: J.Electron Microscopy,Supplement. 35. 307-308 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 杉山 せつ子: J.Electron Microscopy,Supplement. 35. 429-430 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: J.Electron Microscopy,Supplement. 35. 431-432 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 杉山 範雄: J.Electron Microscopy,Supplement. 35. 647-648 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 丸勢 進: J.Electron Microscopy,Supplement. 35. 901-906 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: J.Electron Microscopy,Suoolement. 35. 919-920 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: 電子顕微鏡. 21. 99-104 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 花井 孝明: Ultramicroscopy. 20. 329-336 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 杉山 範雄: J.Electron Microscopy. 35. 9-18 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: J.Electron Microscopy. 35. 422-425 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 丸勢 進: 化学工学. 50. 286-289 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 杉山 範雄: Micro Beam Analysis '87. 79-81 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 池田 晋: 応用物理. 56. 97-105 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 久野 裕次: IEEE Trans.Magnetics. MAG-24. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 杉山 範雄: Scanning. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 丸勢 進: Hitachi Instrument News(Electron Microscopy Edition). 11. 10-14 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 丸勢 進: Hawaii Seminar on Electron Microscopy. 15-16 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 下山 宏: Hawaii Seminar on Electron Microscopy. 21-22 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 飯吉 僚: J.Electron Microscopy. 37. 1-8 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 日比野 倫夫: Proc.4th Asia-Pacific Conf.Electron Microscopy. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 丸勢 進: Proc.4th Asia-Pacific Conf.Electron Microscopy. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] IIYOSHI, Ryo: "point Cathode Electron Gum Using Electron Beam Heating" J. Electron Mictoscopy, Supplement. 35. 235-238 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HIBINO, Michio: "Foil Lens - Correction of Spherical Aberration" J. Electron Micrscopy, Supplement. 35. 255-258 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HANAI, Takaaki: "A Shadow Image Method for Measutements of Axial Geometrical Aberrations of a probe Forming Lens" J. Electron Mictoscopy, Supplement. 35. 307-308 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SUGIYAMA, Setsuko: "Calculations of Discerimination Limit in Bright and Dark Field STEM" J. Electron Microscopy, Supplement. 35. 429-430 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HIBINO, Michio: "Resolution in scattering Contrast Imaging by Means of Bright and Dark Field STEM" J. Electron Microsopy, Supplement. 35. 431-432 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SUGIYAMA, Norio: "Contrase Mechanism of SEM Images over the Passivation Layer of Micro Electronic Devices" J. Electron Microscopy, Supplement. 35. 647-648 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] MARUSE, Susumu: "A High Voltage Scanning Transmission Electron Microscope Developed at Nagoya University" J. Electron Microscopy, Supplement. 35. 901-906 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HIBINO, Michio: "Observatyion of Atomic Number Deperndent Contrast Using Signal Manipulation in High Voltage STEM" J. Electron Microscopy, Supplement. 35. 919-920 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HANAI, Takaaki: "Measurement of Axial Geometrical Aberrations of the probe-Forming Lens by Means of the Shadow Image of Fine Particles" Ultramictoscopy. 20. 329-336 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SUGIYAMA, Norio: "Low Voltage SEM Inspection of Micro Electronic Devices" J. Electron Microscopy. 35. 9-18 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HIBINO, Michio: "High Voltage Electron Energy Loss Spectroscopy Evaluated from Signal to Noise Ratio" J. Electron Mictoscopy. 35. 422-425 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SUGIYAMA, Norio: "Voltage Contrast Mechanism of SEM Images over Passivated Devices" Micro Beam Analysis '87. 79-81 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] KUNO, Yuji: "Fundamental Study for High Accuracy Calculation of 3-D Electromagnetic Field" IEEE Trans. Magnetics. MAG-24. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SUGIYAMA, Norio: "SEM Voltage Contrast Mechanism of Passivated Devices" Scanning. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] MARUSE, Susumu: "A High Voltage Scanning Transmission Electron Mictoscope Developed at Nagoya University" Hitachi Instrument News (Electron Microsopy Edition). 11. 10-14 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] MARUSE, Susumu: "Construction of a High Voltage Scanning Transmission Electron Microscope" Hawaii Seminar on Electron Microscopy. 15-16 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] SHIMOYAMA, Hiroshi: "Development of Field Emission for i MV Electron Microscope" Hawaii Seminar on Electron microscopy. 21-22 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] IIYOSHI, Ryo: "Point Cathode Electron Gum Using Electron Bombardment for Cathode Tip Heating" J. Electron Microscopy. 37. 1-8 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] HIBINO, Michio: "Reduction of Statistical Noise of Electrons in STEM" Proc. 4th Asia-Pacific Conf. Electron Microscopy. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] MARUSE, Susumu: "New Trenc in HV-STEM - Develpment of Field Emission Gum for HVEM" Proc. 4th Asia-Pacific Conf. Electron Mictoscopy. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] N.Sugiyama: J.Electron Microscopy. 35. 9-18 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] T.Hanai: Ultramicroscopy. 20. 329-336 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] R.Iiyoshi: J.Electron Microscopy,Supplement. 35. 235-238 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] M.Hibino: J.Electron Microscopy,Supplement. 35. 255-258 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 内川嘉樹: 電子顕微鏡. 21. 43-50 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 日比野倫夫: 電子顕微鏡. 21. 99-104 (1986)

    • Related Report
      1986 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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