Development of Zr/W - Gun for nano-meter Auger Electron Microprobe
| Project/Area Number |
61850013
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
応用物理学一般(含航海学)
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| Research Institution | Osaka University |
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Principal Investigator |
SHIMIZU Ryuichi Osaka University Faculty of Engineering, professor, 工学部, 教授 (40029046)
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| Co-Investigator(Kenkyū-buntansha) |
田村 伸昭 日本電子株式会社, EOD本部, 係長
TAMURA Nobuaki Japan Electron Optics Laboratories Inc., chief, EM-Group
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| Project Period (FY) |
1986 – 1987
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| Project Status |
Completed (Fiscal Year 1988)
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| Budget Amount *help |
¥8,700,000 (Direct Cost: ¥8,700,000)
Fiscal Year 1987: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1986: ¥7,500,000 (Direct Cost: ¥7,500,000)
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| Keywords | High Brightness Emitter / T.F. Emission / ジルコニウム被覆タングステン / 高輝度電子鏡 |
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| Research Abstract |
A new type high brightness electron gun was designed for developing a nano-meter Auger electron microprobe. This gun was equiped with a Zr/W - tip consisting of a (100) - oriented tungusten emitter with an overlayer of zirconium. The emission properties was investigated to find that the work function of the Zr/W - tip operatinf in extended Schottky emission region was coarsely estimated to be 3.2eV. The emission properties of the Zr/W - tip has been turned to be excellent as a stable and high brightness emitter, most suitable for the present purpose. This electron gun system was mounted on a commercial type scanning electron microscope, JSEM-840. The net performance as a nano-meter Auger electron microprobe has been under examination. The assessment will be published shortly.
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Report
(2 results)
Research Products
(11 results)
