• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Improvenment of Measuring Capability of scanning Electron Microscope for Surface Form.

Research Project

Project/Area Number 61850023
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionUniversity of Tokyo

Principal Investigator

HISAYOSHI SATO  Professor, Institute of Industrial Science, University of Tokyo, 生産技術研究所第二部, 教授 (10013103)

Co-Investigator(Kenkyū-buntansha) JUNICH IKENo  Research Assistant, 生産技術研究所第二部, 助手 (10184441)
MASANORI O-HORI  Research Assistant, 生産技術研究所第二部, 助手 (90143528)
YASUHITO TANI  Associate professor, Institute of Industrial Science, University of Tokyo, 生産技術研究所第二部, 助教授 (80143527)
Project Period (FY) 1986 – 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥9,700,000 (Direct Cost: ¥9,700,000)
Fiscal Year 1987: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1986: ¥8,300,000 (Direct Cost: ¥8,300,000)
KeywordsScanning Electron Microscope / Machining / Backscatterd Electron Signal / Surface Form / Detection of Normal / Image Processing / Presonal Computer / Pressed Mark of Vickers Hardness Test / Emission Voltage / 検出器・試料間距離 / 反射電子画像 / 表面粗さ / ディジタル処理 / 3次元表示 / 加工精度計測
Research Abstract

Basic investigation of measuremtnt of surface roughness and surface form by scanning electron microscope has been conducted, however, is was restricted by the conditions that the table foe the material was fixed, emission voltage of the electoron beam was kept constant, the work distance between the material and the detectors was also kept constant, and the marnification factor of the observed image was suppressed at rather small. Consequently the correlation of these conditions and the properties of the materials with the characteristic of the backscattered electron signal was not definite. The influence on the characteristic by the materials and accuracy of the measurement was not surriciently verified.
In this project the measuring method of surface form which uses 4 detectors and ball material as stanfdard was extensively developed to identify these characteristics. Each semi-condactor detector of 4 was made as 100mmx10mm which could increase sensitibity of detection and could obtain clear image for large marnification factor. The beam couls be scanneds synchronizing with the external signal so that the objective to measure could be effectively located within the scope. The signal to be processed was taken into personal computer. The measurement system was intergrated so that frequency of AD conversion may be synchoronized with the scanning frequency in SEM, the sensitivity may be compensated for 4 detectors, noise may be suppressed throush the amplification of very weak signal.
Signal characteristic for the distance between the work and detectors was shown that there is a distance at with the sensitivity becomes highest. Is was also verified that the signal representing surface form was not affected by the emission voltage of electron beam. Pressed mark of vickers hardness test and mold for compact disc were observed and the isometric forms were obtained.

Report

(2 results)
  • 1987 Final Research Report Summary
  • 1986 Annual Research Report
  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 大堀真敬,佐藤壽芳: 機械学会論文集C. 52-483. 2974-2980 (1986)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 大堀真敬,佐藤壽芳: 日本接着協会誌. 23-4. 152-159 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H.Sato and M.O-hori: Trans.ASME,J.Eng.Ind.,. 109-2. (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 佐藤壽芳,大堀真敬: 生産研究. 39-6. 237-240 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 佐藤壽芳: 生産研究. 39-6. 201-208 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] 佐藤壽芳: 機械と工具. 31-11. 42-48 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] M. O-hori and H. Sato: "Microscope of Surface Shape by Scenning Electron Microscope Using Detection of Normal." Trans. JSME, Ser. C,. 52. 2974-2980 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H. Sato and M. O-hori: "Surface Roughness Measutement Using Secnning Electron Microscope with Digital Processing." Trans. ASME, J. Eng. Ind.,. 109. 106-111 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H. Sato: "Noncontact Surface Profile Measurement for Ultra Precision Mechning," Seisan-kenkyu. 39. 201-208 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] M. O-hori and H. Sato: "Measurement of Surface Form by Scanning Microscope---Separation of Surface Form Signal from Bakscattered Electron Signal," Seisan-Kenkyu. 39. 237-240 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1987 Final Research Report Summary
  • [Publications] H.Sato;M.O-hori: Annals CIRP. 35. 365-368 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 佐藤壽芳: 工作機械'86,高精密測定(大河出版). 71-76 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] 大堀真敬,佐藤壽芳: 日本機械学会論文集C編. 52. 2974-2980 (1986)

    • Related Report
      1986 Annual Research Report
  • [Publications] H.Sato;M.O-hori: PE-2B,ASME WAM. (1986)

    • Related Report
      1986 Annual Research Report

URL: 

Published: 1987-03-31   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi