| Project/Area Number |
61850138
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
工業分析化学
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| Research Institution | University of Tokyo |
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Principal Investigator |
NIHEI Yoshimasa Institute of Industrial Science, University of Tokyo, Professor, 生産技術研究所, 教授 (10011016)
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| Co-Investigator(Kenkyū-buntansha) |
八幡 需 日本電子, 分析機器技術本部, 本部長
KAWAI Jun Institute of Industrial Science, University of Tokyo, Technical Official, 生産技術研究所, 教務職員 (60191996)
OWARI Masanori Institute of Industrial Science, University of Tokyo, Research Scientist, 生産技術研究所, 助手 (70160950)
YAHATA Motomu JEOL, Analytical Instruments Technical and Engineering Division, General Manager
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| Project Period (FY) |
1986 – 1988
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| Project Status |
Completed (Fiscal Year 1988)
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| Budget Amount *help |
¥25,000,000 (Direct Cost: ¥25,000,000)
Fiscal Year 1988: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 1987: ¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1986: ¥13,600,000 (Direct Cost: ¥13,600,000)
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| Keywords | Electron Spectrometer / Toroidal Analyzer / Energy Distribution / Angular Distribution / Multichannel Detection / Position Sensitive Detector / X-Ray Photoelectron Spectroscopy / X線光電子回折 / X線光電子回析 |
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| Research Abstract |
The aim of this project is to develop a novel charged particle spectrometer which can detect energy and angular distributions simultaneously in order to measure angular distribution of x-ray photoelectrons rapidly and precisely. An electrostatic analyzer with toroidal 180゜ deflection angle is designed and constructed for this purpose. Followings are typical performances of the prototype analyzer.
1. Energy Resolution:
Energy resolution of the prototype analyzer is estimated by obtaining energy spectra of elastically scattered electrons. Observed full width at half maximum of elastic peak in multichannel-detected energy spectrum is 1.4 eV when the pass-energy of the analyzer is 200 eV. Considering that the width of elastically scattered electrons is finite, true resolution of the prototype analyzer is estimated to be greater than 200.
2. Angular Resolution:
Polar angle resolution is estimated by measuring LEED spots from molybdenum disulfide surface. Observed width of specular beam is 2゜. Considering that the width of LEED spot is finite, true polar angle resolution is estimated to be less than 1゜. Azimuthal angle resolution of the prototype spectrometer is estimated from geometric parameters of the entrance slit. Geometry defines that azimuthal angle resolution is less than 3゜.
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