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混晶の物性とその制御・設計に関する研究

Research Project

Project/Area Number 62104007
Research Category

Grant-in-Aid for Special Project Research

Allocation TypeSingle-year Grants
Research InstitutionKinki University

Principal Investigator

犬石 嘉雄  近畿大学, 理工学部, 教授 (90028902)

Co-Investigator(Kenkyū-buntansha) 白藤 純嗣  大阪大学, 工学部, 教授 (70029065)
新井 夫差子  東京大学, 工学部, 助手 (10010927)
赤崎 勇  名古屋大学, 工学部, 教授 (20144115)
長谷川 文夫  筑波大学, 物質工学系, 助教授 (70143170)
井上 正崇  大阪工業大学, 工学部, 教授 (20029325)
Project Period (FY) 1987
Project Status Completed (Fiscal Year 1987)
Budget Amount *help
¥24,300,000 (Direct Cost: ¥24,300,000)
Fiscal Year 1987: ¥24,300,000 (Direct Cost: ¥24,300,000)
Keywordsクロライド法 / 混晶半導体表面安定化 / 広バンド・ギャップ化合物半導体 / 表面保護膜 / 2次元電子ガス / ホット・エレクトロン輸送 / EL2欠陥 / ヘテロ接合界面・表面層原子配列
Research Abstract

本年度得られた主な成果は次の通りである.
1.猛毒のアルシン(AsH_3)の代りにクロライド(AsCl_3)を用いたAlGaAsのクロライド法気相成長が確立された. (長谷川)
2.混晶半導体表面安定化のために広バンド・ギャップ化合物半導体AlN(As)膜のプラズマCVDやAsPn膜の表面保護膜の形成条件が確立され, 後者ではInGaAsP表面でNss=10^<12>/cm^2程度のMIS構造を得ている. (新井, 長谷川)
3.LPE法によるInGaAsP/GaAs界面の特性のホール効果, DLTSによる欠陥測定を行ない, 非混和領域でも温度で格子整合をとることによって混晶を成長することに成功した. (赤崎)
4.GaAlAs/GaAsでの二次元電子ガスのホット・エレクトロン輸送を研究し, 実空間遷移を含めて理論との対比を行なった. (井上, 犬石)
5.InGaAs系での直接→間接形遷移にともなうキャリア寿命の変化を求め, 理論と比較した. (白藤)
6.InGaAsで遠赤外サイクロトロン共鳴実験を行ない不純物準位, 合金散乱などを解明した.
7.共鳴ラマン散乱の実験からEL2欠陥の準位構造を明らかにした. (大倉)
8.ナノメータ以下の精度でヘテロ接合の表面層, 界面の原子配列を明らかにし, また界面でのバンド端不連続及び化学結合状態をも明らかにした. (岩見)

Report

(1 results)
  • 1987 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] M.Yamagami: Reports of O.I.T. Central Lab.20. 221-230 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] K.Makiyama: Solid State Electronics. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Cho: Solid State Electronics. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] F.Hasegawa: Jpn.J.Appl.Phys.26. L1448-1450 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] F.Hasegawa: Jpn.J.Appl.Phys.26. 1555-1560 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] F.Hasegawa: J.Electrochemical Society. 134. 1548-1553 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] F.Hasegawa: Jpn.J.Appl.Phys.27. 254-257 (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] 朱 勤生: Semiconductor Science and Technology. 2. 363-370 (1987)

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      1987 Annual Research Report
  • [Publications] 小出康夫: J.Appl.Phys.61. 4540-4543 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 田中成泰: to be published in J.Crystal Growth. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Takahashi: Proc.of 1987 International Symposium on Gallium Arsenide and Related Compounds. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Iwase: Appl.Phys.Lett.

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Iwase: Appl.Phys.Lett.

    • Related Report
      1987 Annual Research Report
  • [Publications] A.Aoki: Electronics Letters. 23. 891-892 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] J.Shirafuji: Thin Solid Films. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] J.Shirafuji: Proc.Fall Meeting of Electrochem.Soc., Honolulu,Hawaii(Oct.,1987). (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] K.Fujii: Solid State Communication. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] K.Fujii: 19th Int.Conf.Phys.Semiconductors(Aug.1988,Warsaw).

    • Related Report
      1987 Annual Research Report
  • [Publications] H.Ohkura: Seventh Symposium on Alloy Semiconductor Physics and Electronics,Mar.16〜18,Kyoto. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Mori: Jpn.J.Appl.Phys.

    • Related Report
      1987 Annual Research Report
  • [Publications] H.Ohkura: Jpn.J.Appl.Phys.

    • Related Report
      1987 Annual Research Report
  • [Publications] H.Ohkura: Jpn.J.Appl.Phys.26-9. 1422-1428 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] Y.Mori: J.of Lumin.38. 159-163 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] M.Iwami: Thin Solid Films. 146. 291-297 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] M.Iwami: Rep.Res.Lab.Surf.Sci. 6. (1987)

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      1987 Annual Research Report
  • [Publications] M.Iwami: Surf.Sci.

    • Related Report
      1987 Annual Research Report
  • [Publications] M.Iwami: Phys.Rev.B.

    • Related Report
      1987 Annual Research Report
  • [Publications] M.Iwami: Thin Solid Films.

    • Related Report
      1987 Annual Research Report
  • [Publications] M.Iwami: Appl.Phys.Lett.

    • Related Report
      1987 Annual Research Report
  • [Publications] 赤崎 勇: "液相成長における混晶の組成変動" 工業調査会 西澤潤一編 半導体研究27, 32 (1988)

    • Related Report
      1987 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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