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Research on High Resolution Electron Microscope Observations without Specimen Damage

Research Project

Project/Area Number 62420021
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 物理計測・光学
Research InstitutionNagoya University

Principal Investigator

HIBINO Michio  Nagoya Univ., Engineering, Professor, 工学部, 教授 (40023139)

Co-Investigator(Kenkyū-buntansha) UCHIKAWA Yoshiki  Nagoya Univ., Engineering, Professor, 工学部, 教授 (20023260)
HANAI Takaaki  Nagoya Univ., Engineering, Assistant Professor, 工学部, 講師 (00156366)
SUGIYAMA Setsuko  Nagoya Univ., Engineering, Research Associate, 工学部, 助手 (00115586)
SHIMOYAMA Hiroshi  Nagoya Univ., Engineering, Associate Professor, 工学部, 助教授 (30023261)
MARUSE Susumu  Nagoya Univ., Engineering, Professor, 工学部, 教授 (20022981)
Project Period (FY) 1987 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥19,300,000 (Direct Cost: ¥19,300,000)
Fiscal Year 1989: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1988: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1987: ¥14,400,000 (Direct Cost: ¥14,400,000)
KeywordsHigh voltage STEM / Field emission electron gun / High resolution observation / Specimen damage / Signal electron detection / Manipulation among signal electrons / Image processing / 高解像度電子顕微鏡観察 / 信号電子演算 / 像のSN比 / 走査透過電子顕微鏡 / YAG単結晶シンチレータ / 信号間演算処理 / 信号演算処理 / ノイズ除去
Research Abstract

1. Field emission electron gun for high voltage scanning transmission electron microscope A field emission electron gun was mounted on the 10OOkV scanning transmission electron microscope (STEIM), after improving a vacuum system and establishing a monitor-control system for monitoring and controlling the operating condition of the gun. A stable field emission of more than 50muA was obtained with a <310> orientation tungsten tip.
2. Detection of various signal electrons A new YAG single crystal scintillator was developed for high-sensitivity electron detector which gives the sensitivity of 10 times as much as a conventional powdered-phosphor scintillator. A method was established as well for detecting inelastically scattered and unscattered electrons with high accuracy, by improving an electron energy analyzing system.
3. Signal manipulation A theoretical investigation for better image quality of specimen structure revealed an appropriate manipulation among elastically scattered, inelasti … More cally scattered and unscattered electrons. A signal manipulation system was established by developing an interface for effective data acquisition and a system for manipulating among various electron signals. Signal manipulation was then applied to practical electron microscope observations, which verified the effectiveness of signal manipulation for noise elimination, contrast enhancement of specific specimen structure, identification of constituting elements and so on.
4. Influence of current density of illumination electrons on the specimen damage and high resolution observations without damage Studies on intensity change of electron diffraction pattern of hexatriacontane indicated that STEM illumination with a fine electron probe of high current density gives less specimen damage than long-time illumination of conventional electron microscopy with low current density. It was found as well that high resolution STEM observations without specimen damage are possible for fine platinum particles in a carbon film which are easily subject to damage of migration, adhesion and crystallization in conventional electron microscopy mode observations. Less

Report

(4 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • 1987 Annual Research Report
  • Research Products

    (61 results)

All Other

All Publications (61 results)

  • [Publications] 丸勢進: "Construction of a high voltage scanning transmission electron microscope" Hawaii Seminar on Electron Microscopy. 15-16 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 下山宏: "Developement of field emission gun for 1MV electron microscope" Hawaii Seminar on Electron Microscopy. 21-22 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 丸勢進: "A High Voltage Scanning Transmission Electron Microscope Developed at Nagoya University" Hitachi Instrument News. 10-14 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 杉山範雄: "Voltage Contrast Mechanism of SEM Images Over Passivated Devices" Microbeam Analysis 1987. 79-81 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 日比野倫夫: "電子レンズの球面収差低減の話" 日本電子顕微鏡学会分科会資料. 5-8 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 丸勢進: "History of Electron Microscopes in Japan" 電子顕微鏡,Supplement. 22. 28-32 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 池田晋: "低加速SEMによる半導体デバイス二次電子像のコントラストメカニズム" 応用物理. 56. 97-105 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 飯吉僚: "Point Cathode Electron Gun Using Electron Bombardment for Cathode Tip Heating" Jounal of Electron Microscopy. 37. 1-7 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 日比野倫夫: "Reduction of Stastical Noise of Electrons in STEM" Electron Microscopy 1988. 63-64 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 飯吉僚: "Point Cathode Electron Gun Using Electron Beam Heating:Numerical Analysis of Bombarding Electron Beam for Cathode Tip Heating" Electron Microscopy 1988. 69-70 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 丸勢進: "New Trend of HV-STEM-Development of Field Emission Gun for HVEM" Electron Microscopy 1988. 207-214 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 下山宏: "磁界重畳型電界放出電子銃の電子光学的特性の理論的解析" 豊田研究報告. 41. 57-64 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 久野裕次: "Fundamental Study for High Accuracy Calculation of 3-D Electromagnetic Field" IEEE Transactions on Magnetics. 24. 295-298 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 杉山範雄: "SEM Voltage Contrast Mechanism of Passivated Devices" Scanning. 10. 3-8 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 下山宏: "超高圧電子顕微鏡用電界放出電子銃の開発" 学振141委員会第60回研究会資料. 32-37 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 日比野倫夫: "入射電子統計ノイズの除去によるSTEMの像質の改善" 学振141委員会第61回研究会資料. 39-44 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 下山宏: "Emitter and Electron Gun" Journal of Electron Microscopy,Supplement. 38. S1-S9 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 石川晃: "検出・記録" 日本電子顕微鏡学会分科会資料. 20-25 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 石川晃: "Detection and Recording" Journal of Electron Microscopy,Supplement. 38. S23-S29 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 日比野倫夫: "A High-Voltage Scanning Transmission Electron Microscope at Nagoya University" Journal of Electron Microscopy Technique. 12. 296-304 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 児玉哲児: "A Novel Technique for Voltage Measurements of Passivation Layer in SEM" Journal of Electron Microscopy. 38. 6-15 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 杉山範雄: "A Line Cathode Electron Gun of Pierce-Type Design" Japanese Journal Applied Physics. 28. 267-273 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Susumu Maruse: "Construction of a high voltage scanning transmission electron microscope" Hawaii Seminar on Electron Microscopy. 15-16 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Hiroshi Shimoyama: "Development of field emission gun for 1MV electron microscope" Hawaii Seminar on Electron Microscopy, p.21-228 (1987).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Susumu Maruse: "A High Voltage Scanning Transmission Electron Microscope Developed at Nagoya University" Hitachi Instrument News, p.10-14, (1987).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Norio Sugiyama: "Voltage Contrast Mechanism of SEM Images over Passivated Devices" Microbeam Analysis 1987, p.79-81, (1987).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Ryo Iiyoshi: "Point Cathode Electron Gun Using Electron Bombardment for Cathode Tip Heating" Journal of Electron Microscopy. Vol.37, No.1. 1-7 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Michio Hibino: "Reduction of Statistical Noise of Electrons in STEM" Electron Microscopy 1988, p.63-64, (1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Ryo Iiyoshi: "Point Cathode Electron Gun Using Electron Beam Heating: Numerical Analysis of Bombarding Electron Beam for Cathode Tip Heating" Electron Microscopy 1988, p.69-70, (1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Susumu Maruse: "New Trend of HV-STEM -Development of Field Emission Gun for HVEM-" Electron Microscopy 1988, p.207-214, (1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Yuji Kuno: "Fundamental Study for High Accuracy Calculation of 3-D Electromagnetic Field" IEEE Transactions on Magnetics, Vol.24, No.1 p.295-298(1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Norio Sugiyama: "SEM Voltage Contrast Mechanism of Passivated Devices" Scanning, Vol.10, No.1, p.3-8, (1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Hiroshi Shimoyama: "Emitter and Electron Gun" Journal of Electron Microscopy, Vol.38, suppl., p.S1-S9, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Akira Ishikawa: "Detection and Recording" Journal of Electron Microscopy, Vol.38, suppl., p.S23-29, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Michio Hibino: "A High -Voltage Scanning Transmission Electron Microscope at Nagoya University" Journal of Electron Microscopy Technique, Vol.12 No.3, p.296-304, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Tetsuji Kodama: "A Novel Technique for Voltage Measurements of Passivation Layer in SEM" Journal of Electron Microscopy, Vol.38, No.1, p.6-15, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Norio Sugiyama: "A Line Cathode Electron Gun of the Pierce-Type Design" Japanese Journal of Applied Physics, Vol.28, No.2, p.267-273, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 下山宏: "超高圧電子顕微鏡用電界放出電子銃の開発" 学振141委員会第60回研究会資料. 32-37 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 日比野倫夫: "入射電子統計ノイズの除去によるSTEMの像質の改善" 学振141委員会第61回研究会資料. 39-44 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 下山宏: "Emitter and Electron Gun" Journal of Electron Microscopy,Supplement. 38. S1-S9 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 石川晃: "検出・記録" 日本電子顕微鏡学会分科会資料. 20-25 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 石川晃: "Detection and Recording" Journal of Electron Microscopy,Supplement. 38. S23-S29 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 日比野倫夫: "A High-Voltage Scanning Transmission Electron Microscope at Nagoya University" Journal of Electron Microscopy Technique. 12. 296-304 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 児玉哲児: "A Novel Technique for Voltage Measurements of Passivation Layer in SEM" Journal of Electron microscopy. 38. 6-15 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 杉山範雄: "A Line Cathode Electron Gun of the Pierce-Type Design" Japanese Journal of Applied Physics. 28. 267-273 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 日比野倫夫: Electron Microscopy 1988. 63-64 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 丸勢進: Electron Microscopy 1988. 207-214 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 下山宏: 豊田研究報告. 41. 57-64 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 日比野倫夫: Journal of Electron Mictoscopy Technique. 12. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 下山宏: Suppl.J.Electron Microscopy. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 石川晃: Suppl.J.Electron Microscopy. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 丸勢 進: Abstracts of the Hawaii Seminar on Electron Microscopy. 15-16 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 下山 宏: Abstracts of the Hawaii Seminar on Electron Microscopy. 21-22 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 丸勢 進: Hitachi Instrument News. 11. 10-14 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 日比野倫夫: 日本電子顕微鏡学会分科会予稿集. 5-8 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 池田 晋: 応用物理. 56. 97-105 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 杉山範雄: Micro Beam Analysis ′87. 79-81 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 久野裕次: IEEE Trans. Magnetics. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] 日比野倫夫: Proc. 4th Asia-Pacific Conference on Electron Microscopy. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] 丸勢 進: Proc. 4th Asia-Pacific Conference on Electron Microscopy. (1988)

    • Related Report
      1987 Annual Research Report
  • [Publications] 杉山範雄: Scanning. (1988)

    • Related Report
      1987 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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