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MECHANISM AND CONTROL OF CLEAN ROOM ROBOTS

Research Project

Project/Area Number 62460104
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械力学・制御工学
Research InstitutionUNIVERSITY OF TOKYO, Institute of Industrial Science

Principal Investigator

HIGUCHI Toshiro  INSTITUTE OF INDUSTRIAL SCIENCE, UNIVERSITY OF TOKYO, 生産技術研究所, 助教授 (10111569)

Co-Investigator(Kenkyū-buntansha) OKA Koichi  INSTITUTE OF INDUSTRIAL SCIENCE, UNIVERSITY OF TOKYO, 生産技術研究所, 助手 (10160649)
Project Period (FY) 1987 – 1988
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 1988: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1987: ¥3,700,000 (Direct Cost: ¥3,700,000)
KeywordsMagnetic Bearing / Robotics / Clean Room / Vacuum / Contactless Joints / Micro Manipulation / 力制御 / 振動防止 / 精度位置決め / マニピュレータ
Research Abstract

In this research, a new type of clean room robot is developed. The developed clean room robot uses magnetic bearings as its joints supporting with no mechanical contacts. It can avoid dust and oil generation from its joints. In addition to the cleanliness, the robot is expected to have many advantages and functions in its motion control, such as, no problems arising from friction of mechanical contact, function of force and stiffness control, function of micro manipulation of the tip, function of measuring the external force, and active vibration control.
The following results are obtained in this research.
1. The structure of robot joint using magnetic bearings is studied from the mechanism and control points of view. The structure of robot manipulator that is suitable for using magnetic bearing joints is investigated.
2. A robot manipulator using magnetic bearing joints which are installed at a part of and the most important joints is designed and built. This prototype robot has parallel link arm mechanism and two motors. The tip of the manipulator is levitated by magnetic bearing joints and the functions can be examined.
3. The experimental results confirm the realizability of the proposed robot manipulator that is supported by magnetic bearings. The active control of magnetic bearing joints makes the robot to have the above-mentioned advantages and functions.
As the further study, the following investigations are planned, (1)evaluating the performance of magnetic bearing joints quantitatively, (2)taking the robot dynamics into consideration, aiming at the reduction of vibration at high speed motion, (3)development the perfect clean room robot that the driving and supporting mechanism of all joints has no mechanical contact.

Report

(3 results)
  • 1988 Annual Research Report   Final Research Report Summary
  • 1987 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 樋口俊郎: 生産研究. 40. 512-515 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: Proceedings of the USA-Japan Symposium on Flexible Automation. 459-466 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 第31回システムと制御研究発表講演会講演論文集. 71-72 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 昭和62年度精密工学会秋期大会学術講演会論文集. 117-118 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 第5回日本ロボット学会学術講演会予稿集. 405-406 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 昭和63年度精密工学会秋期大会学術講演会講演論文集. 865-866 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 第6回日本ロボット学会学術講演会予稿集. 419-420 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 生産研究. 39. 209-214 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 潤滑. 33. 15-20 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Magnetic Bearings;Applications of Magnetic Bearings in Robotics" Springer-Verlag, 390 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Development of Clean Room Robot Using Magnetic Bearings" SEISAN-KENKYU. 40. 512-515 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Clean Room Actuators" SEISAN-KENKYU. 39. 209-214 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Prospect of Magnetic Bearing" JOURNAL OF JAPAN SOCIETY OF LUBRICATION ENGINEERS. 33. 15-20 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Development of Clean Room Robot with Contactless Joints Using Magnetic Bearings" Proceedings of the USA-Japan Symposium on Flexible Automation Crossing Bridges: Advances in Flexible Automation and Robotics. 1. 459-466 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI: "Study of Multi-Articulated Robot with Magnetic Bearings" Proceedings of the 31th Annual Conference of Systems and Control. 71-72 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] TOSHIRO HIGUCHI; G. SCHWEITZER(Editor): Magnetic Bearings; Applications of Magnetic Bearings in Robotics. Springer-Verlag, 83-99 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 樋口俊郎: 生産研究. 40. 512-515 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 樋口俊郎: 昭和63年度精密上学会秋期大会学術講演会講演論文集. 865-866 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] TOSHIHIRO,HIGUCHI: Proceedings of the USA-Japan Syamposium on Flexible Autmation. 456-466 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 樋口俊郎: 第6回日本ロボット学会学術講演会予稿集. 419-420 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] TOSHIHIRO,HIGUCHI;SCHWEIZER Editor: "Magnetic Bearings;Applications of Magnetic Bearings in Robotics" Spriger-Verlag, 83-99 (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 樋口俊郎: 第31回システムと制御研究発表講演会, 講演論文集. 71-72 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 樋口俊郎: 昭和62年度精密工学会秋季大会学術講演論文集. 117-118 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] 樋口俊郎: 第5回日本ロボット学会学術講演会予稿集. 405-406 (1987)

    • Related Report
      1987 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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