Discharge-Pumped Rare Gas Excimer Lasers in the VUV Region.
| Project/Area Number |
62550042
|
|---|
| Research Category |
Grant-in-Aid for General Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
応用物理学一般(含航海学)
|
|---|
| Research Institution | University of Osaka Prefecture |
|---|
Principal Investigator |
WATARU Sasaki University of Osaka Prefecture, 工学部, 助教授 (30081300)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
KOU Kurosawa University of Osaka Prefecture, 工学部, 講師 (80109892)
|
|---|
| Project Period (FY) |
1987 – 1988
|
| Project Status |
Completed (Fiscal Year 1988)
|
| Budget Amount *help |
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1988: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1987: ¥1,400,000 (Direct Cost: ¥1,400,000)
|
|---|
| Keywords | Rare gas excimer lasers / VUV lasers / Discharge pumping / excimer / エキシマスペクトル / エキシマレーザー / 放電励起エキシマスペクトル |
|---|
| Research Abstract |
We have newly designed and built a high pressure laser tube, and have extensively studied the excitation mechanism of rare gas excimers produced by electrical discharge and the mixing process of the singlet and triplet states. The obtained results are as follows: (1) The continuum of the argon excimer spreads over a spectral range from 90nm to 146nm, which is wider than that produced by electron beam. (2) The continuum has the peak at 126nm, and the peak intensity increases as a function of 1. 2 powers of the argon pressure. (3) In the pressure range below 1 atm, the energy transfer from the triplet state to the singlet one is caused by electron collision process. (4) Above 1 atm, a two body collision process between the excimer and the atom in the ground state becomes important. (5) The electron density in the discharge plasma is estimated to be less than 1010cm-3, which is much lower than the value of 1013cm-3 in the electron beam produced plasma.
We have also stdied the corona discharge-type preionization, and found that it is not strong enough to generate homogeneous discharge between the clectrodes. We have also found that SiC chemical vapor deposition film and Mo single crystal are most suitable materials for the cavity mirrors.
|
Report
(3 results)
Research Products
(9 results)
