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Discharge-Pumped Rare Gas Excimer Lasers in the VUV Region.

Research Project

Project/Area Number 62550042
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 応用物理学一般(含航海学)
Research InstitutionUniversity of Osaka Prefecture

Principal Investigator

WATARU Sasaki  University of Osaka Prefecture, 工学部, 助教授 (30081300)

Co-Investigator(Kenkyū-buntansha) KOU Kurosawa  University of Osaka Prefecture, 工学部, 講師 (80109892)
Project Period (FY) 1987 – 1988
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1988: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1987: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsRare gas excimer lasers / VUV lasers / Discharge pumping / excimer / エキシマスペクトル / エキシマレーザー / 放電励起エキシマスペクトル
Research Abstract

We have newly designed and built a high pressure laser tube, and have extensively studied the excitation mechanism of rare gas excimers produced by electrical discharge and the mixing process of the singlet and triplet states. The obtained results are as follows: (1) The continuum of the argon excimer spreads over a spectral range from 90nm to 146nm, which is wider than that produced by electron beam. (2) The continuum has the peak at 126nm, and the peak intensity increases as a function of 1. 2 powers of the argon pressure. (3) In the pressure range below 1 atm, the energy transfer from the triplet state to the singlet one is caused by electron collision process. (4) Above 1 atm, a two body collision process between the excimer and the atom in the ground state becomes important. (5) The electron density in the discharge plasma is estimated to be less than 1010cm-3, which is much lower than the value of 1013cm-3 in the electron beam produced plasma.
We have also stdied the corona discharge-type preionization, and found that it is not strong enough to generate homogeneous discharge between the clectrodes. We have also found that SiC chemical vapor deposition film and Mo single crystal are most suitable materials for the cavity mirrors.

Report

(3 results)
  • 1988 Annual Research Report   Final Research Report Summary
  • 1987 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] 佐々木亘: Short-Wavelength Lasers and Their Applications. 316-323 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 佐々木亘: レーザー研究. 16. 200-208 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 黒澤宏: To be published in Applied Physics Letters.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Wataru Sasaki: "Generation of Intense, Coherent, VUV and XUV Radiation Using Rare Gas Excimer Lasers." Short-Wavelength Lasers and Their Applications.316-323 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Wataru Sasaki: "Electron Beam Pumped Rare Gas Excimer Lasers." The Review of Laser Engineering. 16. 200-208 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Kou Kurosawa: "Super-Polished Silicon Carbide Mirrors for VUV-XUV Radiation." Applied Physics Letters.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 佐々木亘: Short-Wavelength Lasers and Their Applications. 316-323 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 佐々木亘: レーザー研究. 16. 200-208 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 黒沢宏: Physics Letters.

    • Related Report
      1988 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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