Production of Multi-component Ion-beams and Its application to Film Formation.
| Project/Area Number |
62550219
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子材料工学
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| Research Institution | Ibaraki University, Faculty of Engineering |
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Principal Investigator |
MASE Hiroshi Ibaraki University, Faculty of Engineering, Professor, 工学部, 教授 (30007611)
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| Co-Investigator(Kenkyū-buntansha) |
YAMASHITA Masato Ibaraki University, Faculty of Engineering, Research Fellow, 工学部, 助手 (10159212)
IKEHATA Takashi Ibaraki University, Faculty of Engineering, Research Fellow, 工学部, 助手 (00159641)
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| Project Period (FY) |
1987 – 1988
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| Project Status |
Completed (Fiscal Year 1988)
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| Budget Amount *help |
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1988: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1987: ¥1,700,000 (Direct Cost: ¥1,700,000)
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| Keywords | Multi-component ion beam / Ion beam source / Ion beam deposition / イオンビーム蒸着 / パラメータ制御 / プラズマ源 / 多成分イオンビームの |
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| Research Abstract |
We have developed a specially constructed hollow cathode in which the primary electrons are sufficiently trapped. The new cathode makes it possible to produce superdense glow discharge whose current density is in the range up to 10 A/cm^2. The hollow cathode effect occurs independently of the cathode cavity size. We obtained the superdense mode even if the diameter of hollow cylinder cathode reduced to 0.23 cm. A more compact and intense ion source can be realized by using this discharge mode instead of conventional one.
In this study, we discuss the characteristics of superdense hollow cathode glow discharge and try to construct a compact ion source and a multi-ion source assembling seven compact ion sources. In the compact ion source we extracted ion beam of 25 mA/cm^2 when the discharge current is 0.1 A. The fluctuation of ion energies is 20 eV (FWHM). In the multi-ion source the spatial distribution of density and component ratio is easily controlled.
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Report
(3 results)
Research Products
(16 results)
