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Production of Multi-component Ion-beams and Its application to Film Formation.

Research Project

Project/Area Number 62550219
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionIbaraki University, Faculty of Engineering

Principal Investigator

MASE Hiroshi  Ibaraki University, Faculty of Engineering, Professor, 工学部, 教授 (30007611)

Co-Investigator(Kenkyū-buntansha) YAMASHITA Masato  Ibaraki University, Faculty of Engineering, Research Fellow, 工学部, 助手 (10159212)
IKEHATA Takashi  Ibaraki University, Faculty of Engineering, Research Fellow, 工学部, 助手 (00159641)
Project Period (FY) 1987 – 1988
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1988: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1987: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsMulti-component ion beam / Ion beam source / Ion beam deposition / イオンビーム蒸着 / パラメータ制御 / プラズマ源 / 多成分イオンビームの
Research Abstract

We have developed a specially constructed hollow cathode in which the primary electrons are sufficiently trapped. The new cathode makes it possible to produce superdense glow discharge whose current density is in the range up to 10 A/cm^2. The hollow cathode effect occurs independently of the cathode cavity size. We obtained the superdense mode even if the diameter of hollow cylinder cathode reduced to 0.23 cm. A more compact and intense ion source can be realized by using this discharge mode instead of conventional one.
In this study, we discuss the characteristics of superdense hollow cathode glow discharge and try to construct a compact ion source and a multi-ion source assembling seven compact ion sources. In the compact ion source we extracted ion beam of 25 mA/cm^2 when the discharge current is 0.1 A. The fluctuation of ion energies is 20 eV (FWHM). In the multi-ion source the spatial distribution of density and component ratio is easily controlled.

Report

(3 results)
  • 1988 Annual Research Report   Final Research Report Summary
  • 1987 Annual Research Report

Research Products

(16 results)

All Other

All Publications (16 results)

  • [Publications] H.Mase: Proc.18th Int.Conf.on Phenomena in Ionized Gases. IV. 746-747 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Mase: Proc.8th Int.Sympo.on Plasma Chemistry. 1. 273-278 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Mase: 7th Int.Conf.on Ion Implantaition Technology IIT′88. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 真瀬寛: 金属表面技術. 39. 368-374 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Mase: Proc.10th Sympo on Dry Process. 98-101 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Mase: Nucl.Instr.& Method in Phys.Research. B37/38. 120-123 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Mase; T. Tanabe; T. Ikehata: "New concept of cathode fall region in gas discharge" Proc. XVIII Int. Conf. on Pheno. Ionized gases. 4. 746-747 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Mase; T. Tanabe; T. Ikehata: "Boundary layer between plasma and solid surface" Proc. VIII Int. Sympo. on Plasma Chemistry. 1. 273-278 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Mase; T. Tanabe; T. Ikehata: "Production and control of plasma for material processing" Kinzoku Hyoumen Gijutsu. 39. 368-374 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Mase; T. Tanabe; T. Ikehata: "Main characteristics of typical RF discharge plasma." Proc. 10th Symp. on Dry Process.98-101 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Mase; T. Tanabe; T. Ikehata.: "Superdense hollow cathode discharge and its application to ion sources." Nucl. Instr. & Methods in Phys. Research.B37/38. 120-123 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 真瀬寛: 金属表面技術. 39. 368-374 (1987)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Mase: 10th Proceedings of Symposium on Dry Process. 98-101 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Mase: Nucl.Instr.and Method.

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Mase,T.Tanabe T.Ikehata: 18th International Conference on Phenomena in Ioniged Gases. 4. 746-747 (1987)

    • Related Report
      1987 Annual Research Report
  • [Publications] H.Mase,T.Tanbe,T.Ikehata: 8th International SymPosium on Plasma Chemistry. 1. 273-278 (1987)

    • Related Report
      1987 Annual Research Report

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Published: 1987-03-31   Modified: 2016-04-21  

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