| Budget Amount *help |
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1988: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1987: ¥1,100,000 (Direct Cost: ¥1,100,000)
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| Research Abstract |
In this research, the object surface is scanned with a micro-capacitance probe (stylus) and piezoelectric actuator such as PZT two-dimensionally or 2.5-dimensionally, and its capacitance variat ion is visualized as an image. The system is devised as follows:
1) Driving method: since there are two kinds of driving mechnism of stage-driving and stylus-driving, both methods are tested for comparison. Then, we got a conclusion that the stylus-driving method is better than the stage-driving. Therefore, we adopted a mechanism of driving XYZ the stylus directly by the piezoelectric actuators.
2) Coarse height adjustment mechanism: We set a micrometer for the coarse adjusting along the hight. Further, we tried to set an oblieque optical microscope for confirming the stylus hight. Thus, we devised a mechanism for adjusting the hight of the stylus manually while confirming its hight with the optical microscope.
3) Fine hight driving mechanism: As a fine driving mechanism for scanning the object surface plane two-dimensionally, or scanning 2.5 dimensionally, we devised a driving mechanism with the piezoelect ric actuators according to the detected capacitance, that is detector output.
By these effort, it is proved that it is possible enough to realize the resolution power of 0.1mum. As yet, the reapeatability of the hight detection is high enough. However, the repeatability of of the lateral directions in lacking. The rough power of the present system is, resolution power : 0.1 mum+alpha, maximum scanning range: 20 mum x 20 mum, tip size of the capacitance sytlus is 0.1 mum x 0.1 mum, scanning time is 20 sec (20 mum x 20 mum) or 4 sec (5 mum x 5 mum). It should be discussed how to use the scanning capacitance microscope for the guide of the STM, and for the super high density memory (several ten times of optical disc).
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