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RF-DC Coupled Mode Bias Sputtering System

Research Project

Project/Area Number 62850050
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

SHIBATA Tadashi  Associate Professor, Faculty of Engineering, Tohoku University, 工学部, 助教授 (00187402)

Co-Investigator(Kenkyū-buntansha) MORITA Mizuho  Research Associate, Faculty of Engineering, Tohoku University, 工学部, 助手 (50157905)
OHMI Tadahiro  Professor, Faculty of Engineering, Tohoku University, 工学部, 教授 (20016463)
Project Period (FY) 1987 – 1988
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥19,800,000 (Direct Cost: ¥19,800,000)
Fiscal Year 1988: ¥5,100,000 (Direct Cost: ¥5,100,000)
Fiscal Year 1987: ¥14,700,000 (Direct Cost: ¥14,700,000)
Keywordsbias-sputtering / thin film formation / low temperature epitaxy / pure aluminum metalization / hillock-free / エピタキシャルシリコン / スパッタ成膜 / アルミ薄膜
Research Abstract

The RF-DC coupled-mode bias sputtering system has been developed in which important process parameters are all able to be controlled, precisely and independently. Using this system, a new film formation technology called "Low-Kinetic-Energy Particle Process" has been established. In this process, concurrent low energy ion bombardment of a growing film surface is utilized to activate the surface atoms, thus controlling the kinetics of crystal growth. As a result, formation of high quality thin films at extremely low temperatures have been realized. Pure aluminum films formed by this process exibited hillock-free features up to a 500゜C annealing temperature as well as an excellent step coverage at contact holes. One of the most remarkable achievements in this project is the formation of perfect epitaxial silicon layer at such a low temperature as 300゜C or below. This has been achieved by optimizing the low-energy ion bombardment conditions for film growth as well as for in situ substrate surface cleaning. The research results obtained in this study have opened a new avenue in the fabrication technology for future advanced device structure in deep submicron ULSI era.

Report

(2 results)
  • 1988 Annual Research Report   Final Research Report Summary
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] 柴田直: 電子情報通信学会技術研究報告. SDM-88. 3-8 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Tadahiro Ohmi: Proc.5th International VLSI Multilevel Interconnection Carference. 446-452 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 柴田直: 半導体基盤技術研究会編、超LSIウルトラクリーンテクノロジーシンポジウム、サブミクロンVLSIプロセス技術、プロシーディング. 7. 229-241 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] T.Ohmi: Applied Physics Letters. 53. 364-365 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] T.Ohmi: Applied Physics Letters. 54. 253-255 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] T.Ohmi: Applied Physics Letters. 54. 523-525 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Tadashi,Shibata: "Surface cleaning and low-temperature high-quality thin film growth by low energy ion bombardment" Technical Report of the Institute of Electronics Information and Communication Engineers. SDM-88. 3-8 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Tadahiro,Ohmi: "Low-kinetic-energy particle process for hillock-free pure aluminum metallization" Proc. 5th International VLSI Multilevel Interconnection Conference, Santa Clara. 446-452 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] Tadashi,Shibata: "Thin film formation by low energy ion bombardment" Proc. International Symposium on Ultra Clean Technology for Ultra Large-Scale Integration, Tokyo. 7. 229-241 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] T.Ohmi: "Low temperature silicon epitaxy by low-energy bias sputtering" Applied Physics Letters. 53. 364-365 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] T.Ohmi: "Electrical characterization of epitaxial silicon films formed by a low kinetic energy particle process" Applied Physics Letters. 54. 253-255 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 柴田直: 電子情報通信学会技術研究報告. SDM-88. 3-8 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Tadahiro Ohmi: Proc.5th International VLSI Multilevel Interconnection Conference. 229-241 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 毅田直: 半導体基盤技術研究会編、超LSIウルトラクリーンテクノロジーシンポジウム、サブミクロンULSIプロセス技術、プロシーディング. 7. 229-241 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Ohmi: Applied Physics Letters. 54. 253-255 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Ohmi: Applied Physics Letters. 54. 523-525 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Ohmi: Nuclear Instruments and methods.in physics Research.

    • Related Report
      1988 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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