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Formation of Functional Thin Films by a Double Plasma Device

Research Project

Project/Area Number 62880003
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field プラズマ理工学
Research InstitutionNagoya University

Principal Investigator

SUGAI Hideo  Faculty of Engineering, Nagoya University, 工学部, 教授 (40005517)

Co-Investigator(Kenkyū-buntansha) TOYODA Hirotaka  Faculty of Engineering, Nagoya University, 工学部, 助手 (70207653)
Project Period (FY) 1987 – 1988
Project Status Completed (Fiscal Year 1988)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1988: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1987: ¥3,000,000 (Direct Cost: ¥3,000,000)
KeywordsThin Film / Plasma Process / Ion Beam / Electron Beam / Microwave Discharge / Glow Discharge / Double Plasma / 反応性プラズマ / ダブルプラズマ
Research Abstract

We have proposed a new plasma processing technique called "double plasma method", where two independent plasmas are joined to form ion beams or electron beams. Energy distribution functions of charged particles in a reactive plasma can be controlled in the double plasma device by abjusting the external bias voltage between the two plasmas.
In this project, we constructed a double plasma device using an ECR microwave discharge and a cold cathode glow discharge. The experimental results are summarized as follows:
1. Production of high-energy ion beams an ion beam was extracted into a low-pressure microwave plasma from a cold-cathode glow discharge having a high plasma potential. The energy of the ion beam could be increased up to a value (600 eV) 2-3 times higher than the previous one.
2. Production of electron beams with low energy and large area A low-energy (4-40 eV), large-area (16 cm diam.) electron beam was extracted from the microwave plasma into an externally biased chamber. The beam energy could be varied easily by abjusting the bias voltage, while the beam flux turned out to be limited by the ion loss rate in the microwave plasma.
3. Investigation of behaviors of hydrogen radical the behaviors of hydrogen radical governing the film growth and properties were fundamentally investigated. New informations on a hydrogen molecule formation and a hydrogen absorption mechanism were obtained.

Report

(2 results)
  • 1988 Annual Research Report   Final Research Report Summary
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H.Sugai;S.Urano;S.Ohshita;T.Okuda: Proc.of 8th Int.Symposium on Plasma Chemistry. 3. 1548-1553 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] 吉田慎司、大下晋、菅井秀郎、奥田孝美: 核融合研究. 58. 402-410 (1987)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Sugai;H.Totyda;S.Ohshita;S.Yoshida;A.Sagara: J.Nucl.Mater.(1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] N.Yobuoshi;H.Toyoda;H.Sugai: Proc.of 6th Symposium on Plasma Processing. 1. 593-596 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Sugai; S. Urano; S. Ohshita; T. Okuda: "In-Situ Carbon Coating by Toroidal Discharges Using Methane, Acetylene, and Benzen" Proc. 8th Int. Simposium on Plasma Chemistry. 3. 1548-1553 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] S. Yoshida; S. Ohshita; H. Sugai; T. Okuda: "Control of Hydrogen Recyclingin Carbonized wall" Kaku-Yugo Kenkyu. 58. 402-410 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H. Sugai; H. Toyoda; S. Ohshita; S. Yoshida; A. Sagara: "Hydrogen Recycling Control by Helium Ion Bombardment" J. Nucl. Mater.(1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] N. Yabuoshi; H. Toyoda; H. Sugai: "Production of Charged Particle Beams in a Double Plasma Device" Proc. of 6th Symposium on Plasma Processing. 1. 593-596 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1988 Final Research Report Summary
  • [Publications] H.Sugai;S.Urano;S.Ohshita;T.Okuda: Proc.of 8th Int.Symposium on Plasma Chemistry(Tokyo,1987). 3. 1548-1553 (1987)

    • Related Report
      1988 Annual Research Report
  • [Publications] 吉田慎司,大下晋,菅井秀郎,奥田孝美: 核融合研究. 58. 402-410 (1987)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Sugai;H.Toyoda;S.Ohshita;S.Yoshida;A.Sagara: J.Nucl.Mater.(1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] Yabuoshi;H.Toyoda;H.Sugai: Proc.of 6th Symposium on Plasma Processing(Kyoto,1989). 1. 593-596 (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1987-04-01   Modified: 2016-04-21  

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