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Fundamental Aspects of X-ray Scattering from Crystal Surface

Research Project

Project/Area Number 63302065
Research Category

Grant-in-Aid for Co-operative Research (A)

Allocation TypeSingle-year Grants
Research Field 結晶学
Research InstitutionNagoya University

Principal Investigator

HARADA Jimpei  Nagoya Univ. Dept. Appl. Phys. Professor, 工学部, 教授 (80016071)

Co-Investigator(Kenkyū-buntansha) HSHIZUME Hiroo  Tokyo Inst. of Tech. Professor, 工業材料研究所, 教授 (10011123)
IIDA Atsuo  Inst. High Energy Phys. P.F. Ass. Professor, 放射光施設, 助教授 (10143398)
ISHIDA Kohtarou  Science Univ. of Tokyo Dept. Phys. Professor, 理工学部, 教授 (30012404)
URAGAMI Takuyuki  Okayama Univ. of Science Dept. Phys. Professor, 教養部, 教授 (80151942)
KAWAMURA Takaaki  Yamanashi Univ. Dept. Phys. Ass. Professor, 教育学部, 助教授 (20111776)
高橋 敏夫  東京大学, 物性物理学研究所, 助教授 (20107395)
石川 哲也  高エネルギー物理学研究所, 放射光実験施設, 助手 (80159699)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥11,500,000 (Direct Cost: ¥11,500,000)
Fiscal Year 1989: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 1988: ¥8,600,000 (Direct Cost: ¥8,600,000)
Keywordssurface & interface / glazing incidence X-ray scattering / CTR scattering / X-ray fluorescence analysis / lattice strain / surface morphology / reconstructed structure / X線表面散乱 / 結晶表面構造 / 再構築表面 / 表面格子緩和 / グレージング入射条件 / 放射光
Research Abstract

1) Theoretical Studies A brief overview on the current status of RHEED analysis during molecular beam epitaxy was presented and the application of the technique to the case of X-ray scattering from a crystal surface was discussed by T. Kawamura. The result obtained from the analysis of CTR scattering recently by Kashihara et al. shows that lattice relaxation exists in general at the top of a crystal surface. X-ray scattering from such a crystal surface was theoretically investigated by T. Uragami and that from the crystal surface with strain field induced by ion-implantation was analyzed on the basis of dynamical diffraction theory by K. Ishida's group.
2) Experimental Studies T. Ishikawa estimated the special coherent length of X-ray to be several micron meters. It would be very important to estimate it when we discuss the flatness of a surface obtained from the analysis of the rod-shaped scattering from a crystal surface. A. Iida presented his recent development of the technique for surface sensitive X-ray fluorescence analysis using Synchrotron Radiation. Kashiwagura and Harada showed general characteristics of the CTR scattering on the basis of their studies on Si and GaAs wafer surfaces and several ionic crystal surfaces and a method of analysis for such a scattering was proposed by Y. Kashihara. It was shown by T. Takahashi et al. that from the measurement of X-ray intensity versus energy curves under nearly normal incidence condition the profile of the rod-shaped scattering from a crystal surface can be observed. By using this technique they analyzed the reconstructed surface structure of Si(111) ROO<3> X ROO<3> - Bi and Ag. H; Hashizume et al. developed also a new technique, backreflection X-ray standing waves, and applied it to the analysis of the structure of CaSrF2 epilayers.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] A.Iida: "Near Surface Analysis of Semiconductor using Grazing Incidence X-Ray Fluorescence." "Advances in X-Ray Analysis". vol.31 edited by C.S.Barret et al.(1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Ishikawa: "Measurement of the Coherence Length of Highly Collimated X-Rays from the Visibility of Equal-Thickness Fringes" Acta Cryst. A44. 496 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Ishikawa: "Observation of Minute Strain Fields in Siiicon Single Crystals by X-Ray Topography" Oyo Butsuri, 57 (1988) 1496 (in Japanese).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Takahashi S.Nakatani: "Study on the Si(111)ROO<3>XROO<3>-Ag Surface Structure by X-Ray Diffraction" Jpn. J. Appl. Phys., 27 (1988) L753.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] H.Hashizume I.Minato H.Kusuhara A.Yamanaka: "Cylindrical Position Sensitive X-Ray Detector for Fast Powder Diffractometry" Rev. Sci. Instrum, 60 (1989) 2311.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] H.Hashizume O.Sakata: "Dynamical X-Ray Diffraction from Perfect Crystals under Grazing-Incidence Conditions" Rev. Sci. Instrum, 60 (1989) 2373.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Kawamura: "Calculation of RHEED Intensity from Growing Surface" "Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces" ed. by P.K.Larsen and P.J.Dobson. 501 (1988 Plenum)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Y.Kashihara S.Kimura J.Harada: "X-Ray Measurement of the Crystal Truncation Rod Scattering from Cleavage Surfaces of Ionic Crystals" Surface Sci., 214 (1989) 477.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] J.Harada N.Kashiwagura: "Surface Morphology of Mechanically and Chemically Polished Semiconductor Wafers" Colloque de Physique, Colloque C7, 50 (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] J.Harada M.Takata H.Miyatake H.Komiya: "A Direct Investigation of Lattice Relaxation at a Crystal Surface by Optical Transforms of Surface Profile Images" J. Appl. Cryst., 22 (1989) 592.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Y.Kashihara,S.Kimura,J.Harada: "X-Ray Measurement of the Crystal Truncation Rod Scattering from Cleavage Surfaces of Ionic Crystals" Surface Sci.214. 477-492 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] J.Harada,N.Kashiwagura: "Surface Morphology of Mechanically and Chemically Polished Semiconductor Wafers" Colloque de Physique,Colloque C7. 50. C7・129-C7・144 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] J.Harada,H.Miyatake,M.Takata,H.Koyama: "A Direct Investigation of Lattice Relaxation at a Crystal Surface by Optical Transforms of Surface Profile Images" J.Appl.Cryst.22. 592-600 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Ishikawa: "X-Ray Monochromators for Circularly Polarized Incident Radiation" Rev.Sci.Instrum.60. 2058-2061 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] A.Iida,Y.Gohshi,K.Sakurai,S.Komiya: "Analysis of Contamination Layer of InP during LPE Process by Synchrotron Radiation-Excited X-Ray Fluorescence." Jpn.J.Appl.Phys.27. L1825-L1828 (1988)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Takahashi,T.Ishikawa,S.Nakatani,S.Kikuta,N.Okamoto: "Studies on Si(111)√<3>-Bi andーAg Surfaces by X-Ray Diffraction under Nearly Normal Incidence" Rev.Sci.Instrum.60. 2365-2368 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Yasuharu KASHIHARA;Jimpei HARADA.: JAPANESE JOURNAL OF APPLIED PHYSICS. 27. 522-527 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] K.OHSHIMA;J.HARADA;M.MORINAGA;P.GEORGOPOULOS AND J.B.COHEN: Acta Crystallographica. A44. 167-176 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] A.W.STEVENSON;S.W.WILKINS;J.HARADA;N.KASHIWAGURA; 他: Acta Crystallographica. A44. 828-833 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Jimpei Harada.: Australian Journal of physics. 41. 351-357 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 原田仁平: 日本結晶学会誌. 30. 90-95 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Ishikawa: Acta Crystallogr.A44. 496-499 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] S.Kojima;S.Kawado;T.Ishikawa;T.Takahashi;S.Kikuta.: Jpn.J.Appl.Phys.,. 27. L1377-L1379 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 石川哲也: 応用物理. 57. 1496-1504 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Takahashi;S.Nakatani;N.Okamoto;T.Ishikawa;S.Kikuta.: Jpn.J.Appl.Phys.,. 27. L753-L755 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Hashizume;T.Nakahata: Jpn.J.Phys.27. L1568-L1571 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Hashizume;T.Nakahata.: Jpn.J.Appl.Phys.27. L1568-L1571 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] O.Sakata;H.Hashizume.: Jpn.J.Appl.Phys.27. L1976-L1979 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 高良和武 編 石川哲也、橋爪弘雄、原田仁平 他: "X線回析" 共立出版株式会社, (1988)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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