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Basic Research of UltraーHigh-Speed ThreeーTerminal Electronic Device Using Metal-Insulator Superlattice

Research Project

Project/Area Number 63420035
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionTokyo Institute of Technology

Principal Investigator

ASADA Masahiro (1990)  Tokyo Institute of Technology, Department of Electrical & Electronics Engineering, Associate Professor, 工学部, 助教授 (30167887)

末松 安晴 (1988-1989)  東京工業大学, 工学部, 教授 (40016316)

Co-Investigator(Kenkyū-buntansha) RAVIKUMAR K. G.  Tokyo Institute of Technology, Department of Physical Electronics, Research Asso, 工学部, 助手 (90220996)
浅田 雅洋  東京工業大学, 工学部, 助教授 (30167887)
荒井 滋久  東京工業大学, 工学部, 助教授 (30151137)
古屋 一仁  東京工業大学, 工学部, 教授 (40092572)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥46,500,000 (Direct Cost: ¥46,500,000)
Fiscal Year 1990: ¥12,000,000 (Direct Cost: ¥12,000,000)
Fiscal Year 1989: ¥18,500,000 (Direct Cost: ¥18,500,000)
Fiscal Year 1988: ¥16,000,000 (Direct Cost: ¥16,000,000)
KeywordsElectronic devices / Metal / Insulator / Superlattice / Ionized cluster beam / Epitaxial Growth / Calcium floride / Metal silicide / 超高速応答 / シリサイド系金属 / イオン化クラスタービーム結晶成長
Research Abstract

This project is a basic research for realization of three-terminal ultra-highーspeed electronic device using metalーinsulator superlattice and multilayer structures. The main purpose is realization of epitaxial growth of metal-insulator superlattice and ultraーthin layers, establishment of the theory on material properties of this superlattice, and clarification of the basic properties of devices using this material system. Results obtained are summarized as follows.
For highーspeed electronic devices, a novel transistor, which introduces metalーinsulator heterostructure and the quantum interference of highーvelocity hot electrons in conduction band of an insulator, was proposed. Possibility of high speed response close to THz of this device was theoretically shown. Also, theoretical analysis was made for the electronic band structure of metal insulator superlattice.
Crystal growth of metalーinsulator superlattice and ultraーthin layers was investigated using the ionized cluster beam technique. We chose CaF_2 for the insulator and CoSi_2 for the metal, both of which are lattice matched relatively well to silicon substrate. Condition of epitaxial growth of singleーcrystal flat thin layer (-nm thick) of CoSi_2 on CaF_2/Si(111) was made clear. Using this condition, we fabricated metalーinsulator superlattice.
Selective wet chemical etching process necessary to the fabrication of threeーterminal devices with metalーinsulator multilayer structure was found. Using this process, we fabricated the device structure for resistivity measurement of nanometerーthick metal layers in a metalーinsulator multilayer structure, and resistivity of 70 mu OMEGA cm was obtained for ultrathin (2nm thick) CoSi_2 layer. This result shows possibility of ultraーhigh speed device with this material combination.
By these results, we obtained possibility of ultraーhighーspeed electronic devices using metalーinsulator multilayer structures and basic knowledge essential to the realization of these devices.

Report

(4 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] Yasuyuki Chaki: "Proposal of Space Charge Limited Insulator Tetroide with HighーSpeed Response Using Metal and Insulator" Transaction IEICE of Japan. Eー72. 313-314 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Masahiro Watanabe: "Low Temperature(〜420℃)Epitaxial Growth of CaF2/Si(111)by IonizedーClusterーBeam Technique" Japanese Journal of Applied Physics. 29. 1803-1804 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 渡辺 正裕: "ICB法による CaF2/CoSi2/CaF2/Si(111)のエピタキシャル成長" 応用物理学会学術講演会(秋). 28 -T-11 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 六車 仁志: "金属(半導体)ー絶縁体超格子のエネルギ-バンド構造" 電子情報通信学会全国大会(春). C-545 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 坂口 知明: "金属・絶縁体ヘテロ構造を用いた量子効果超高速電子デバイスの解析" 電子情報通信学会全国大会(秋). C-410 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Tomoaki Sakaguchi: "Proposal and Analysis of QuantumーInterference HighーSpeed Electron Devices Using MetalーInsulator Heterostructure" Transaction IEICE of Japan.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Y. Chaki: "Proposal of Space Charge Limited Insulator Tetroide with HighーSpeed Response Using Metal and Insulator" Trans. IEICE of Japan. vol. E-72. 313-314 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Watanabe: "Low Temperature (-4200^゚C Epitaxial Growth of CaF_2/Si(111) by IonizedーClusterーBeam Technique" Japan. J. Appl. Phys.vol. 29. 1803-1804 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Watanabe: "Epitaxial Growth of CaF_2/CoSi_2/CaF_2/Si(111) by ICB Technique" Nat. Conv. Rec. Japan. Appl. Phys. Soc.28aーT-11. (Sept)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Muguruma: "Energy Band Structure of Metal Japan (Semiconductor)-Insulator Superlattice" Nat. Conv. Rec.IEICE of C-545. (Marc)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Sakaguchi: "Analysis of QuantumーSizeーEffect Japan HighーSpeed Electron Devices Using MetalーInsulator Heterostructure" Nac. Conv. Rec.IEICE of C-410. (Oct.)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] T. Sakaguchi: "Proposal and Analysis of Quantum-Interference HighーSpeed Electron Devices Using MetalーInsulator Heterostructure" Trans. IEICE of Japan.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Masahiro Watanabe: "Low Temperature (〜420℃) Epitaxial Growth of CaF2/Si(111) by IonizedーClusterーBeam Technique" Japanese Journal of Applied Physics. 29. 1803-1804 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 渡辺 正裕: "ICB法によるCaF2/CoSi2/CaF2/Si(111)のエピタキシャル成長" 応用物理学会学術講演会(秋). 28a-T-11 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 六車 仁志: "金属(半導体)ー絶縁体超格子のエネルギ-バンド構造" 電子情報通信学会全国大会(春). C-545 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 坂口 知明: "金属・絶縁体ヘテロ構造を用いた量子効果超高速電子デバイスの解析" 電子情報通信学会全国大会(秋). C-410 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Tomoaki Sakaguchi: "Proposal and Analysis of QuantumーInterference HighーSpeed Electron Devices Using MetalーInsulator Heterostructure" Transaction IEICE of Japan.

    • Related Report
      1990 Annual Research Report
  • [Publications] 渡辺 正裕: "CaF_2/Si(111)上CoSi_2エピタキシャル薄膜の抵抗率測定" 応用物理学会学術講演会(春). (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Y.Chaki: "Proposal of Space Charge Limited Insulator Tetoroide with HighーSpeed Response Using Metal and Insulator" Trans.IEICE of Japan. Eー72. 313-314 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 渡辺正裕: "ICB成長CaF_2薄膜における絶縁耐圧の加速電圧依存性" 応用物理学会 学術講演会(春). 3p-L.1 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 浅田雅洋: "ナノメ-トル絶縁膜を有するLSI用新デバイスの可能性" 電子通信情報学会 全国大会(秋)シンポジウム. SC-6.4 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 渡辺正裕: "ICB法によるCaF_2薄膜の低温エピタキシャル成長" 応用物理学会 学術講演会(秋). 28a-H.5 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 坂口知明: "空間電荷制御型金属/絶縁体電子デバイス(SCLIT)におけるグリッドバリア制御動作の理論解析" 電子情報通信学会 全国大会(春). C-546 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 渡辺正裕: "ICB法によるCaF_2(111)薄膜上へのCoSi_2エピタキシャル成長" 応用物理学会 学術講演会(春). (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 中村健一: 応用物理学会学術講演会. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 茶木康行: 電子通信情報学会全国大会. C-91 (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] V.Chaki: Trans.IEICE of Japan.

    • Related Report
      1988 Annual Research Report
  • [Publications] K.Furuya: IEEE Journal of Quantum Electronics. vol.24QE-24. 1652-1658 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] K.Furuya: Journal Vacuum Science and Technology. vol.B-6. 1845-1848 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] K.Furuya: Trans.IEICE of Japan. vol.E-71. 286-288 (1988)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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