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Studies of Surface Reaction on Solids by Using Suprathenal Beams.

Research Project

Project/Area Number 63430001
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 物理化学一般
Research InstitutionTohoku University

Principal Investigator

KUSUNOKI Isao  Research Institute for Scientific Measurements, Professor, 科学計測研究所, 教授 (30025390)

Co-Investigator(Kenkyū-buntansha) MURAKAMI Junichi  Research Institute for Scientific Measurements, Assistant, 科学計測研究所, 助手 (00157752)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥29,100,000 (Direct Cost: ¥29,100,000)
Fiscal Year 1990: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1989: ¥5,100,000 (Direct Cost: ¥5,100,000)
Fiscal Year 1988: ¥21,000,000 (Direct Cost: ¥21,000,000)
Keywordsmolecular beams / ion beams / surface reaction / silicon / laser / carbidization / oxidation / 分子線(分子ビ-ム) / 分子ビ-ム / 表面 / シリコン酸化反応 / 飛行時間法 / シリコンカーバイド / アセチレン / 反応 / 分子ビーム / 結晶成長
Research Abstract

(1) We studied the growth mechanism of beta-Sic film formation on Si (001) surface by reaction of Si with C_2H_2 molecular beams. The film was formed above the surface temperature of 1000K. Under the condition that the surface reaction was limited by the small beam flux, the film grew epitaxially. But, under the condition that the beam flux was too large for the reactive Si atoms on the surface, the film growth rate decreased due to formation of the carbon rich layer on the surface, and many hillocks were observed in the grown film.
(2) Desorption kinetics of SiO in the reaction of O_2 with Si (100) and (111) surfaces were investigated at surface temperatures between 1000 and 1300K by using a pulsed molecular beam technique. At lower temperatures than 1050K, the SiO signal appeared with an induction time after the O_2 beam irradiation onto the surface, which means that desorption occurs via sequential steps. The rate constants for two steps were obtained by a computer simulation of the … More relaxation waveforms of the SiO signal.
(3) In order to study the interaction between the solid surface irradiated by ultra violet laser and the colliding molecules, we detected the outcoming molecules from the surface after the laser irradiation by a mass spectrometer and determined their kinetic energies by a time-of-flight method. We noticed that the energetic molecules having a few eV were produced in the process. The mechanism is now under the investigation.
(4) Water-absorbed Si (100) surface were bombarded by a pulsed low energy (500) Ne^+ beam. Time-of-flight spectra for neutrals plus positive ions or neutrals only were measured for the surface with various water coverages. By comparing the two kinds of spectra, the dependence of positive ion fractions of scattered Ne and recoiled O atoms upon water adsorption was studied. It was found that the Ne^+ and O^+ fraction changes in an opposite way depending on the water coverage such that the Ne^+ fraction decreases with increasing the coverage, whereas the O^+ fraction increases with it. Less

Report

(4 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] 村上,純一: "Secondary emission of alkaliーmetal ions from metal surfaces by low energy ion bombardment" Nuclear Instruments&Methods in Physics Research,Section B. B33. 560-563 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 村上 純一: "低エネルギ-イオンビ-ム装置による二次イオン放出の研究" 真空. 31. 583-586 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 田沼 肇: "Rotaional and vibrational excitation in the largeーangle scattering of Na^+ ions from N_2 molecules" Physical Review A. A38. 5053-5065 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 北 重公: "アルミノケイ酸塩からの熱イオン放射" 東北大学科学計測研究所報告. 37. 33-49 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 楠 勲: "C_2H_2ビ-ムを用いたSi(100)表面の炭化反応に関する研究" 東北大学科学計測研究所報告. 37. 51-73 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 田沼 肇: "Observation of siteーspecific electronic excitation in Li^+ーCO collisions near threshold" Chemical Physics Letter. 159. 442-446 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 楠 勲: "SiC film formation on Si (001) by reaction with C_2H_2 beams" Applied Surface Scieuce. 45. 171-187 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 山下 晃一: "Ab initio potential energy surfaces of chargeーtranofer reactions:F^++CO→F+CO^+" Journal of Chemical Physics. 92. 2505-2516 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 北 重公: "Electronic excitation in moderateーenergy Li^+-N_2 and Li^+-CO collisions" Physical Review A. A42. 367-382 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 村上 純一: "Ion scattering and surface recoiling from a Si surface by low enengy Ne^+ bombardment" Vacuum.41. 369-371 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 村上 純一: "Positive ion fractions of scattered Ne and recoilcd O atoms from waterーadaorbed Si (100) surfaces by low energy Ne^+ bombardment" Nuclear Instruments&Methods in Physics Research,Section B.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 大窪 克之: "SiO Production from Si(100) and (111) surfaces by reaction with O_2 beams" Surface Science.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J. Murakami and I. Kusunoki: "Secondary emission of alkali-metal ions from metal surface by low energy ion bombardment." Nucl. Inatr. and Meth.B33. 560-563 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J. Murakami, I, Kusunoki and T. Abe: "A study of secondary ion emission by a low energy ion beam apparatus. ( in Japanese )" Shinkuu. 31. 583-586 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Tanuma, S. Kita and I. Kusunoki: "Rotational and vibrational excitation in the large-angle scattering of Na^+ ions from N_2 molecules." Phys. Rev.A38. 5053-5065 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. Kita, S. Furusawa, H. Tamura, I. Kusunoki and M. Ishigame: "Thermionic emission Aluminiosilicates. (in Japanese)" Bull. Res. Inst. Sci. Meas. Tohoku Univ.37. 33-44 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I. Kusunoki, Y. Terui, T. Sato and M. Hiroi: "Studies of SiC formation on Si(100) by reaction with C_2H_2 molecular beams." Bull. Res. Inst. Sci. Meas. Tohoku Univ.37. 51-73 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Tamura, S. Kita, I. Kusunoki and Y. Sato: "Observation of site-specific electronic excitation in Li^+-CO collisions near threshold." Chem. Phys. Lett.159. 442-446 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] I. Kusunoki, M. Hiroi, T. Sato, Y. Igari and S. Tomoda: "SiC film formation on Si(001) by reaction with C_2H_2 beams." Appl. Surf. Sci.45. 171-187 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Yamashita, K. Morokuma, Y. Shiraishi and I. Kusunoki: "Ab initio potential energy surfaces of change-transfer reaction : F^+ +CO -> F + CO^+" J. Chem. Phys.92. 2505-2516 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. Kita, H. Tamura, I. Kusunoki and Y. Sato: "Electronic excitation in moderate-energy Li^+-N_2 and Li^+-CO collisions." Phys. Rev.A42. 367-382 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J. Murakami, T. Hashimoto and I. Kusunoki: "Ion scattering and surface recoiling from a Si surface by low energy Ne^+ bombardment." Vacuum. 41. 369-371 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J. Murakami, T. Hashimoto and I. Kusunoki: "Positive ion fractions of scattered Ne and recoiled O atoms from water-absorbed Si (100) surfaces by low energy Ne^+ bombardment." Nucl. Instr. and Meth. B. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Ohkubo, Y. Igari, S. Tomoda and I. Kusunoki: "SiO production from Si(100) and (111) surfaces by reaction with O_2 beams" Surf. Sci.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 大窪 克之(K.Ohkubo): "S:O production from Si(100)and(111)surfaces by reaction with O_2 beams" Surface Science.

    • Related Report
      1990 Annual Research Report
  • [Publications] 村上 純一(J.Murakami): "Positive ion fractions of scattered Ne and recoiled O atoms from waterーadsorbed Si(100)surface by low energy Ne^+ bombardment" Nuclear Instruments & Methods in Physics Research,Section B.

    • Related Report
      1990 Annual Research Report
  • [Publications] 村上 純一(J.Murakami): "Ion scattering and surface recoiling from a Si surface by low energy Ne^+ bombardment" Vacuum. 41. 369-371 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 北 重公(S.Kita): "Electronic excitation in moderateーenergy Li^+-N_2 and Li^+-CO collisions" Physical Review A. 42. 367-382 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 山下 晃一(K.Yamashita): "Ab initio potential energy surfaces of chargeーtransfer reactions:F^++CO→F+CO^+" Journal of Chemical Physics. 92. 2505-2516 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 楠 勲(I.Kusunoki): "SiC film formation on Si (001) by reaction with C_2H_2 beams" Applied Surface Science. 45. 171-187 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 楠勲: "SiC Film Formation on Si(001)by Reaction with C_2H_2 Beams" Applied Surface Science.

    • Related Report
      1989 Annual Research Report
  • [Publications] 村上純一: "Ion Scattering and Surface Recoiling from a Si Surface by Low Energy Ne^+ Bombardment" Vacuum.

    • Related Report
      1989 Annual Research Report
  • [Publications] 楠勲: "Stepping motor for Uae in UHV" Vacuum.

    • Related Report
      1989 Annual Research Report
  • [Publications] 山下晃一: "Ab Initio Potcntial Energy Surfaces of ChargeーTransfer Reactions:F^++CO→F+CO^+" J.Chem.Phys.

    • Related Report
      1989 Annual Research Report
  • [Publications] 田沼肇: "Observation of SiteーSpecific Electronic Excitation in Li^+ーCO Collisions near Threshold" Chem.Phys.Letters.159. 442-446 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 村上純一: "Secondary Emission of AlkaliーMetal Ions from Metal Surfaces by Low Energy Ion Bonbardment" Nucl.Inotr.and Meth.B33. 560-563 (1988)

    • Related Report
      1989 Annual Research Report
  • [Publications] J.Murakami: Nuclear Instruments and Methods in Physics Research. B33. 560-563 (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Tanuma: Physical Review A. 38. 5053-5065 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 村上純一: 真空. 31. 583-586 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 楠勲: 応用物理. 57. 1787-1788 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 楠勲: 東北大学科学計測研究所報告. 37. 51-73 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 北重公: 東北大学科学計測研究所報告. 37. 33-49 (1988)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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