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Physicochemical Study on Preparation of Oxidation-Resistant Films on High Temperature Materials and Their Oxidation Rate.

Research Project

Project/Area Number 63430013
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 金属精錬・金属化学
Research InstitutionTokyo Institute of Technology

Principal Investigator

NAGATA Kazuhiro (1989)  Tokyo Institute of Technology Metallurgical Engineering Associate Professor, 工学部, 助教授 (70114882)

後藤 和弘 (1988)  東京工業大学, 工学部, 教授 (70016260)

Co-Investigator(Kenkyū-buntansha) SUSA Masahiro  Tokyo Institute of Technology Metallurgical Engineering Research Associate, 工学部, 助手 (90187691)
MARUYAMA Toshio  Tokyo Institute of Technology Metallurgical Engineering Associate Professor, 工学部, 助教授 (20114895)
永田 和宏  東京工業大学, 工学部, 助教授 (70114882)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1989: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsHigh Temperature Materials / Oxidation Resistance / Thin Film / SiO_2 / Diffusion / Thermal Conductivity / Aluminide Coating / Molibudenum / 拡散係数 / Mo_3Al_8 / コ-ティング / グラファイト / 高温耐酸化性 / コーティング膜 / Al_4C_3 / Al_2O_3 / 熱伝導率 / WO_3
Research Abstract

Improvement of energy efficiency requires materials for high temperature use in oxidizing atmospheres. The coating of oxidation-resistant films on materials is one of the most favorable ways without the degradation of their mechanical properties. Silica and alumina are the potential materials for oxidation-resistant films at temperatures higher than 1000 C in oxidizing conditions. This research dealt with the physical chemistry involving in the preparation or formation of silica and alumina on the surface of high temperature materials, and the protective property against oxidation.
(1) Physicochemical Study on Silica Films on Silicon (a)Mechanism of thermal oxidation of silicon Three kind of silica films were formed on silicon substrates by thermal oxidation, chemical vapor deposition and spin-on glass techniques. These samples were oxidized at elevated temperatures to evaluate the diffusivity of oxygen in the films. The diffusivity varied among the films because of the difference in th … More e microstructure. Oxygen pressure dependence of the oxidation rate indicated that the solubility of oxygen in the silica film was proportional to the oxygen pressure and that the diffusivity was independent of the pressure. (b)Development of a new technique for measurement of thermal conductivity of thin films A new technique named "Spot-Pulse Method" was developed, in which technique a pulsed laser beam was focused on the film and the change in surface temperature was measured. This technique proved to be applied the films with thickness more than 25mum.
(2) Aluminide Coatings on Molybdenum for High Temperature Use (a)Pack-cementation coating of aluminum on molybdenum Aluminum was coated on molybdenum by pack-cementation. A thick film of Mo_3O_8 was formed and thin film of Mo_3Al existed between Mo_3O_8 and Mo. The coating layer contained many cracks which formed during cooling. The cracks were developed perpendicularly to the surface, and some of them reached the Mo substrate. The oxidation resistance of the coated Mo was poor because of the crack reaching the substrate although Mo_3O_8 itself exhibited the high resistance to oxidation forming a continuous Al_2O_3 fayer. (b)Two-stage coating of Si and Al Two-stage coating of Si and Al was developed, in which a small amount of Si was coated prior to the aluminide coating. Mirostructure of the two-stage coating was basically same as that of the aluminide coating but the marked suppression of the formation of cracks. The absence of cracks reaching the Mo substrate provided the extremely strong resistance to high temperature oxidation. Less

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] 須佐匡裕,後藤和弘: "Siウエハの熱酸化に関する基礎研究の現状" 日本金属学会報. 27. 266-276 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 須佐匡裕,永田和宏,後藤和弘: "薄い材料の熱伝導率と熱拡散率測定用スポット加熱法" 日本金属学会誌. 53. 543-549 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: "シリコン基板の熱酸化に及ぼす臭素の影響" 日本金属学会誌. 53. 1054-1061 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 須佐匡裕,永田和宏,後藤和弘: "シリコン基板の熱酸化機構" 日本金属学会誌. 54. 33-40 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: "非晶質シリカ薄膜中の酸素の拡散" 日本金属学会誌. 54. 193-200 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 張力偉,後藤和弘: "表示素子WO_<3-6>薄膜の作成とLi^+の拡散係数の測定" 日本金属学会誌. 53. 906-913 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 畢暁〓,丸山俊夫,永田和宏: "モリブデン表面のアルミニウムコ-ティング層の組織とその耐酸化性" 日本金属学会誌(投稿予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Xiao Fay Bi,Toshio Maruyama and Kazuhiro Nagata: "Phase diagram of MoーAlーSi terrary system at 1323K" J.Less Common Metals(In preparation).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 畢暁〓,丸山俊夫,永田和宏: "ケイ素ーアルミニウム2段拡散処理によるモリブデンの高温酸化" 日本金属学会誌(投稿予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Masahiro Susa, Kazuhiro S. Goto: "A Review on Thermal Oxidation of Si Wafers" Bulletin of the Japan Institute of Metals. 27. 266-274 ((1988))

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Masahiro Susa, Kazuhiro Nagata, Kazuhiro S. Goto: "Spot Heating Method for Measuring Thermal Conductivity and Thermal Diffusivity of Thin Materials" Journal of the Japan Institute of Metals, 53, pp.543-549, (1988).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Masahiro Susa, Hideyuki Shinohara, Kazuhiro Nagata, Kazuhiro S. Goto: "Influence of Bromine on Thermal Oxidation of Silicon Subsrtates" Journal of the Japan Institute of Metals, 53, pp.1054-1061, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Masahiro Susa, Kazuhiro Nagata, Kazuhiro S. Goto: "Mechanism of Thermal Oxidation of Silicon Substrates" Journal of the Japan Institute of Metals, 54, pp.33-40, (1990).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Masahiro Susa, Hideyuki Shinohara, Kazuhiro Nagata, Kazuhiro S. Goto: "Diffusion of Oxygen Molecules in Amorphous Silica Thin Films" Journal of the Japan Institute of Metals, 54, pp.193-200, (1990).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Li Wei Zhang, Kazuhiro S. Goto: "Formation of Thin Films of WO_<3-d> for Display Devices and Diffusivity of Li^+ Ions" Journal of the Japan Institute of Metals 53, pp.906-913, (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 須佐匡裕,後藤和弘: "Siウエハの熱酸化に関する基礎研究の現状" 日本金属学会報. 27. 266-276 (1988)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須佐匡裕,永田和宏,後藤和弘: "薄い材料の熱伝導率と熱拡散率測定用スポット加熱法" 日本金属学会誌. 53. 543-549 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: "シリコン基板の熱酸化に及ぼす臭素の影響" 日本金属学会誌. 53. 1054-1061 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須佐匡裕,永田和宏,後藤和弘: "シリコン基板の熱酸化材構" 日本金属学会誌. 54. 33-40 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: "非晶質シリカ薄膜中の酸素の拡散" 日本金属学会誌. 54. 193-200 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 張力〓,後藤和弘: "表示素子WO_<3ー6>薄膜の作成とLi^+の拡散係数の測定" 日本金属学会誌. 53. 906-913 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 畢暁〓,丸山俊夫,永田和宏: "モリブデン表面のアルミニウムコ-ティング層の組織とその耐酸化性" 日本金属学会誌.

    • Related Report
      1989 Annual Research Report
  • [Publications] Xiao Fang Bi,Toshio Maruyama and Kazuhiro Nagata: "Phase diagram of Mo-Al-Si ternary system at 1323K" J.Less Common Metals.

    • Related Report
      1989 Annual Research Report
  • [Publications] 畢暁〓,丸山俊夫,永田和宏: "ケイ素ーアルミニウム2段拡散処理によるモリブデンの高温酸化" 日本金属学会誌.

    • Related Report
      1989 Annual Research Report
  • [Publications] 須佐匡裕,後藤和弘: 日本金属学会会報. 27. 266-276 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 須佐匡裕,永田和宏,後藤和弘: 日本金属学会誌.

    • Related Report
      1988 Annual Research Report
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: 日本金属学会誌.

    • Related Report
      1988 Annual Research Report
  • [Publications] 須佐匡裕,篠原秀幸,永田和宏,後藤和弘: 日本金属学会誌.

    • Related Report
      1988 Annual Research Report
  • [Publications] 丸山俊夫,河村憲一,後藤和弘: 日本金属学会誌.

    • Related Report
      1988 Annual Research Report
  • [Publications] 張力偉,後藤和弘: 日本金属学会誌.

    • Related Report
      1988 Annual Research Report

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Published: 1989-04-01   Modified: 2016-04-21  

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