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An Analysis of Anisotropic Etching Process and Prediction of Finished Profile

Research Project

Project/Area Number 63460084
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionTOKYO METROPOLITAN UNIVERSITY

Principal Investigator

FURUKAWA Yuji  TOKYO METROPOLITAN UNIV., FACULTY OF TECHNOLOGY, Prof., 工学部, 教授 (10087190)

Co-Investigator(Kenkyū-buntansha) YOKOGAWA Munehiko  TOKYO METROPOLITAN UNIV., FACULTY OF TECHNOLOGY, Research Associate, 工学部, 助手 (10191496)
MORONUKI Nobuyuki  TOKYO METROPOLITAN UNIV., FACULTY OF TECHNOLOGY, Research Associate, 工学部, 助手 (90166463)
SAKUMA Hideo  TOKYO METROPOLITAN UNIV., FACULTY OF TECHNOLOGY, Research Associate, 工学部, 助手 (20128573)
OHISHI Susumu  AOYAMA GAKUIN UNIV., FACULTY OF TECHNOLOGY, Assistant Prof., 工学部, 助教授 (70094258)
SAKAKI Yasuaki  TOKYO METROPOLITAN UNIV., FACULTY OF TECHNOLOGY, Prof., 工学部, 教授 (50083332)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥8,100,000 (Direct Cost: ¥8,100,000)
Fiscal Year 1989: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1988: ¥7,700,000 (Direct Cost: ¥7,700,000)
Keywordsetching / micro maching / finished accuracy / computer simulation / 異方性 / 仕上がり形状 / コンピュータシミュレーション
Research Abstract

Single crystalized pure silicon possesses very high mechanical properties which are equivalent to those of steels, nevertheless, it is not widely applied to the mechanical component because of its difficulty to machine precisely by cutting operation.
On behalf of this, etching is often used in which anisotropic characteristic of single crystal is used. The orientation of faces to compose the shape of finished workpiece can be fundamentally decided by the anisotropic characteristic, however, the finished profile does not always coincide with that of mask, which limits the utilization of the process.
This study makes the anisotropic etching mechanism clear through the experiments under a variety of conditions, and the relation between each etching condition with the process parameters is established empirically. Then, the computer simulation of the process is established based on these relations, by which it becomes possible to foresee the finished profile for any given mask now.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] Y.FURUKAWA: "Computer Simulation of Anisotropic Etching Process Crystal Silcon" CIRP ANNALS. 38. (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 古川勇二,横川宗彦ら: "異方性エッチング加工に関する研究-エッチングメカニズムの考察-" 1989年精密工学介秋季大会学術講演会講演論文集. 165-166 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 古川勇二(予定): "異方性エッチングの発生機構に関する研究-衝突、拡散理論による反応メカニズム-" 1990年精密工学会春季大会学術講演会講演論文集. (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 古川勇二,横川宗彦ら: "異方性エッチングによる微細加工技術" 日本機械学会極限加工システムに関する研究成果報告書. 30-41 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Yuji FURUKAWA and Munehiko YOKOGAWA: "The study on the anisotropic etching -Etching mechanism-" JSPE pre-print, pp165-166. (1989).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Yuji FURUKAWA: "The study on the mechanism of anisotropic etching" JSPE pre-print, (1990).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 古川勇二,横川宗彦ら: "異方性エッチングによる微細加工技術" 日本機械学会極限加工システムに関する研究成果報告書. 30-41 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 古川勇二,横川宗彦ら: "異方性エッチング加工に関する研究ーエッチングメカニズムの考察ー" 精密工学会1989年度秋季大会学術講演会講演論文集. 165-166 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 古川勇二ら: "異方性エッチングの発生機構に関する研究ー衝突、拡散理論による反応メカニズムー" 精密工学会1990年度春季大会学術講演会講演論文集. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] Yuji FURUKAWA.: CIRP ANNALS 1989. 38. (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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