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A study on heat and fluid flow in melt growth process of single crystal

Research Project

Project/Area Number 63460095
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Thermal engineering
Research InstitutionInstitute of Industrial Science, University of Tokyo

Principal Investigator

TANASAWA Ichiro  University of Tokyo, Inst. of Ind. Sci., Professor, 生産技術研究所, 教授 (30013105)

Co-Investigator(Kenkyū-buntansha) MAEKAWA Tohru  Toyo University, Mech. Engng, Associate Professor, 工学部, 助教授 (40165634)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥5,800,000 (Direct Cost: ¥5,800,000)
Fiscal Year 1989: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1988: ¥4,000,000 (Direct Cost: ¥4,000,000)
KeywordsHeat Transfer / Convective Flow / Materials Processing / Single Crystal / Czochralski Growth / Melt Growth / チョクラスキー法 / 引上げ凝固法
Research Abstract

In the first year of this two-year project, an experiment was conducted, using a.glass container which modeled the Czochralski crusible, to observe the heat and fluid flow during the process. The distribution of flow and temperature in the container was visualized microcapsulated liquid crystal suspended in the liquid. As the result, it was found that the flow and the temperature of the liquid oscillate periodically when the parameters, such as the rotation rates of crystal and container, the temperature difference between the wall of the container and the liquid-solid interface and the thermophysical properties of melt, were within a certain range. Numerical simulation by a super-computer revealed that quite similar phenomena occurred even if the boundary conditions were axisymmetric. These results suggest that the growth striations observed in the single crystal grown by the Czochralski method are due to the oscillatory flow in the melt.
In the second year the effect of external magnetic field for damping the oscillatory flow in the Czochralski melt was investigated. As a result of analysis on the effect of magnetic field on natural convection, the flow velocity of the melt is decreased rapidly by magnetic field when its intensity exceeds a certain critical value. Also a numerical analysis was carried out to reveal the effect of magnetic field on the growth process of gallium-arsenide(GaAs). It was found that the magnetic field damped the fluctuation of flow completely if the intensity was sufficient.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] T.Maekawa: "Effect of magnetic Field on Onset of Marangon Convection" Int.J.Heat Mass Transfer. 31. 285-293 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Maekawa: "Natural Convection Deriven by Buoyancy and Surface Tension Forces under External Magnetic Field" Appl.Microgravity Technology. 1. 77-84 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] I.Tanasawa: "Heat and Fluid Flow dwing Crystal Growth from Melt" Preprint of the 2nd Int.Symposium on Heat Transfer. 1. 17-27 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 宗像鉄雄: "融液よりの結晶育成過程における磁場の効果" 日本機械学会論文集(B編). 54. 2545-2549 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 棚沢一郎: "融液からの単結晶育成における熱と流れの問題" 生産研究. 4. 205-210 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Maekawa: "Effect of magnetic Field and Bonyancy on Onset of Marangoni Convection" Int.J.Heat Mass Transfer. 32. 1377-1380 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 宗像鉄雄: "チョクラルスキ-法による単結晶育成時の融液中の対流現象と磁場による変動抑制に関する研究" 日本機械学会論文集(B編). 55. 2610-2617 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Maekawa: "Effect of Magnetic Field on Onset of Marangon Convection" Int. J. Heat Mass Transfer. 31(1988). 285.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Maekawa: "Natural Convection Deriven by Buoyancy and Surface Tension Forces under External Magnetic Field" Appl. Microgravity Technol., 1(1988). 77.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] I. Tanasawa: "Heat and Fluid Flow during Crystal Growth from Melt" Preprint 2nd Int. Symp. Heat Transfer, 1(1988). 17.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Munakata: "Effect of Magnetic Field on the Crystal Growth from Melt" Trans. JSME. Series B 54(1989). 2545.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Munakata: "Heat and Fluid Flow during Growth of Single Crystal from Melt" Seisan Kenkyu. 4(1989).205.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Maekawa: "Effect of Magnetic Field and Bouyancy on Onset of Marangoni Convection" Int. J. Heat Mass Transfer. 32(1989). 1377.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Munakata: "A Study of the Onset of Oscillatory Flow in a Czochralski Growth Melt and Its Suppression by a Magnetic Field" Trans. JSME. Ser. B 55(1989). 2610.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 宗像鉄雄: "融液よりの結晶育成過程における磁場の効果" 日本機械学会論文集. 54. 2545-2549 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 棚沢一郎: "融液からの単結晶育成における熱と流れの問題" 生産研究. 4. 205-210 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Maekawa: "Effect of Magnetic Field and Bouyancy on Onset of Marangoni Convection" Int.J.Heat Mass Transfer. 32. 1377-1380 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 宗像鉄雄: "チョクラルスキ-法による単結晶育成時の融液中の対流現象と磁場による変動抑制に関する研究" 日本機械学会論文集(B編). 55. 2610-2617 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Maekawa;I.Tanasawa: Int.J.Heat Mass Transfer. 31. 285-293 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] T.Maekawa;I.Tanasawa: Appl.Microgravity Technology. 1. 77-84 (1988)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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