| Project/Area Number |
63460116
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子材料工学
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| Research Institution | YAMANASHI UNIVERSITY |
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Principal Investigator |
NAKAGAWA Yasuhiko Faculty of Engineering, Yamanashi University Professor, 工学部, 教授 (50006277)
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| Co-Investigator(Kenkyū-buntansha) |
SUZUKI Yuzi Faculty of Engineering, Yamanashi University Lecture, 工学部, 講師 (70179266)
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| Project Period (FY) |
1988 – 1989
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| Project Status |
Completed (Fiscal Year 1989)
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| Budget Amount *help |
¥6,700,000 (Direct Cost: ¥6,700,000)
Fiscal Year 1989: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1988: ¥6,000,000 (Direct Cost: ¥6,000,000)
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| Keywords | Surface Acoustic Wave / Tantalum pentoxide / Ferroelasticity / Piezoelectric Thin / 強弾性体 |
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| Research Abstract |
Ta_2O_5 thin films have been used for forming thin-film capacitors and, more recently, for optical wave-guides and for antireflection coating on solar cells. These application are essentially based on the high chemical stability of this oxide and especially on its optimum optical properties such as a high refractive index and a very low absorption coefficient for light.
In previous works, the Ta_2O_5 thin films were obtained by he thermal oxidation of a tantalum film evaporated onto a substrate, rf sputtering, and reactive dc sputtering. All Ta_2O_5 thin films obtained in previous work were amorphous, and were not single crystals.
In this research, We have clarified next three points.
(1) The first measurement of the material constants of Ta_2O_5 thin films was investigated. X-axis oriented Ta_2O_5 thin films were deposited on the fused quartz by using the dc diode sputtering method. The material constants were determined from the phase velocity and the electromechanical coupling constant of the bulk waves and the surface acoustic waves propagating on the layered substrate.
(2) The Ta_2O_5 thin film was applied to the surface acoustic wave convolver. The conversion efficiency of the convolver compared, favorably with one of Y.Z,LiNbO3 single crystal. This result shows that the Ta_2O_5 thin film has a possibility to the applicable to the nonlinear acoustic device.
In addition, it was reported that single crystal of Ta_2O_5 was ferro-elastic material.^<10> This single crystal may be able to be applied to electrical and optical switching devices.
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