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Development of New Polyimide Thin Insulating Film Prepared by Vapor Deposition Polymerization

Research Project

Project/Area Number 63460119
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionMie University

Principal Investigator

SAWA Goro  Mie University Dept. of Electronics, Professor, 工学部, 教授 (40023072)

Co-Investigator(Kenkyū-buntansha) IIDA Kazuo  Mie University Dept. of Electronics, Research Associate, 工学部, 助手 (80135425)
NAKAMURA Shuhei  Mie University Dept. of Electronics, Associate Professor, 工学部, 助教授 (70109297)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1990: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1989: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1988: ¥2,200,000 (Direct Cost: ¥2,200,000)
KeywordsVapor Deposition Polymerization / Polyimide / Insulator / Thin Film / Electrical Conduction / Dielectric Breakdown / 絶緑材料
Research Abstract

Polyimide thin films have been prepared by vapor diposition polymerization, which is one of dry process methods for preparation of insulating thin film in electronic devices. A dry process method such as plasma polymerization usually gives a polymer having different structure, such as crosslinking, from a conventionally synthesized polymer. However, among the dry process, the vapor deposition polymerization gives a polymer having the same structure as the conventional polymer.
Firstly, a apparatus for vapor deposition polymerization was designed and developed. The apparatus is featured by a monitor of evaporation rate of monomers and a trap for collection of monomers preventing contamination of pumping system. Regarding the condition of polymerization, it was found that (1) reactive monomers are needed for the vapor deposition polymerization, (2) the polyimide with little amount of residual monomers can be formed with a suitably heated substrate, and (3) the molecular weight is decreased with increasing the substrate temperature.
Next, the anisotropy of the conduction of commercial polyimide films was investigated in relation to the molecular orientation. The photocurrent as well as the molecular chain alignment was found to be anisotropic. It was concluded that the anisotropy was caused by the alignment and orientation of the molecular planes as well as the molecular chains.
The conduction current and dielectric breakdown of the polyimide prepared by vapor deposition polymerization have been investigated. It is shown that the conduction is governed by hopping process at low electric fields, whereas, at high fields, tunneling becomes dominant. The dependence of the dielectric strength on temperature and thickness of the sample leads to a conclusion that the dielectric breakdown of the polyimide in the high temperature region is due to thermal and in low temperatures is due to electron avalanche process.

Report

(4 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] Kazuo Iida: "Anisotropy in Photocurrent Spectra of Poly(4,4'ーoxydiphenylene pyromellitimide)Film" Japanese Journal of Applied Physics. 28. 1390-1395 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Kazuo Iida: "Molecular Orientation and Photocurrent of AlkylーAromatic Polyimide Films Prepared by Vapor Deposition Polymerization" Japanese Journal of Applied Physics. 28. 2552-2555 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Goro Sawa: "Anisotropy of Photoconduction inPolyimide Films" 5th Int. Conf. Dielectric Materials,Measurements and Application. 270-273 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Kazuo Iida: "Preparation of Polyimide Films by Vapor Deposition Polymerization and their Photocurrents" Procedings of 21st Symposium on Electrical Insulating Materials. 227-230 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 飯田 和生: "脂肪族ポリイミド配向膜の作成とその伝導特性" 第22回電気絶縁材料シンポジウム与稿集. 291-294 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 澤 五郎: "ポリイミド薄膜の構造と電気伝導の異方性" 日本学術振興会薄膜第131委員会研究会資料. 149. 52-57 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 飯田 和生: "蒸着重合によるポリイミド薄膜の電気絶縁特性" 電子情報通信学会技術研究報告. 359. 7-11 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 飯田 和生: "蒸着重合法によるポリイミド薄膜の高電界での電気伝導と絶縁破壊" 第23回電気絶縁材料シンポジウム予稿集. 153-156 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iida, T. Nohara, S. Nakamura and G. Sawa: "Anisotropy in Photocurrent Spectra of Poly(4, 4'-Oxydiphenylene pyromellitimide) Film" Japan. J. Appl. Phys.28-8. 1390-1395 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iika, T. Nohara, K. Totani, S. Nakamura and G. Sawa,: "Molecular Orientation and Photocurrent of Alkyl-Aromatic Polyimide Films Prepared by Vapor Deposition Polymerization" Japan. J. Appl. Phys.,. 28-12. 2552-2555 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] G. Sawa, K. Iida, T. Nohara, S. Nakamura and M. Ieda,: "Anisotropy of Photoconduction in Polyimide Films" 5th Int. Conf. Dielectric Materials, Measurements and Applications, Canterbury, June 27-30,. 270-273, (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iida, T. Nohara, S. Nakamura and G. Sawa,: "Preparation of Polyimide Films by Vapor Deposition Polymerization and Their Photocurrents" Proc. 21st Symposium on Electrical Insulating Materials, Sept. 26-28,. 227-230, (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iida, K. Totani, S. Nakamura and G. Sawa,: "Molecular Orientation and Conduction of Aliphatic Polyimide Films Prepared by Vapor Deposition Polymerization" Proc. 22nd Symposium on Electrical Insulating Materials, Oct. 12-13,. 291-294 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] G. Sawa, K. Iida, S. Nakamura,: "Anisotropy of Structure and Conduction of Polyimide Film" JSPS 131st Committee(Thin Film), Dec. 15-16,. 52-57 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iida, K. Totani, S. Nakamura and G. Sawa,: "Electrical Properties of Polyimide Thin Films by Vapor Deposition Polymerization" IEICE Technical Report,. 89-359. 7-11, (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Iida, K. Totani, S. Nakamura and G. Sawa,: "High Field Conduction and Breakdown of Polyimide Film Prepared by Vapor Deposition Polymerization" Proc. 23rd Symposium on Electrical Insulating Materials, Oct. 8-9,. 153-156 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 飯田 和生: "蒸着重合法によるポリイミド薄膜の高電界での電気伝導と絶縁破壊" 第23回電気絶縁材料シンポジウム予稿集. 153-156 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Kazuo Iida: "Molecular Orientation and Photocurrent of Alkyl-Aromatic Polyimide Films Prepared by Vapor Deposition Polymerization" Japanese Journal of Applied Physics. 28. 2252-2255 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 飯田和生: "蒸着重合によるポリイミド薄膜の電気絶縁特性" 電子情報通信学会技術研究報告OME89-50. (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 飯田和生: "脂肪族ポリイミド配向膜の作成とその伝導特性" 第22回電気絶縁材料シンポジウム予稿集. 291-294 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Goro,Sawa: 5th Int.Conf.Dielectric materials,measurements and applications. 270-273 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Kazuo,Iida: Proceedings of 21st Symposium on Electrical Insulating Materials. 227-230 (1988)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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