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Study on the primary dissociation processes of monosilane molecule by electron impact

Research Project

Project/Area Number 63540284
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 物理学一般
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

TSURUBUCHI Seiji  Tokyo Univ. of Agri. and Tech., Faculty of Technology, Associate Professor, 工学部, 助教授 (60028248)

Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1989: ¥100,000 (Direct Cost: ¥100,000)
Fiscal Year 1988: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsMonosilane / Electron impact / Emission cross section / Vacuum ultra-violet / Dissociation / Excited state / Forbidden transition / Lyman series / 解離性励起 / 波長感度校正 / スペクトル強度の絶対測定
Research Abstract

It is generally said that the dissociation process of SiH_4 molecule by electron impact plays an important role in the early steps of building up thin film of amorphous silicon in glow discharge plasmas. It is one of the most fundamental and important knowledge to investigate what happen in the single collision between one electron with definite energy and one SiH_4 molecule. In the present work, the emission cross sections for excited fragments split from SiH_4 by electron impact were measured in the energy range from the threshold to 1000 eV. There is no other report on the measurement of the emission cross sections in the vacuum ultra-violet region for SiH_4. In the following we summarize the results obtained.
1. A detailed spectroscopic assignment for fragment species such as H, si, Si^+, SiH were carried out not only in the visible but also in the vacuum ultraviolet regions. 2. The absolute emission cross sections were measured for those species mentioned above. 3. The energy of electron beam covers a wide range from the threshold up to 1000 eV. 4. The fine structure of the excitation functions were measured and discussed in detail. Especially, the feature of the cross sections for SiH (A-X) around 20 eV differs markedly from the works reported before. 5. The dependence of the emission intensities of the excited hydrogen atom on the principal quantum number n is explained by the idea of the statistical distribution. 6. It was found that the symmetry forbidden states of SiH_4 molecule play a considerable role in producing excited H atoms.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] S.Tsurubuchi,K.Watanabe,K.Motohashih,and T.Arikawa: "Dissociative Excitation of SiH_4 Molecule by Electron Impact." Atomic Collision Research in Japan. 14. 23 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 鶴淵誠二、渡辺和隆、本橋健次、蟻川達男: "電子衝突によるSiH_4分子解離励起過程の分光学的研究" 第3回科学技術展資料集. 116 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S.Tsurubuchi,K.Motohashi,S.Mstsuoka,and T.Arikawa: "Dissociative Excitation of SiH_4 Molecule by Electron Impact" Atomic Collision Research in Japan. 15. 15 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 鶴淵誠二: "電子衝突によるSiH_4分子から解離したH原子ラインマン系列に対する発光断面積" 応用物理. 59. (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S. Tsurubuchi: "Dissociative Excitation of SiH_4 Molecule by Electron Impact" Atom. Coll. Res. in Japan, 14 (1988) 23.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S. Tsurubuchi: "Optical spectroscopic Study on the dissociative Excitation Processes of SiH_4 by Electron Impact (in Japanese)" Abstract of the 3rd Exhibition of Science and Technology, 3 (1988) 16.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S. Tsurubuchi: "Dissociative Excitation of SiH_4 Molecule by Electron Impact" Atom. Coll. Res. in Japan, 15 (1989) 15.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S. Tsurubuchi: "Emission Cross sections for the Lyman series of Hydrogen atom split from SiH_4 by Electron Impact (in Japanese)" OHYO BUTURI 59 (1990).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S.TWURUBUCHI,K.MOTOHASHI,S.MATSUOKA.T.ARIKAWA: "Dissociative Excitation of SiH_4 molecule by Electron Impact" Atomic Collision Research in Japan. 15. 15 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 鶴淵誠二,本橋健次,松岡茂樹,蟻川達男: "電子衝突によるSiH_4分子の解離過程" 日本物理学会秋の分科会(鹿児島大学)講演予稿集. 4. 71 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 鶴淵誠二: "電子衝突によりSiH_4分子から解離したH原子のライマン系列に対する発光断面積" 「応用物理」. 59. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] S.Tsurubuchi;K.Watanabe;K.Motohashi;T.Arikawa: Atomic Collision Research in Japan. 14. 23- (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 鶴淵誠二、渡辺和隆、本橋健次、蟻川達男: 東京農工大学科学技術展'88 第3回先端科学技術展 資料集. 116- (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 鶴淵誠二、渡辺和隆、本橋健次、蟻川達男: 日本物理学会秋の分科会講演予稿集. 4. 34- (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 鶴淵誠二、渡辺和隆、本橋健次、蟻川達男: 日本物理学会第44回年会講演予稿集. 4. (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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