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Basic research on functional hybrid thin film growth processes by optical emission analysis

Research Project

Project/Area Number 63550022
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionTOYO University

Principal Investigator

MURAYAMA Yoichi  Faculty of Engineering, Electrical Eng. Professor, 工学部・電気工学科, 教授 (40057956)

Co-Investigator(Kenkyū-buntansha) KOKAI Hideki  Faculty of Engineering, Electrical Eng. Lecturer, 工学部・電気工学科, 講師 (80058099)
KOMURO Syuji  Faculty of Engineering, Electrical Eng. Associate Prof., 工学部・電気工学科, 助教授 (90120336)
KASIWAGI Kunihiro  Faculty of Engineering, Electrical Eng. Associate Prof., 工学部・電気工学科, 助教授 (30058094)
MORIKAWA Takitaro  Faculty of Engineering, Electrical Eng. Professor, 工学部・電気工学科, 教授 (80191013)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1989: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1988: ¥1,600,000 (Direct Cost: ¥1,600,000)
Keywordsoptical emission analysis / hybrid thin film / プラズマ発光分析 / 反応性イオンプレーティング / InN膜
Research Abstract

Basic research on functional hybrid thin film growth processes by optical emission analysis.
Recently, thin film formation techniques using low pressure plasma processes which are sputter, ion plating, plasma CVD and plasma polymerization have advanced. Ions, electrons, exited particles in these techniques show complicated behavior and were found to have a great influence on thin films properties. The purpose of the present work is to show the relationship between optical emission analysis (OEA system) and crystal stricture of the film formed by rf reactive ion plating.
Emission spectra of plasma in the process of InN film growth is observed for OEA system in order to optical emission spectra of In and N_2 existed in the visible rays range. In the plasma system, N_2 gas pressure and rf power influenced chemical reaction of exited In and N atoms in the plasma of InN film growth process.
The other hand, the crystal structure of InN film was investigated by X-ray diffraction and electron diffraction.
The peak height of InN(101) face in diffraction pattern was observed to be strong in proportion to the number of the N^+ ion.
It was clearly that the N^+ ion have more strong influence than the In^+ ion on InN crystal structure in the rf reactive ion plating.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (2 results)

All Other

All Publications (2 results)

  • [Publications] H.Kokai,Y.Sakamoto,K.Kashiwagi,T.Morikawa,S.Kuramochi,Y.Murayama: "Protection of Organic Materials Against Ultraviolet Rays by Ion-Plated Zinc-Oxide Layer" Japanese Journal of Applied Physics. Vol.27. L1390-L1391 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] H.Kokai,Y.Sakamoto,K.Kashiwagi,T.Morikawa,S.Kuramochi,Y.Murayama: "Protection of Organic Materials Against Ultraviolet Rays by Ion-Plated Zinc-Oxide Layer" Japanese Journal of Applied Physics. Vol.27. L1390-L1391 (1988)

    • Related Report
      1989 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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