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Experimental Studies on Improvement of Surface Properties of Material By Pulsed -Ion-Beam Implantation

Research Project

Project/Area Number 63550065
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械材料工学
Research InstitutionYamanashi University

Principal Investigator

TAKAAI Tetsuya  Mechanical Engineering Department, Faculty of Engineering, Yamanashi University (Professor), 工学部, 教授 (80020460)

Co-Investigator(Kenkyū-buntansha) YATSUI Kiyoshi  Laboratory of Beam Technology, University of Technology, Nagaoka (Professor), 教授 (80029454)
FUKUSHIMA Akira  Mechanical Engineering Department, Faculty of Engineering, Yamanashi University, 工学部, 助手 (90181255)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1989: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1988: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsPulse Ion Beam / Surface Layer of Titan / B, N Ion Implantation / X-ray Analysis / ESCA / Residual Stress / Fusion and Vaporization / Rapid Cooling / 溶融 蒸発 / 大強度パルスイオンビーム発生装置 / 金属チタン表面 / B、Nイオン注入 / 熱的残留応力 / 格子定数
Research Abstract

Conventional, steady-state charged ion beams have been successfully applied in the R and D of materials such as in semiconductor processing, welding, and lithography. On the other hand, intense pulsed light ion beam(LIB), which significantly differs from the conventional ion beams have been recently considered for various applications, particularly in material science. If the LIB is irradiated onto the materials, the surface will be quickly heated to produce high density plasma. In the present experiments, an intense pulsed light ion beam (LIB) applications in materials science have been experimentally studied, where the LIB is utilized as effective "heat" source.
Sintered BN, or sintered apatite chips were used as an ion source.
The obtained conclusions can be summarized as follows: (1) The Vicker's hardness increases almost linearly with increasing the number of shots of LIB. It increases by a factor of 60 % after the irradiation of 100 shots compared to that of no irradiation. (2) Clear evidences have been obtained on the formation of TiN, TiB and TiB_2 from the X-ray diffraction results after being implanted by the high energy LIB Into titanium. (3) Residual stress (tensile) generated in the ion implanted layer of Ti ranges from 200 -400 MPa. The tensile residual stress changes into the compressive stress by after being annealed in vacuum. (4) Apatite coating has been found on the surface of Ti by the irradiation of LIB by "Ion Beam Evaporation"(IBE). The film thickness prepared is estimated to be 6 - 10 mum. The film seems to be homogeneous.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report

Research Products

(33 results)

All Other

All Publications (33 results)

  • [Publications] K.Yatsui,M.Masugata,T.Takaai et al: "Generation and Applecations of Intense Pulsed Ion Beams at Nagaoka." Proceeding of the 7th International Conference On High-Power Particle Beams,Karlsruhe,Germany,July4-8,1988.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T.Takaai,T.Hatsushika,K.Yatsui et al: "Surface Modification Experiment by Intense Pulsed Ion Beam" Proceeding of International Conference on Surface Engineering,Toronto,Canada,June 25-27,1990.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 初鹿敏秋、鈴木喬、鷹合徹也、八井浄ほか: "大強度パルスビ-ム法によるチタン上へのアパタイト皮膜の生成" 電気化学.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 本多、鷹合、八井ほか: "大強度パルスイオンビ-ムによるチタン照射実験" 第48回応用物理学会 学術講演会講演概要、第48回. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 八井、鷹合、升方ほか: "大強度パルスイオンビ-ムによる材料開発" 日本学術振興会、荷電粒子ビ-ムの工業への応用第132委員会、第104回研究会資料.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 本多、鷹合、八井ほか: "大強度パルスイオンビ-ムによるチタン照射実験" 第49回応用物理学会 学術講演会講演概要、第49回. (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K.Yatsui,T.Takaai,M.Masugata et al: "Surface Modification Experiments by Intense Pulsed Ion Beam" 第20会(1989年)シンポジウム「イオン注入とサブミクロン加工」March 7. (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 初鹿、鈴木、鷹合、八井ほか: "大強度パルスイオンビ-ムによるアパタイト皮膜の生成" 電気化学協会 第56回大会 講演概要集. (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 河野、初鹿、鈴木、鷹合、八井ほか: "アパタイトコ-ディング皮膜の調整とその特性" 日本化学会、コロイド及び界面化学研究発表 講演概要集. (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K. Yatsui, M. Masugata T. Takaai et al: "Generation and Applications of Intense Pulsed Ion Beam at Nagaoka" Proceeding of the 7th International Conference on High - Power Particle Beams, Karlsruhe, West Germany, July 4 - 8, 1988.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Takaai, T. Hatsushika, K. Yatsui et al: "Surface Modification Experiment by Intense Pulsed Ion Beam" Proceedings of International Conference on Surface Engineering, Toronto, Canada, June 25 - 27, 1990.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Hatsushika, T. Suzuki, T. Takaai, K. Yatsui et al: "Formation of Apatite Coating on Titan by Intense-Pulsed Ion Beams" Journal of Electrochemistry, Japan.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Honda, T. Takaai, K. Yatsui et al: "Ion Implantation Experiment of Titan by Intense Pulsed Ion Beam" Preprint of the 48th Meeting of Japan Society of Applied Physics, Tokyo, March, 1988.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K. Yatsui, T. Takaai, M. Masugata et al: "Research and Development of Materials by Intense Pulsed Ion Beam" Reprint of the 104th Research Meeting of Nippon Gakujyutsu Shinkoukai, Tokyo, September 14, 1988.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Honda, T. Takaai, K. Yatsui et al: "Ion Implantation Experiment by Intense Pulsed Ion Beam" Reprint of the 49th Meeting of Japan Society of Applied Physics, Toyama, October, 1988.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K. Yatsui, T. Takaai, M. Masugata et al: "Surface Modification Experiments by Intense Pulsed Ion Beam" Proceeding for the 20th Riken Symposium of Ion Implantation and Sub-micron Working, Tokyo, March 7, 1989.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] T. Hatsushika, T. Suzuki, T. Takaai, K. Yatsui et al: "Formation of Apatite Coatings by Intense Pulsed Ion Beam" Reprint of the 56th Meeting of the Japan Society of Electrochemistry, Tokyo, April 4 - 7, 1989.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K. Kouno, T. Hatsushika, T. Suzuki, T. Takaai et al: "Preparation of Apatite Coatings and Properties thereof" Reprint of the Meeting of Japan Chemical Society, Tokyo, October 15, 1989.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] K.Yatsui,M.Masugata,T.Takaai et al;: "Generation and Applications of Intense Pulsed Ion Beams at Nagaoka" Proceeding of the 7th International Conference On High-Power Particle Beams.Karlsruhe,Germany,July4-8. (1988)

    • Related Report
      1989 Annual Research Report
  • [Publications] T.Takaai,T.Hatsushika,K.Yatsui et al;: "Surface Modification Experiment by Intense Pulsed Ion Beam" Proceeding of International Conference on Surface Engineering. Toronto,Canada,June 25-27. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 初鹿敏秋,鈴木喬,鷹合徹也,八井浄ほか: "大強度パルスビ-ム法によるチタン上へのアパタイト皮膜の生成" 電気化学.

    • Related Report
      1989 Annual Research Report
  • [Publications] 本多,鷹合,八井ほか: "大強度パルスイオンビ-ムによるチタン照射実験" 第48会応用物理学会 学術講演会講演概要. ( 48 1988、3( ))

    • Related Report
      1989 Annual Research Report
  • [Publications] 八井,鷹合,升方 ほか: "大強度パルスイオンビ-ムによる材料開発" 日本学術振興会、荷電粒子ビ-ムの工業への応用第132委員会、第104回研究会 資料. ( 63 9 14 ( ))

    • Related Report
      1989 Annual Research Report
  • [Publications] 本田,鷹合,八井ほか: "大強度パルスイオンビ-ムによるチタン照射実験" 第49回応用物理学会 学術講演会講演概要. ( 49 、1988、10( ))

    • Related Report
      1989 Annual Research Report
  • [Publications] K.Yatsui,T.Takaai,M.Masugata et al: "Surface Modification Experiments by Intense Pulsed Ion Beam" 第20回(1989年)シンポジウム「イオン注入とサブミクロン加工」. (March7,1989(Tokyo))

    • Related Report
      1989 Annual Research Report
  • [Publications] 初鹿,鈴木,鷹合,八井ほか: "大強度パルスイオンビ-ムによるアパタイト皮膜の生成" 電気化学協会 第56回大会 講演概要集. ( 4 7-9)

    • Related Report
      1989 Annual Research Report
  • [Publications] 河野,初鹿,鈴木,鷹合,八井ほか: "アパタイトコ-テイング皮膜の調整とその特性" 日本化学会、コロイド及び界面科学研究発表会 講演概要集. ( 10 15)

    • Related Report
      1989 Annual Research Report
  • [Publications] 本多,鷹合,八井 他: 第48回応用物理学会学術講演会講演概要. (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Yatsu,Masukata,Takaai,et.al: Proceeding of 7th Inernational Conference on High-Power Paticle Beams. (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 八井,鷹合,升方 他: 日本学術振興会電粒子ビームの工業への応用第132委員会 第104回研究会資料. (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 本多,鷹合,八井 他: 第49回応用物理学会学術講演会講演概要. (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Yatsui,masukata,Takaai,et.al: 第20回 (1989年) シンポジウム [イオン注入とサブミクロン加工]. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] 鈴木,初鹿,鷹合,八井 他: 電気化学協会第56回大会講演概要. (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-03-31   Modified: 2016-04-21  

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