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Flatness Change of Vacuum Chuck Surface for Ultra-Precision Turning by Elastic and Thermal Deformations

Research Project

Project/Area Number 63550101
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionNiigata University

Principal Investigator

YOKOYAMA Kazuhiro  Niigata University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (00018673)

Co-Investigator(Kenkyū-buntansha) HAYAMI Kiyoshi  Industrial Research Institute of Niigata Prefecture, Manager, 室長
ICHIMIYA Ryoichi  Niigata University, Faculty of Engineering, Professor, 工学部, 教授 (10035595)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1989: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1988: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsUltra-precision lathe / Spindle / Vacuum chuck / Temperature increase / Flatness / Thermal deformation / Elastic deformation / Imbalance / 空気静圧式主軸 / 遠心力 / 直流制動 / 油静圧式主軸 / チャック面 / 温度分布
Research Abstract

Temperature increase and flatness change of vacuum chuck surface on ultra-precision lathe with hydrostatic oil spindle are analyzed. 1.The surface shows nearly uniform temperature increase (max.7.5゚C, at 3000rpm) due to the heat generated by the spindle rotation. 2.Increase in the centrifugal force causes a concave deformation of the surface. (0.265mu m, at 3000 rpm) 3.Probe traversing method is proposed to analyze the flatness change precisely. Thermal deformation due to the spindle rotation changes the surface to a convex profile. Flatness change of the surface is max. 1.9 mu m (at 2000 rpm) - 2.8 mu m (at 3000rpm) . 4.Considering uniform temperature distribution the convex deformation is caused by the structure that the chuck is fastened at the outer portion with steel bolts of which thermal expansion coefficient is less than that of aluminum chuck.
And characteristics of hydrostatic air spindle are analyzed. 5.Static imbalance in appearance is caused when the spindle is stopped by braking with direct current. Statical balancing procedure under this state decreases the rotational accuracy of spindle at high speed operation. This imbalance disappears by free-run stopping of spindle. 6.Maximum static friction moment of the spindle is nearly 30mm*2gf. 7.Amount of the spindle shrink caused by centrifugal force is 3.0mu m (at 7000rpm, 695 mm total length) . 8.Amount of the spindle expansion caused by centrifugal force is 0.3mu m (at 7000rpm, 60mm diameter).

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] 横山和宏: "真空チャック面の弾性変形・熱変形による平面度変化" 精密工学会誌.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 横山和宏: "超精密度旋削におけるチャック面の変形(第1報 遠心力による弾性変形)" 1989年度北陸信越支部=信越地方(長岡)講演会概要集. 1989. (63-64)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 横山和宏: "超精密度旋削におけるチャック面の変形(第2報 主軸部発熱による変形)" 1989年度精密工学会秋季大会学術講演会論文集. 1989. (63-64)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Kazuhiro Yokoyama: "Flatness Change of Vacuum Chuck Surface by Elastic and Thermal Deformations" Journal of the Japan Society of Precision Engineering, contributed.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Kazuhiro Yokoyama: "Deformation of Chuck Surface in Ultra-Precision Turning (1st Report Elastic Deformation by Centrifugal Force)" Preprint of the Japan Society of Mechanical Engineers in Nagaoka Conference, 1989, P63-64.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Kazuhiro Yokoyama: "Deformation of Chuck Surface in Ultra-Precision Turning (2nd Report Thermal Deformation by Heat generated at Main Spindle)" Preprint of the Japan Society of Precision Engineering in Autumn Conference, 1989, P63-64.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 横山和宏: "真空チャック面の弾性変形・熱変形による平面度変化" 精密工学会誌.

    • Related Report
      1989 Annual Research Report
  • [Publications] 横山和宏: "超精密旋削におけるチャック面の変形(第1報遠心力による弾性変形)" 1989年度北陸信越支部=信越地方(長岡)講演会概要集. 63-64 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 横山和宏: "超精密旋削におけるチャック面の変形(第2報主軸部発熱による変形)" 1989年精密工学会秋季大会学術講演会論文集. 63-64 (1989)

    • Related Report
      1989 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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