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Electrical and Optical Properties of Granular Semiconductor Thin Films and Their Applications tO Electronic Devices

Research Project

Project/Area Number 63550229
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionThe University of Electro-Communications

Principal Investigator

MORISAKI Hiroshi  The University of Electro-Communications, Professor, 電気通信学部, 教授 (00029167)

Co-Investigator(Kenkyū-buntansha) ONO Hiroshi  The University of Electro-Communications, Research Associate, 電気通信学部, 助手 (00134867)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1990: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1989: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1988: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsSemiconductor fine particles / Multi-layered Thin films / Ion-beam sputtering / Arc discharge technique / Gasーevaporation technique / Quantumーsize effects / Photoluminescence / ガス中蒸発法 / イオンビームスパッタ法
Research Abstract

In the former section of the present study, SiーSiO_2 multiーlayered thin films have been fabricated by ion beam sputtering deposition technique. The structure has been utilized for observing possible quantum-size effects which are expected to become significant when the thickness of Si layers within the multiーlayered structure becomes thin enough. Unfortunately, infrared Raman spectroscopy has shown that the Si layer is non-crystalline or fine poly-crystalline states. In the latter section, crystalline Si fine particles have been prepared by both gas evaporation and arc discharge techniques. Strong photoluminescence with subbandgap photon energies has been observed in the Si fine particles thus prepared. After oxidation of the fine particles, the photoluminescence has become abovebandgap of Si, the band tail covering the visible light region. This blue shift has been explained by aquantum-size effect originated from Si quantum dots. Several fine structures noted in the photoluminescence spectra have been explained consistently by radiative recombination of electrons and holes within a three-dimensional quantum well taking into account the presence of both heavy and light holes.

Report

(4 results)
  • 1990 Annual Research Report   Final Research Report Summary
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (43 results)

All Other

All Publications (43 results)

  • [Publications] H.Morisaki: "Electrochemical and Electrochromic Aspects of Porous Titania Glass" Appl.Surface Science. 33/34. 818-825 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Morisaki: "Measurement of Electronic States in Aqueous Electrolytes Using OxideーCovered PtーSilicide Electrodes" J.Electrochem.Soc.135. 381-383 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.Masaki: "Optimization of the IonーtoーAtom Arrival Rate for Ion Beam Assisted Ge Deposition" Nucl.Inst.Meth.Phys.Res.(1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Morisaki: "Electronic StateーDensities of AquoーComplex Ions in Water Determined by Electrochemical Tunneling Spectroscopy" J.Electrochem.Soc.136. (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Ono: "Pt/TiO_2 Granular Metal Films as an Oxygen Sensor" Tech.Digest 7th.Sensor Symp.ED87ー168. 25-28 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 小野 洋: "Tiocc2DD/Pt粒状金属薄膜酸素センサ" 電子情報通信学会技術研究報告. ED87ー168. 1-6 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 岩瀬 満雄: "イオンビ-ムスパッタリングによる粒状金属薄膜の製作" プレ-ティングとコ-ティング. 8. 248-251 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 岩瀬 満雄: "イオンビ-ムアシスト蒸着法によるGe膜の製作" プレ-ティングとコ-ティング. 8. 244-247 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 森崎 弘: "Si/SiO_2 多層膜のキャラクタリゼ-ション" 電子情報通信学会技術研究報告. ED88ー151. 1-6 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.Masaki: "Optimization of the IonーtoーAtom Arrival Rate for Ion Beam Assisted Ge Deposition" Nucl.Inst.Math.Phys.Res.B. 37/38. 846-849 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Morisaki: "Electronic State Density of AquoーComplex Ions in Water Determined by Electrochemical Tunneling Spectroscopy" J.Electrochem.Soc.136. 1710-1714 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Morisaki: "Electronic State Densities of Ferrocene and Anthracene in NonーAqueous Solvents Determined by Electrochemical Tunneling Spectroscopy" J.Electrochem.Soc.137. 2759-2763 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Ono: "OxygenーSensitive Surface Layer in PtーTio_2 Composite Film" Japan.J.Appl.Phys.29. 1157-1158 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M.Iwase: "IonーBeamーAssisted Thin Film Deposition" J.Adv.Science. 2. 218-225 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S.Masaki: "IonーBeamーAssisted Deposition of Al Films with Strong Preferential Orientation" To appear in Nucl.Inst.Math.Phys.Res.(1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 安永 均: "半導体工学" 近代科学社, 269 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Morisaki and K. Yazawa: "Electrochemical and Electrochromic Aspects of Porous TitaniaGlass" Appl. Surf. Sci.33/34. 818 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Morisaki, H. Ono and K. Yazawa: "Measurement of the Density of Electronic States in Aqueous Electrolytes Using Oxide-Covered PtーSilicide Electrodes" J. Electrochem. Soc. 135. 381 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. Masaki, M. Iwase and H. Morisaki: "Optimization of the IonーtoーAtom Arrival Rate for Ion Beam Assisted Ge Deposition" Nucl. Inst. Meth. Phys. Res. B37/38. 846 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Morisaki, H. One and K. Yazawa: "Electronic StateDensities of Aquo-Complex Ions in Water Determined byElectrochemical Tunneling Spectroscopy" J. Electrochem. Soc. 136. 1710 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Morisaki, A. Nishikawa, H. One and K. Yazawa: "Electronic State Densities of Ferrocene and Anthracene in Non-aqueous Solvents Determined by Electrochemical Tunneling Spectroscopy" J. Electrochem. Soc.137. 2759 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. One, H. Morisaki, A. Horiike and K. Yazawa: "OxygenーSensitive Surface Layer in Pt/TiO _2 Composite Film" Jpn. J. Appl. Phys. 29. 1157 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] S. Masaki, H. Kobayashi and H. Morisaki: "IonーBeam-Assisted Deposition of Al Films with Strong Preferential Orientation" Nucl. Inst. Meth. Phys. Res. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H. Morisaki, F. W. Ping, H. One. and K. Yazawa: "Above-Bandgap Photoluminescence from Si Fine Particles with Oxide Shell" J. Appl. Phys.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Iwase, S. Masaki and H. Morisaki: "IonーBeam Assisted Thin Film Deposition" J. Adv. Sci.2. 218 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] H.Morisaki: "Electronic State Densities of Ferrocene and Anthracene in NonーAqueous Solvents Determined by Electrochemical Tunneling Spectroscopy" J.Electrochem.Soc.137. 2759-2763 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Ono: "OxygenーSensitive Surface Layer in PtーTiO_2 Composite Film" Japan.J.Appl.Phys.29. 1157-1158 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] M.Iwase: "IonーBeamーAssisted Thin Film Deposition" J.Adv.Science. 2. 218-225 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] S.Masaki: "IonーBeamーAssisted Deposition of Al Films with Strong Preferential Orientation" To appear in Nucl.Inst.Math.Phys.Res.(1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] H.Morisaki: "AboveーBandgap Photoluminescence from Si Fine Particles with Oxide Shell" Submitted to J.Appl.Phys.

    • Related Report
      1990 Annual Research Report
  • [Publications] 安永 均: "半導体工学" 近代科学社, 269 (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] S.Masaki: "Optimization of the Ion-to-Atom Arrival Rate for Ion Beam Assisted Ge Deposition" Nucl.Inst. Math.Phys.Res.B. 37/38. 846-849 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] H.Morisaki: "Electronic State Density of Aquo-Complex Ions in Water Determined by Electrochemical Tunneling Spectroscopy" J.Electrochem.Soc.136. 1710-1714 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] H.Morisaki: "Electronic State Densities of Ferrocene and Anthracene in Non-Aqueous Solvents Determined by Electrochemical Tunneling Spectroscopy" To be published in J.Electrochem.Soc.137. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] H.Morisaki: Appl.Surface Science. 33/34. 818-825 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Morisaki: J.Electrochem.Soc.135. 381-383 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] S.Masaki: Nucl.Inst.Meth.Phys.Res.(1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Morisaki: J.Electrochem.Soc.136. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] H.Ono: Tech.Digest7th.Sensor Symp.25-28 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 小野洋: 電子情報通信学会技術研究報告. ED87-168. 1-6 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 岩瀬満雄: プレーティングとコーティング. 8. 248-251 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 岩瀬満雄: プレーティングとコーティング. 8. 244-247 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 森崎弘: 電子情報通信学会技術研究報告. ED88-151. 1-6 (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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