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An Active Air Bearing

Research Project

Project/Area Number 63850030
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 機械工作
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHIMOKOHBE Akira  Department of Mechanical Engineering for Production, Faculty of Engineering, Tokyo Institute of Technology, Professor, 工学部・生産機械工学科, 教授 (40016796)

Co-Investigator(Kenkyū-buntansha) MORIYAMA Shigeo  Hitachi Ltd., Central Research Laboratory, Senior Development Engineer, 中央研究所, 主任研究員
TOYAMA Akira  Dai-ichi Sokuhan, Advisor, 顧問
AOYAMA Hisayuki  Department of Precision Engineering, Faculty of Engineering, Shizuoka University, 工学部・精密工学科, 助教授 (40159306)
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥17,200,000 (Direct Cost: ¥17,200,000)
Fiscal Year 1989: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 1988: ¥12,700,000 (Direct Cost: ¥12,700,000)
KeywordsAir Bearing / Controlled Bearing / Active Damping / Ultra Precise Positioning / Piezoelectric Actuator / Ultra Precise Mechanism / Mechatronics
Research Abstract

An air journal bearing, capable of controlling two radial motion of its axis was proposed, constructed and its good performance at low axis rotation speed was demonstrated. This step of research focuses on problems which occur, when the axis is rotated at a high speed of more than 1000rpm as well as solutions for these problems.
An air turbine was installed in the bearing. By this turbine, the axis is rotated without mechanical contact with a constant and high speed of more than 1000rpm. In order to execute a repetitive control (mentioned later), two noncontact magnetoresistive elements was installed. These elements generate 400 pulses per each revolution of the axis. These pulses express the angle of rotation of the axis.
In preliminary experiments, a rotation accuracy of 0.3mum was obtained when the axis is rotating at 1000rpin. By using a basic controller of PID-PDD^2 type, the rotation accuracy was improved to less than 0.lmum. A better accuracy could not be achieved. The remaining rotation error had repeatability and it was caused by roundness errors in the axis and the bearing. In order to reduce the error, a repetitive controller (a 32 bit microprocessor) was added to the basic controller. Experiments showed that, even with a imbalance in the axis, a motion accuracy better than 25nm can be achieved. Moreover, a fast and ultra-precise positioning of the rotating axis is possible.
Because of vibrations in the bearing structure, the control was not possible at a rotation speed higher than 1000rpm. This problem was solved by changing the axis and reducing the air film thickness of 20mum to 10mum. Experiments showed that at 1740rpm, the rotation accuracy of the uncontrolled bearing is approximately 0.6mum. This accuracy is improved to less than 0.2mum by the basic controller and to less than 15nm by the repetitive controller.

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] オズワルド,ホリカワ: "アクティブベアリングの動剛性制御" 精密工学会誌. 55-3. 569-574 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O.Horikawa: "An Active Air Bearing" Proceedings of International Conference on Advanced Mechatronics,Tokyo,May,1989. 553-558 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O.Horikawa: "Vibration,Position and Stiffness Control of an Active Air Journal Bearing" Abstracts of Fifth International Precision Engineering Seminar,Monterey,Sept,1989. 321-332 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] オズワルド,ホリカワ: "ジャ-ナル型アクティブベアリング-ラジアル方向2自由度の制御-" 精密工学会誌. 55-11. 2063-2068 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O.Horikawa: "An Active Air Bearing-Control of Radial Axis Motion and Stiffness-" JSME International Journal.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O. Horikawa: "Dynamic Stiffness Control of Active Air Bearing" Journal of the Japan Society of Precision Engineering, (in Japanese). Vol.55, No.10. 569-574 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O. Horikawa: "An Active Air Bearing" Proceedings of International Conference on Advanced Mechatronics, Tokyo, May, 1989. 553-558

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O. Horikawa: "Vibration, Position and Stiffness Control of an Active Air Journal Bearing" Abstracts of 5th International Precision Engineering Seminar, Monterey, Sept., 1989. 321-332

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O. Horikawa: "An Active Air Journal Bearing" Journal of the Japan Society of Precision Engineering, (in Japanese). Vol.55, No.11. 2063-2068 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] O. Horikawa: "An Active Air Bearing -Control of Radial Axis Motion and Stiffness-" International Journal of Japan Society of Mechanical Engineering.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] オズワルド ホリカワ: "アクティブエアベアリングの動剛性制御" 精密工学会誌. 55ー3. 569-574 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] O.Horikawa: "An Active Air Bearing" Proceedings of International Conference on Advanced Mechatronics,Tokyo,May,1989. 553-558 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] O.Horikawa: "Vibration,Position and Stiffness Control of an Active Air Journal Bearing" Abstracts of Fifth International Precision Engineering Seminar,Monterey,Sept.1989. 321-332 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] オズワルド ホリカワ: "ジャ-ナル型アクティブエアベアリングーラジアル方向2自由度の制御ー" 精密工学会誌. 55ー11. 2063-2068 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] O.Horikawa: "An Active Air BearingーControl of Radial Axis Motion and Stiffnessー" JSME International Journal.

    • Related Report
      1989 Annual Research Report
  • [Publications] オズワルド ホリカワ: 精密工学会誌. 55ー3. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] O.Horikawa: Proceedings of International Conference on Advanced Mechatronics,Tokyo,May 1989.

    • Related Report
      1988 Annual Research Report
  • [Publications] O.Horikawa: Proceedings of Fifth International Precision Engineering Seminar,Montley,Sept.1989.

    • Related Report
      1988 Annual Research Report
  • [Publications] オズワルド ホリカワ: 精密工学会誌.

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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