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New Method for Making Multilayers with in Situ Control by Using X-Ray Diffraction

Research Project

Project/Area Number 63850155
Research Category

Grant-in-Aid for Developmental Scientific Research (B).

Allocation TypeSingle-year Grants
Research Field 金属材料(含表面処理・腐食防食)
Research InstitutionMiyagi National College of Technology

Principal Investigator

NOMOTO Toshio (1989-1990)  Miyagi National College of Technology, Mechanical Engineering, Lecturer, 機械工学科, 講師 (50099769)

松浦 真 (1988)  宮城工業高等専門学校, 基礎専門科目, 教授 (40042262)

Co-Investigator(Kenkyū-buntansha) SUZUKI Katsuhiko  Miyagi National College of Technogy, Material Science, Lecturer, 材料工学科, 講師 (80187715)
WATANABE Hirosi  Miyagi National College of Technology, Natural Science, Professor, 一般科目, 教授 (60004313)
ONO Takayuki  Miyagi National College of Technology, Natural Science, Professor (30005342)
野本 俊夫  宮城工業高等専門学校, 機械工学科, 講師
小野 堯之  宮城工業高等専門学校, 一般科目, 教授
Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1990)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1989: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1988: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsMultilayers / X-Ray Diffraction / Solid State Reaction / Rare Earth Metals / In Process Control / Amorphous / Inter-Deffusion / 金属多層膜 / X線小角散乱 / インプロセス制御法 / 固相反応によるアモルファス化
Research Abstract

In order to develop new method for making multilayers by X-ray in-situ control, we have to carry out two main procedures. The first is that we must prepare evaporation system with attaching X-ray generator and detector in its inside. Second is that we must know how we can know the multilayer structure by X-ray diffraction. Because of the unexpected trade of Makoto Matsuura, the head investigator of the first term, as a visiting scientist of IBM T. J. Watson Research center, the first subject can not be accomplished. The second subject, however, were carried out successively by mainly Makoto Matsuura, who couldn't be one of the members of the second term of this project because he has been placed on the half-pay list. We have established the method to analyze structure of thin film multilayer by X-ray using Optical Multilayer Theory. In this work we applied this method to the multilayers made by electron beam deposition. The multilayers consisted of rare earth (Ce and Er) and transition metal (Fe and Co) were found that the multilayers which contain Ce turn into amorphous just after the deposition by solid state reaction. The abnormal fast diffusion was observed for Ce/Co by RBS spectrum. The amorphous formability of these multilayers increase in the order of Er/Fe, Er/Co, Ce/Fe and Ce/Co. This order agrees well with that of eutectic temperatures for these binary alloys. The fast diffusion of rare earth-transition metal multilayers found in this work has developed new method to prepare amorphous magneto optical devices. Rather than sputtering method the solid state reaction method has a good advantage to control the concentration precisely.

Report

(3 results)
  • 1990 Final Research Report Summary
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] 野本 俊夫: "X線回折法による金属多層膜のインプロセス制御とその問題点" 宮城工業高等専門学校研究紀要. 27. (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 松浦 真(第一年度研究代表者): "Lattice Parameters and Local atomic Structure of Siliconーrich SiGe/Si(100) Films" Physical Review B. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 松浦 真: "Solid State Amorphisation of Ce/Fe and Er/Fe Multilayers" Materials Saemce and Engineering. A132. 551-554 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 松浦 真: "Ettects of Third Elements,B,S:and Al,on the Atomic Structure of N:Zr_2 Amorphous Alloyo" J.Non.Crystalline Solids. 122. 45-51 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] 松浦 真: "The Structure of Shortーand Mediumーrange order of Feーrich Amorphous FeーLa Alloyo" J.phys.Condense.Mater.1. 2077-2086 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] J.M.Tonnerre: "MRS Symp.Proc.,Defects in Solids" Structural Defects in Laser Annealed Arsenic Implanted Silicon, P6 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Toshio Nomoto: "New method to control the preparation of multilayer by X-ray diffraction" Annual Report of Miyagi National College of Technology. Vol. 27.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Makoto Matsuura: "Solid State Amorphisation of Ce/Fe and Er/Fe Multilayers" Materials Science and Engineering. A132. 551-554 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Makoto Matsuura: "Effects of Third Elements, B, Si, and Al, on the Atomic Structure of NiZr2 Amorphous Alloys." J. Non Crystalline Solids. Vol. 122. 45-51 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] Makoto Matsuura: "The Structure of Short-and Medium-range Order of Fe rich Amorphous Fe-La Alloys." J. Phys. Conden. Matter.Vol. 1. 2077-2086 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "Lattice Parameters and Local Atomic Structure of Silicon-rich SiGe/Si(100) Films." Physical Review B. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "Solid State Amorphisation of Ce/Fe and Er/Fe Multilayers" Proc. 7th Int. Conf. on Rapidly Quenched Materials, Stockholm, Sweden. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] G. S. Cargill: "EXAFS for Heavily Doped Semiconductors" National Synchrotron Light Source Annual Report. X23. A2-A3 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "Effects of Third Elements, B, Si and Al, on the Atomic Structure of the NiZr_2 Amorphous Alloys" J. Non. Crystalline Solids. 122. 45-51 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "The Structure of Short- and Medium-range Order of Fe-rich amorphous Fe-La Alloys." J. Phys. Conden. Matter. 1. 2077-2086 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "Structural Study of Fe_<100-x>La_x(X=15, 25 and 35) Metallic Glasses by X-ray Diffraction." Solid State Communication. 66. 333-337 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "Changes in Short Range Order Resulting from Hydrogen Absorption of Fe_2Ce and Fe_2Er Metallic Glasses." Material Science and Engineering. 97. 223-226 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M. Matsuura: "X-ray Diffraction Study of Fe_2RE(RE=Ce, Pr, Sm, Gd, Dy, Ho and Er)Metallic Glasses." Zeitshrift fur Physikalishe Chemie Neue Folge. 157. 85-89 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Suzuki: "Electrical Properties and Defects States in Ion Deposited Poly (p-Phenilene sulfide)Films" J. Vacuum Science and Technology. 7. 2062-2065 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] K. Suzuki: "Mass Spectrometric Study of Evaporated Se Films and Melt-Quenched Se Glasses" J. Non. Crystalline Solids.96-96. 555-562 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1990 Final Research Report Summary
  • [Publications] M.Matsuura;T.Fukunaga;K.Fukamichi;Y.Sato;K.Suzuki: Zeitschrift fur Physikalishe Chemie,Newe Folge. 157. 85-89 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] M.Matsuura;K.Fukamichi;H.Komatsu;K.Aoki;T.Masumoto;K.Suzuki: Material Science and Engineering. 97. 223-226 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] M.Matsuura;T.Fukunaga;K.Fukamichi;K.Suzuki: Solid State Communications. 66. 333-337 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] M.Ghatari;M.Matsuura;W.Keune;P.Kschletz;K.Fukamichi: Proc.4-th Int.Conf.on Physics of Magnetic Material(Szczrk-Bila 1988). (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] M.Matsuura;H.Wakabayashi;T.Goto;H.Komatsu;K.Fukamichi: J.Phys.C:Conclensed Mater.(1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] K.Fukamichi;H.Komatsu;T.Goto;H.Wakabayashi;M.Matsuura: J.Mater.Sci.Eng.(1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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