• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Preparation and Properties of Thin Film by Plasma-Assisted CVD for CO_2 Laser Lens

Research Project

Project/Area Number 63890015
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 広領域
Research InstitutionNational Takamatsu College of Technology

Principal Investigator

NAKAMURA Shigeaki  Takamatsu College Chemistry General Education Professor, 一般科目, 教授 (00044024)

Co-Investigator(Kenkyū-buntansha) KUSANAGI Kazumasa  Toyo Opto Device Co. Ltd Researcher, 開発室長
HIRANO Toshio  Takamatsu College Mechanical Engineering Professor, 機械工学科, 教授 (60044038)
YAMAMOTO Yoshihiro  Takamatsu College Physics General Education Professor, 一般科目, 教授 (70044021)
SUITA Yoshikazu  Takamatsu College Mechanical Engineering Assisted Professor, 機械工学科, 助教授 (20044050)
YOSHIOKA Shoji  Takamatsu College Electricl Engineering Professor, 電気工学科, 教授 (20110132)
須崎 嘉文  高松高専, 機械工学科, 講師 (60206456)
Project Period (FY) 1988 – 1990
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥6,100,000 (Direct Cost: ¥6,100,000)
Fiscal Year 1990: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1989: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1988: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsCO_2 lasers lens / Potassium chloride crystals / Arsenic sulfide film / Lithium fiuoride film / Lead fluoride film / Wood processing / 硫化ヒ素薄膜 / 炭酸ガスレ-ザ用窓 / 塩化ナトリウム / フッ化鉛 / 硫化砒素 / 炭酸ガスレ-ザ用鏡 / 窒化チタン / 赤外用薄膜 / プラズマCVD / ゲルマニウム / カルコゲン化物 / 炭酸ガスレーザ
Research Abstract

1. Preparation of KC1 and NaC1 crystals. The growth of KC1 crystals, 80phix70mm, was carried on from the liquid by Automatic pull-up device TK-P1. The growth temperature was controlled as follows :
Also, Nac1 crystal was formed on the same method.
2. Fabrication of lens. The crystals were polished with the abrasives (Water, Liquid paraffin, Ethyl alcohol, Carborundum #500, 800, 1200, and Alumina 0.05 mu) and the dishes to form the lens of 5o and 60 mm focal distances, 60 and 70 mm in diameter, and 28 and 32mm in thickness.
3. Thin film coating. Thin films on the surface of crystals were prepared better by PVD than plasma-assisted CVD to preserve the crystal lens from deliquescence and breakdown. The transmittance of film-coated lens was measured at 10.6mum in wavelength as follows :
4.0.80-1.0mm of a hole was bored at high speed in the planks such as melapi wood and polyvinyl chlor using 17.5W cw CO_2 laser device (Assit gas N_2 : 2Kg/cm^2, XY-table speed : 300mm/s) with KC1//LiF lens. It is found that the present KC1//LiF can be employed instead of zinc selenide CO_2 lasers lens.

Report

(4 results)
  • 1991 Final Research Report Summary
  • 1990 Annual Research Report
  • 1989 Annual Research Report
  • 1988 Annual Research Report
  • Research Products

    (45 results)

All Other

All Publications (45 results)

  • [Publications] SHigeaki Nakamura: "Plasma-assisted deposition Of ARESENIC Sulfide Film By Coevaporation Of ARESENIC AND Hydrogen Sulfide" CHemistry Express. 3. 451-454 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 吉岡 捷爾: "プラズマCVDによるGeーSe薄膜の形成" 講演論文集電気関係学会四国支部連合大会. 21. 255-256 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 須崎 嘉文: "赤外線反射防止膜の設計と制作" 材料科学と高機能化技術ハイテクシンポジウム'88タカマツ,. 2. 29-38 (1988)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 吹田 義一: "蒸着薄膜および電着メッキ層の残留応力解析" 溶接学会論文集. 7. 543-548 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 中村 茂昭: "CVDによる窒化チタン薄膜の製作に関する研究" 創 KAGAWAーTECHNO. 13. 22-36 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "Mechanical And Optical Properties Of Tin CVD-Film On Ceramic" Chemistry Express. 5. 309-312 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 吉岡 捷爾: "高真空蒸着によるGe_<1ーx>Se_X薄膜の形成と電気的光学的特性" 高松工業高等専門学校研究紀要. 25. 65-70 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 須崎 嘉文: "アモルファスSiC薄膜の作製とその構造評価" 高松工業高等専門学校研究紀要. 25. 5-12 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 須崎 嘉文: "薄膜の引掻き試験と付着強度試験" 溶接学会溶接構造研究委員会第94回委員会. 7. 1-5 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshikazu Suita: "Analvsis Of Residual Stresscs In Evaporated And Plating Films" Transaction Of The Japan Weldeing Society. 22. 16-22 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shoji Yoshioka: "Preparetion And Properties Of Ge_<1-X>Se_XFilms" The Colloquium At Material Science And Engineering Department Of Stanford University. 24. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 中村 茂昭: "炭酸ガスレ-ザ切断" 平成2年度産学官交流会香川県テクノポリス推進協議会. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 中村 茂昭: "複合材料の境界面について" 複合材料の再利用システム技術第4回研究会通産省四国工業技術試験所. (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshihiro Yamamoto: "Transition Processes Of Metastable Mercury Atom(6^3 P_2)in The Afterglow" Progress Report,Atomic Coliision Research In Japan. 16. 92-93 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "Plasma-assisted Deposition of Arsenic Sulfide Film by Coevaporation of Arsenic and Hydrogen Sulfide" Chemistry Express. 3. 451-454 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shoji Yoshioka: "Preparation of Ge-Se Thin Film by Plasma-assisted CVD" The REport of Shikoku Electrical Society. 21. 255-256 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshifumi Suzaki: "Design and Fabrication of Antireflection Coatings for Infra-red" High Technological Symposium 88 Takamatsu. 2. 29-38 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshikazu Suita: "Residual Stresses of Thin Films" The Report of japanese Welding Society. 7. 543-548 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "Fabrication of TiN Film by CVD" KAGAWA-TECHNO. 13. 22-36 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "Mechanical and Optical Properties of Thin CVD-Film on Ceramics" Chemistry Express. 5. 309-312 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shoji Yoshioka: "Electrical and Optical Properties of Ge1-xSex Thin Films prepared by Vacuum Evaporation" Annual Reports of Takamatsu National College of Technology. 25. 65-70 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshifumi Suzaki: "Preparation and Structure Properties of Amorphous SiC Thin Film, Annual Reports of Takamatsu National College of Technology" 25. 5-12 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshifumi Suzaki: "Scratch Test and Adhesive Strength of Thin Film" The 94th Conference on Japanese Welding Society. 7. 1-5 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshifumi Suzaki: "Analysis of Residual Stresses in Evaporated and Planting Films" Transaction of The Japanese Welding Society. 22. 16-22 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shoji Yoshioka: "Preparation and Properties of Ge1-xSex Films" The Colloquium at Material Science and Engineering Department of Stanford University. 24. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "CO2 Raser Cutting" The Report of Conference between Industrial Academic Society at Kagawa. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura: "Interfaces in Composite Materials" The 4th Conference of Material Recycle System at Government Industrial Research Institute, Shikoku. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshihiro Yamamoto: "Transition Process of Metastable Mercury Atom (6^3 P_2) in The Afterglow" Progress Report, Atomic Collision Research in Japan. 16. 92-93 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeaki Nakamura,et al.: "Mechanical and Optical Properties of TiN CVDーFilm on Ceramic." Chemistry Express. Vol.5. 309-312 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Yoshikazu Suita,et al.: "Analysis of Residual Stresses in Evaporated and Plating Films." Transaction of The Japan Welding Society. Vol.22. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] Shoji Yoshioka: "Preparation and Properties of Ge_<1ーx>Se_x Films" The Colloquium at Material Science and Engineering Department of Stanford University. Jan.24. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 中村 茂昭: "炭酸ガスレ-ザ切断" 平成2年度産学官交流会 香川県テクノポリス推進協議会・香川県産業立地課. Feb.20. (1991)

    • Related Report
      1990 Annual Research Report
  • [Publications] 中村 茂昭: "複合材料の境界面について" 複合材料の再利用用システム技術 第4回研究会 通産省四国工業技術試験所. Dec.21. (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] Yoshihiro Yamamoto: "Transition Processes of Metastable Mercury Atoms (6^3P_2) in the Afterglow" Progress Report,Atomic Collision Research in Japan. No.16. 92-93 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 溶接学会編 吹田 義一 分担執筆: "溶接・接合便覧" 丸善(株), 1496 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 中村茂昭: "CVDによる窒化チタン薄膜の製作に関する研究" 創 KAGAWAーTECHNO. 13. 22-36 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 中村茂昭: "MECHANICAL AND OPTICAL PROPERTIES OF TiN CVDーFILM ON CERAMIC" Chemistry Express. 5(5). (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 吉岡捷爾: "高真空蒸着によるGe_<1-x>Se_x薄膜の形成と電気的光学的特性" 高松工業高等専門学校研究紀要. 25. 65-70 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須崎嘉文: "アモルファスSiC薄膜の作製とその構造評価" 高松工業高等専門学校研究紀要. 25. 5-12 (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] 豊田政男 吹田義一 平野俊雄 中村茂昭 山本斌曠: "蒸着薄膜および電着メッキ層の残留応力解析" 溶接学会論文集. 7(4). 543-548 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 須崎嘉文 吹田義一 草薙一正: "薄膜の引掻き試験と付着強度試験" 溶接学会溶接構造研究委員会第94回委員会. 7/3〜4. 1-5 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] Shigeaki Nakamura: Chemistry Express. 3. 451-454 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 吉岡捷爾: 講演論文集電気関係学会四国支部連合大会. 21. 255-256 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 須崎嘉文: 材料科学と高機能化技術ハイテクシンポジウム'88タカマツ. 2. 29-38 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] 吹田義一: 溶接学会論文集. 7(4). (1989)

    • Related Report
      1988 Annual Research Report

URL: 

Published: 1988-04-01   Modified: 2019-02-15  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi