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高分子表面への液中プラズマ照射により発現する界面反応場の解明

Publicly Offered Research

Project AreaCreation of Science of Plasma Nano-Interface Interactions
Project/Area Number 24110707
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionKanazawa University

Principal Investigator

石島 達夫  金沢大学, サステナブルエネルギー研究センター, 准教授 (00324450)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2013: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2012: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords重相構造プラズマ / 液中プラズマ / プラズマナノ界面 / マイクロ波プラズマ / 低温大気圧プラズマ / 液中・液界面プラズマ / ナノ界面 / 高分子薄膜
Research Abstract

液中プラズマと高分子表面との相互作用は、固体・液体・気体・プラズマが時間的、空間的に近接して存在し作用する重相構造プラズマの実験系であり極めて複雑である。そのため、液体との相互作用を用いた反応場を安定かつ制御性よく調査するためのプラズマ生成装置が重要である。新たに開発した方式により扁平プラズマを水中気泡内に生成させ高分子表面へプラズマ照射しナノ界面現象の調査を行った。高分子材料には半導体プロセス工程で用いられる種々のレジスト材料を取り扱った。また高分子材料に対するナノ界面の反応現象を検討するために、レジスト材料に高密度・高エネルギーのイオン注入を行うことで界面でのレジスト材のナノ構造を能動的に変えることにより影響を調査した。
ノボラック樹脂をベースとするレジスト膜に、様々なエネルギー、注入密度でイオン注入を行った。一般に、イオン注入されたレジスト材料は硬化し除去が困難となることが知られている。注入イオン種の質量が大きくなるほどアッシング速度が減少するものの、ある一定の厚みのレジストが除去されるとアッシング速度が増加することが分かった。また、過去に研究された湿潤オゾン照射や水素ラジカル照射時のレジストとの表面反応に関わる研究成果より、注入イオン種の質量の違いによってレジスト材の膜厚方向に対する分布が異なることが分かっている。本研究で行った液中プラズマ照射において、アッシング速度が変化するレジスト層の厚さは、レジスト材料が硬化すると推定される膜厚とほぼ一致することから、高分子ナノ界面での反応速度は高分子の架橋により硬化する度合いに強く依存することが明らかとなった。またマイクロ波励起の液中プラズマによる固体表面の高分子膜の除去速度は、常温環境であるにも関わらず従来の手法と比べて極めて速いことが分かった。重相構造プラズマ環境がナノ界面反応を促進しているものと考えられる。

Current Status of Research Progress
Reason

25年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

25年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (23 results)

All 2014 2013 2012 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (16 results) (of which Invited: 4 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Cold plasma on full-thickness cutaneous wound accelerates healing through promoting inflammation, re-epithelialization and wound contraction2014

    • Author(s)
      Nasruddin, Y. Nakajima, K. Mukai, H. Setyowati Esti Rahayu, Muhammad Nur, T. Ishijima, H. Enomoto, Y. Uesugi, J. Sugama, T. Nakatani
    • Journal Title

      Clinical Plasma Medicine

      Volume: 2 Issue: 1 Pages: 1-5

    • DOI

      10.1016/j.cpme.2014.01.001

    • NAID

      120005411692

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A High-Speed Photoresist Removal Process Using Multibubble Microwave Plasma under a Mixture of Multiphase Plasma Environment2013

    • Author(s)
      Tatuo Ishijima, Kohei Nosaka, Yasunori Tanaka, Yoshihiko Uesugi, Yousuke Goto and Hideo Horibe
    • Journal Title

      Applied Physics Letters

      Volume: Vol.103, No.14 Issue: 14 Pages: 142101-142101

    • DOI

      10.1063/1.4823530

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of extra- and intracellular OH radical generation, cancer cell injury, and apoptosis induced by a non-thermal atmospheric-pressure plasma jet2013

    • Author(s)
      K. Ninomiya, T. Ishijima, M. Imamura, T. Yamahara, H. Enomoto, K. Takahashi, Y. Tanaka, Y. Uesugi, N. Shimizu
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 46 Issue: 42 Pages: 425401-425401

    • DOI

      10.1088/0022-3727/46/42/425401

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Investigation of Chemical Species Production Rates in Liquid Induced by Atmospheric Pressure DC Plasma Jet Irradiation2014

    • Author(s)
      T. Ishijima, T. Ito, R. Miyashita, Y. Tanaka, Y. Uesugi
    • Organizer
      Fourteenth International Symposium on Biomimetic Materials Processing
    • Place of Presentation
      Takayama (Japan)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Investigation of Chemical Reactions in Aqueous Solution Irradiated by Non-equilibrium Atmospheric Pressure Plasma Jet using Chemical Probe2013

    • Author(s)
      T. Ishijima, T. Yamahara, M. Imamura, K. Ninomiya, K. Takahashi, Y. Tanaka, Y. Uesugi
    • Organizer
      First International Workshop on Solution Plasma and Molecular Technologies(SPM-1)
    • Place of Presentation
      芝浦工業大学(東京都)
    • Year and Date
      2013-03-08
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Detection of OH Radicals in the Liquid Produced by Nonthermal Atmospheric Pressure Jet Irradiation2013

    • Author(s)
      T. Yamahara, T. Ishijima, M. Imamura, K. Ninomiya, K. Takahashi, Y. Tanaka, Y. Uesugi
    • Organizer
      6th International Conference on PLAsma Nanotechnology and Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Year and Date
      2013-02-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Spectroscopy of hydroxyl radical formed in microwave excited bubble plasma2013

    • Author(s)
      T. Kaga, R. Yamase, C. Kurosawa, Y. Fukumura, T. Ishijima, K. Takahashi
    • Organizer
      6th International Conference on PLAsma Nanotechnology and Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Year and Date
      2013-02-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Observation of water droplet in non-equilibrium plasma2013

    • Author(s)
      H. Enomoto, K. Kato, N. Hieda, T. Ishijima, K. Ninomiya, Y. Uesugi, T. Nakatani
    • Organizer
      6th International Conference on PLAsma Nanotechnology and Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Year and Date
      2013-02-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Formation of microwave bubble plasma on water interface and application to biomass treatment2013

    • Author(s)
      R. Yamase, T. Kaga, C. Kurosawa, Y. Fukumura, T. Ishijima, K. Takahashi
    • Organizer
      6th International Conference on PLAsma Nanotechnology and Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Year and Date
      2013-02-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Effect of Cold Plasma Jet Treatment on Full-Thickness Wound Healing2013

    • Author(s)
      Nasruddin, Y. Nakajima, K. Mukai, T. Ishijima, H. Enomoto, Y. Uesugi, J. Sugama, T. Nakatani
    • Organizer
      6th International Conference on PLAsma Nanotechnology and Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Year and Date
      2013-02-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Investigation of Chemical Reactions in Aqueous Solution Irradiated by Atmospheric Pressure Low Frequency Plasma Jet using Chemical Probe2013

    • Author(s)
      T. Yamahara, T. Ishijima, M. Imamura, K. Ninomiya, K. Takahashi, Y. Tanaka, Y. Uesugi
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2013-01-31
    • Related Report
      2012 Annual Research Report
  • [Presentation] Investigation of Chemical Reactions in Aqueous Solution Irradiated by Atmospheric Pressure Low Frequency Plasma Jet using Chemical Probe2013

    • Author(s)
      T. Ishijima, T. Yamahara, M. Imamura, K. Ninomiya, K. Takahashi, Y. Tanaka, Y. Uesugi
    • Organizer
      The 13th International Symposium on Biomimetic Materials Processing (BMMP-13)
    • Place of Presentation
      ホテルアソシア高山(岐阜県)
    • Year and Date
      2013-01-25
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Micropatterning of Oxide Films by Atmospheric Pressure Plasma Jet assisted Water Lift-off Process2013

    • Author(s)
      T. Niwa, T. Kawae, T. Ishijima, K. Nakanishi, Y. Imazawa, A. Morimoto
    • Organizer
      The 2nd International Conference on Advanced Electromaterials (ICAE2013)
    • Place of Presentation
      Jeju (Korea)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of Novel Photoresist Removal Process using Multi-Phase Plasma2013

    • Author(s)
      T. Ishijima, K. Nosaka, Y. Goto, H. Horibe, Y. Tanaka, Y. Uesugi
    • Organizer
      International Conference on Surface Engineering (ICSE2013) The 50th Anniversary of the Korean Institute of Surface Engineering
    • Place of Presentation
      Busan (Korea)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Reaction of microwave Plasma on water interface and application to biomass treatment2012

    • Author(s)
      R. Yamase, T. Kaga, C. Kurosawa, Y. Fukumura, T. Ishijima, K. Takahashi
    • Organizer
      The Sixth Symposium of Japan Society of Electromagnetic Wave Energy Applications
    • Place of Presentation
      京都大学(京都府)
    • Year and Date
      2012-10-04
    • Related Report
      2012 Annual Research Report
  • [Presentation] Study on hydroxyl radicals formed in microwave bubble plasmas2012

    • Author(s)
      T. Kaga, R. Yamase, C. Kurosawa, Y. Fukumura, T. Ishijima, K. Takahashi
    • Organizer
      The Sixth Symposium of Japan Society of Electromagnetic Wave Energy Applications
    • Place of Presentation
      京都大学(京都府)
    • Year and Date
      2012-10-04
    • Related Report
      2012 Annual Research Report
  • [Presentation] Novel Resist Removal Process using Microwave-excited Plasma in Water2012

    • Author(s)
      Tatsuo lshijima, Yousuke Goto, Hideo Horibe
    • Organizer
      11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)
    • Place of Presentation
      京都大学ローム記念館(京都府)
    • Year and Date
      2012-10-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of Resist Removal Process using Microwave-excited Plasma under Water2012

    • Author(s)
      T. Ishijima, A. Kono, H. Horibe
    • Organizer
      IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      パシフィコ横山(神奈川県)
    • Year and Date
      2012-09-25
    • Related Report
      2012 Annual Research Report
  • [Presentation] Investigation of Resist Removal using Multibubble Plasma Excited by Microwaves under Water2012

    • Author(s)
      T. Ishijima, A. Kono, H. Horibe
    • Organizer
      39th EPS Conference on Plasma Physics and 16th International Congress on Plasma Physics
    • Place of Presentation
      Stockholm Waterfront Congress Centre (Sweden)
    • Year and Date
      2012-07-04
    • Related Report
      2012 Annual Research Report
  • [Remarks] 金沢大学研究者情報

    • URL

      http://ridb.kanazawa-u.ac.jp/public/detail.php?id=4031#tab2

    • Related Report
      2013 Annual Research Report
  • [Remarks] 研究室HP

    • URL

      http://epel.w3.kanazawa-u.ac.jp/publication.htm

    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] プラズマ生成装置2013

    • Inventor(s)
      榎本啓士、石島達夫、中谷壽男
    • Industrial Property Rights Holder
      榎本啓士、石島達夫、中谷壽男
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-156805
    • Filing Date
      2013-07-29
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 液中プラズマ処理装置および液中プラズマ処理方法2012

    • Inventor(s)
      2012年12月27日
    • Industrial Property Rights Holder
      2012年12月27日
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-286076
    • Filing Date
      2012-12-27
    • Acquisition Date
      2012-12-27
    • Related Report
      2012 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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