マイクロ流体界面に形成するシート状反応性プラズマ

• Project Area: Creation of Science of Plasma Nano-Interface Interactions
• Project/Area Number: 24110720
• Research Category: Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Toyota Technological Institute
• Principal Investigator: 佐々木 実 豊田工業大学, 工学部, 教授 (70282100)
• Project Period (FY): 2012-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000); Fiscal Year 2013: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2012: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
• Keywords: 反応性プラズマ / マイクロプラズマ / MEMS / マイクロ流路 / 層流 / Y形合流路 / 平均自由行程 / 拡散長 / シート状反応性プラズマ / ガス界面

Research Abstract

応用が進むマイクロプラズマにおいては、放電に有利な特性長が100μm程度となるため、MEMS技術による高度化が期待されている。代表者らは、プラズマ密度を高くし易い誘導結合型プラズマ源を軸に研究を進めた。点火が難しい問題は、浮遊電極の導入が原理的解決になることを見出した。点火用電源の追加や結線が不要で、部品数増加や構造の複雑化は最小限に留まる。MEMSデバイスとしてのプラズマ点灯を安定して行うには、改善の余地があったが、シールドの効果が明らかとなり、誘導結合型では最小パワーとなる5Wでの点火を実現した。
MEMS技術によって、ガス流路に様々な工夫を加えることができる。マイクロ流路内は層流が安定である。放電ガスと反応ガスの合流路をMEMSプラズマ源と組み合わせ、2つのガスが接する領域にのみ局所形成する反応性プラズマを提案した。2種のガスが合流するY形合流路を持つプラズマ源を製作した。Y形合流路の上流側近傍でプラズマ点灯を実現した。放電ガスにはHeを利用した。(1)反応ガスに大気中のO2ガスを利用し、デバイス中に成膜したダイヤモンドライクカーボンのエッチング跡を観た。プラズマ照射により、流れに沿って特徴的な筋を示した。反応ガス側から放電ガス側に向けて、μm以下で急峻にエッチングが深く入ることはガスの平均自由工程を、その後は50μm程度のテールを示すことはガス拡散長を反映している。(2)次にCF4ガスを供給し、Si基板上にエッチングとデポジションが混じった直線状の痕跡を確認した。いずれの例でも明るいプラズマ領域から離れた下流に、ガス界面で形成された反応性プラズマが局在して生じたことを示す痕跡であった。

Current Status of Research Progress

Reason

25年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

25年度が最終年度であるため、記入しない。

Research Products

• [Journal Article] An Atmospheric Pressure Inductively Coupled Microplasma Source of Vacuum Ultraviolet Light (2014)
  • Author(s): R. Sato, D. Yasumatsu, S. Kumagai, K. Takeda, M. Hori, M. Sasaki
  • Journal Title: Sensors and Actuators A Volume: 215 Pages: 144-149
  • DOI: 10.1016/j.sna.2013.09.018
  • Peer Reviewed
• [Journal Article] Theoretical Calculation of Electromagnetic Field of Floating Metal Wire for Inductively Coupled Micro Plasma Using Spiral Coil (2013)
  • Author(s): Kyyoul Yun, Keisuke Fujisaki, Minoru Sasaki
  • Journal Title: Japanese Journal of Applied Physics Volume: 52 Issue: 1S Pages: 01AA02-01AA02
  • DOI: 10.7567/jjap.52.01aa02
  • Peer Reviewed
• [Journal Article] Minimising plasma irradiation area by micronozzle device towards single-cell treatment (2012)
  • Author(s): Ryutaro Shimane, Shinya Kumagai, Masaru Hori, Minoru Sasaki
  • Journal Title: Micro and Nano Letters Volume: 7 Issue: 12 Pages: 1210-1212
  • DOI: 10.1049/mnl.2012.0555
  • Peer Reviewed
• [Presentation] MEMS Plasma Source and Combinations with Microfluidic Functions (2014)
  • Author(s): Minoru Sasaki
  • Organizer: MEMS workshop for the 4th International Conference on Small Science (ICSS 2014)
  • Place of Presentation: Hong Kong, China
  • Invited
• [Presentation] 3D lithography and micro-plasma possibilities for combining with precision machining (2014)
  • Author(s): Minoru Sasaki
  • Organizer: International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM 2014) Session B 23
  • Place of Presentation: Xi'an, China
• [Presentation] MEMS Nozzle for Localized Irradiation of Atmospheric Pressure Plasma Trapping Micro-Samples (2014)
  • Author(s): R. Shimane, S. Kumagai, H. Hashizume, T. Ohta, M. Ito, M. Hori, M. Sasaki
  • Organizer: ISPlasma2014/IC-PLANTS2014, 06aB05OLN
  • Place of Presentation: 名古屋
• [Presentation] Delay Masking Process Using UV Cured Resist Layer Combined with Deep Reactive Ion Etching for Multiple Height Microstructures (2014)
  • Author(s): R. Sato, T. Sawada, S. Kumagai, M. Sasaki
  • Organizer: ISPlasma2014/IC-PLANTS2014, 06aB03O
  • Place of Presentation: 名古屋
• [Presentation] Length Effect of Floating Wire Electrode in Transportable 144MHz Inductively Coupled Micro-Plasma Source (2014)
  • Author(s): D. Yasumatsu, H. Matsuyama, S. Kumagai, K. Takeda, M. Hori, M. Sasaki
  • Organizer: ISPlasma2014/IC-PLANTS2014, 03aP07
  • Place of Presentation: 名古屋
• [Presentation] A Microplasma Reactor Chip for Utilizing Gas-Gas Interface (2014)
  • Author(s): M. Hashimoto, K. Tsukasaki, R. Sato, S. Kumagai, M. Sasaki
  • Organizer: Proc. 8th Int. Conf. on Reactive Plasmas and 31st Symp. on Plasma Processing, 6P-PM-S14-P35
  • Place of Presentation: 福岡
• [Presentation] Surface Plasmon Polariton Based Wavelength Selective IR Emitter Combined with MEMS Heater with Reduced Thermal Loss (2014)
  • Author(s): T. Sawada, T. Chikuba, S. Kumagai, K. Masuno, M. Ishii, S. Uematsu, M. Sasaki
  • Organizer: Proc. 8th Int. Conf. on Reactive Plasmas and 31st Symp. on Plasma Processing, 5B-AM-08
  • Place of Presentation: 福岡
• [Presentation] Enhanced Wavelength Selective Infrared Emission Using Surface Plasmon Polariton and Thermal Energy Confined in Micro-Heater (2014)
  • Author(s): T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki
  • Organizer: Proc. the 27th Int. Conf. on Micro Electro Mechanical Systems, Th-240, pp.1179-1182
  • Place of Presentation: San Francisco, USA
• [Presentation] MEMSによるマイクロ流体界面での反応性プラズマ形成 (2014)
  • Author(s): 柄崎克樹, 熊谷慎也, 佐々木実
  • Organizer: 日本機械学会 東海支部 第63期総会・講演会, OS3 MEMSと先進材料, 305
  • Place of Presentation: 大同大学, 名古屋
• [Presentation] MEMS大気圧プラズマ光源の省電力化 (2014)
  • Author(s): 佐藤龍仁，熊谷慎也，堀勝，佐々木実
  • Organizer: 第61回応用物理学会春季学術講演会, 19p-PG3-6, p.13-160
  • Place of Presentation: 青山学院大学, 相模原
• [Presentation] MEMS Plasma Source and its Applications (2013)
  • Author(s): Minoru Sasaki, Shinya Kumaga
  • Organizer: The 4th International Workshop on Nanotechnology and Application - IWNA 2013, AMN-O35-I, pp.127-128
  • Place of Presentation: Vung Tau, Vietnam
  • Invited
• [Presentation] Localized Microplasma Generation in MEMS Gas Channel (2013)
  • Author(s): R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
  • Organizer: Proc. 20th Int. Display Workshops, MEET5-2, pp.1409-1412
  • Place of Presentation: 札幌
• [Presentation] A Micro Plasma Reactor Chip: Using Interface in Micro-/Nano-Channels towards Materials Processing (2013)
  • Author(s): M. Hashimoto, R. Sato, S. Kumagai, M. Sasaki
  • Organizer: IEEE Nanotechnology Materials and Devices Conference (IEEE NMDC 2013) WP-2-4
  • Place of Presentation: Tainan, Taiwan
• [Presentation] Microfluidic Device with Accurately Aligned Optical Fibers for Measuring Transmission Spectrum Using Supercontinuum Light (2013)
  • Author(s): H. Iimura, D. Deng, S. Kumagai, Y. Ohishi, M. Sasaki
  • Organizer: Extended Abstracts 2013 Int. Conf. on Solid State Devices and Materials, G-3-2, pp836-837
  • Place of Presentation: 福岡
• [Presentation] Localized Plasma Treatment for Individual Cells (2013)
  • Author(s): R. Shimane, S. Kumagai, M. Hori, M. Sasaki
  • Organizer: Extended Abstracts 2013 Int. Conf. on Solid State Devices and Materials, G-2-6, pp832-833
  • Place of Presentation: 福岡
• [Presentation] Wavelength Selective Infrared Emission via Surface Plasmon Polariton from MEMS Heater for CO2 Gas Sensing (2013)
  • Author(s): K. Masuno, T. Sawada, S. Kumagai, M. Ishii, M. Sasaki, S. Uematsu
  • Organizer: 2013 JSAP-MRS Joint Symposia Abstract DVD, 17p-PM4-26, JSAP-MRS-O-055
  • Place of Presentation: 京都
• [Presentation] Micro-Channel Device for Spectrum Measurement Using Optical Fiber Aligned with Bias Spring with Reversely Tapered Profile (2013)
  • Author(s): H. Iimura, D. Deng, S. Kumagai, Y. Ohishi, M. Sasaki
  • Organizer: Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, WM-S2.5, pp.93-94
  • Place of Presentation: 金沢
• [Presentation] Surface Plasmon Polariton Based Wavelength Selective IR Emitter Combined with Microheater (2013)
  • Author(s): T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki
  • Organizer: Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, TM-S1.5, pp.45-46
  • Place of Presentation: 金沢
• [Presentation] A Microplasma Chip for Radical Monitor (2013)
  • Author(s): R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
  • Organizer: Proc. 2013 IEEE Int. Conf. on Optical MEMS and Nanophotonics, TM-S1.4, pp.43-44
  • Place of Presentation: 金沢
• [Presentation] Etching profile control of alignment spring for combining MEMS micro-channel device and optical fibers (2013)
  • Author(s): H. Iimura, D. Deng, Y. Ohishi, S. Kumagai, M. Sasaki
  • Organizer: Abstracts of The 12th Asia Pacific Physics Conference (APPC12) D2-PMo-5, p.162
  • Place of Presentation: 幕張メッセ
• [Presentation] Indirect Wavelength Selective Infrared Micro-Emitter Using Surface Plasmon Polariton for Gas Sensing (2013)
  • Author(s): T. Sawada, S. Kumagai, K. Masuno, M. Ishii, S. Uematsu, M. Sasaki
  • Organizer: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, M3P.128, pp.518-521
  • Place of Presentation: Barcelona, Spain
• [Presentation] マイクロ流体界面へのシート状反応性プラズマ形成の検証 (2013)
  • Author(s): 橋本將寛，柄崎克樹，熊谷慎也，佐々木実
  • Organizer: 第5回集積化MEMSシンポジウム, 7pm1-E-4
  • Place of Presentation: 仙台
• [Presentation] MEMS大気圧プラズマ光源 (2013)
  • Author(s): 佐藤龍仁，熊谷慎也，堀勝，佐々木実
  • Organizer: 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 6AM2-A-3
  • Place of Presentation: 仙台
• [Presentation] Multiple-Height Microstructure Fabricated by Deep Reactive Ion Etching and Soft Resist Masks Combined with UV Curing (2013)
  • Author(s): Ryoto Sato, Shinya Kumagai, Minoru Sasaki
  • Organizer: 第26回プラズマ材料科学シンポジウム（SPSM26）24a-A-6
  • Place of Presentation: 九州大学, 福岡
• [Presentation] A MICROPLAMA CHIP FOR VUV LIGHT SOURCE (2013)
  • Author(s): Ryoto Sato, Daisuke Yasumatsu, Shinya Kumagai, Masaru Hori, Minoru Sasaki
  • Organizer: The 26th International Conference on Micro Electro Mechanical Systems, Poster 113-Mo, pp.705-708.
  • Place of Presentation: Taipei, Taiwan
• [Presentation] MEMS Plasma VUV Light Source (2013)
  • Author(s): R.SATO, S.KUMAGAI, M.HORI, M.SASAKI
  • Organizer: Proceedings of 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, P1005A, p.71
  • Place of Presentation: Nagoya, Japan
• [Presentation] Local micro-plasma irradiation using MEMS nozzles (2013)
  • Author(s): R. Shimane, H. Asano, S. Kumagai, M. Hori, M. Sasaki
  • Organizer: Proceedings of the 6th International Conference on PLAsma-Nano Technology and Science, P-H11
  • Place of Presentation: Gero, Japan
• [Presentation] MEMSノズルを利用した大気圧プラズマ照射によるマイクロ加工 (2013)
  • Author(s): 島根竜太郎, 熊谷慎也, 太田貴之, 伊藤昌文, 堀勝, 佐々木実
  • Organizer: 第30回プラズマプロセシング研究会 SPP-30, B6-04, pp.103-104
  • Place of Presentation: 浜松
• [Presentation] A MICRO NOZZLE DEVICE TOWARDS PLASMA TREATMENT OF A CELL (2012)
  • Author(s): R. Shimane, S. Kumagai, M. Hori, M. Sasaki
  • Organizer: The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, ac12000186
  • Place of Presentation: Nanjing, China
• [Presentation] Selective Ashing of One Resist Layer Combined with UV Curing (2012)
  • Author(s): Shinya Kumagai, Tatsuki Wajima, Yukio Takeuchi, Minoru Sasaki
  • Organizer: 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) 2-P22, p.260.
  • Place of Presentation: Kyoto, Japan
• [Presentation] MEMS Indirect Wavelength Selective Infrared Emitter Using Surface Plasmon Polariton (2012)
  • Author(s): Takahiro Sawada, Shinya Kumagai, Katsuya Masuno, Makoto Ishii, Shouichi Uematsu, Minoru Sasaki
  • Organizer: 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) Oral, 3T-O07, p.56.
  • Place of Presentation: Kyoto, Japan
• [Presentation] MEMSノズルを利用したマイクロプラズマ照射 (2012)
  • Author(s): 島根竜太郎，浅野博敬，熊谷慎也，堀勝，佐々木実
  • Organizer: 日本機械学会2012年度年次大会講演論文集 No.12-1, J164031
  • Place of Presentation: 金沢
• [Remarks] マイクロメカトロニクス研究室ホームページ
  • URL: http://www.toyota-ti.ac.jp/mems/index.htm
• [Remarks] Micro/Nano Mechatronics Laboratory Home Page
  • URL: http://www.toyota-ti.ac.jp/mems/index.htm
• [Remarks] プラズマとナノ界面の相互作用に関する学術基盤の創生 組織概要
  • URL: http://mm4.ed.kyushu-u.ac.jp/kyudai/soshiki.html
• [Patent(Industrial Property Rights)] 浮遊電極がシールドされた誘導結合型マイクロプラズマ源 (2014)
  • Inventor(s): 佐々木実
  • Industrial Property Rights Holder: 佐々木実
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2014-034796
  • Filing Date: 2014-02-26