グラフェンによるフレキシブルデバイスのパシベーション

• Project Area: Science of Atomic Layer Systems
• Project/Area Number: 26107521
• Research Category: Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Nagoya University
• Principal Investigator: 大野 雄高 名古屋大学, 未来材料・システム研究所, 教授 (10324451)
• Project Period (FY): 2014-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000); Fiscal Year 2015: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2014: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
• Keywords: カーボンナノチューブ / フレキシブルデバイス / グラフェン / 保護膜

Outline of Annual Research Achievements

本研究では、透明で柔軟な全カーボン集積デバイスの高機能化・高性能化に加え、素子特性安定化技術を創出することを目指している。昨年度はCNT薄膜のバイオセンサ応用の開拓やグラフェン薄膜の大面積転写技術について検討した。特に、転写プロセスは確立したものの、パーティクルの除去が課題であった。今年度は、パーティクルの原因を明らかにするとともに、除去処理を検討した。具体的には、SEM/EDXによりパーティクルの組成を調べ、２種類のパーティクルを見出した。ひとつは球状のパーティクルでありSiが検出された。これはCVD炉の石英管に由来すると考えられる。成長温度である1050degCにおいて、石英は水素ガスによりエッチングされることが知られており、分解したSiがCu箔上に再付着したことによるものと考えられる。もうひとつはMg, Ti, Alなどの合金であった。酸で除去できなかったことから、こららの金属の酸化物と思われる。これらの元素はCu箔に含まれていた不純物と推測できる。
これらのパーティクルを除去するため、フッ酸処理を行った。オールカーボン素子を作製する上で問題となる20 nm以上のパーティクルはほとんど除去された。一方で、15 nm以下のパーティクルは依然として半数以上が残っていた。これらはグラフェンの下側に存在するものと推測している。

Research Progress Status

27年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

27年度が最終年度であるため、記入しない。

Research Products

• [Int'l Joint Research] アアルト大学(フィンランド)
• [Journal Article] Highly individual SWCNTs for high performance thin film electronics (2016)
  • Author(s): A. Kaskela, P. Laiho, N. Fukaya, K. Mustonen, T. Susi, H. Jiang, N. Houbenov, Y. Ohno, and E. I. Kauppinen
  • Journal Title: Carbon Volume: 103 Pages: 228-234
  • DOI: 10.1016/j.carbon.2016.02.099
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Angular Sensitivity of VHF-Band CNT Antenna (2015)
  • Author(s): H. Tanaka, Y. Ohno, and Y. Tadokoro
  • Journal Title: IEEE Trans. Nanotechnol. Volume: 14 Issue: 6 Pages: 1112-1116
  • DOI: 10.1109/tnano.2015.2477813
  • Peer Reviewed
• [Journal Article] Overcoming the quality-quantity tradeoff in dispersion and printing of carbon nanotubes by a repetitive dispersion-extraction process (2015)
  • Author(s): H. Shirae, D. Y. Kim, K. Hasegawa, T. Takenobu, Y. Ohno, and S. Noda
  • Journal Title: Carbon Volume: 91 Pages: 20-29
  • DOI: 10.1016/j.carbon.2015.04.033
  • Peer Reviewed
• [Journal Article] Printed, short-channel, top-gate carbon nanotube thin-film transistors on flexible plastic film (2015)
  • Author(s): M. Maeda, J. Hirotani, R. Matsui, K. Higuchi, S. Kishimoto, T. Tomura, M. Takesue, K. Hata, and Y. Ohno
  • Journal Title: Appl. Phys. Exp. Volume: 8 Pages: 045102-045102
  • NAID: 210000137473
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Considerably improved photovoltaic performance of ​carbon nanotube-based solar cells using metal oxide layers (2015)
  • Author(s): F. Wang, D. Kozawa, Y. Miyauchi, K. Hiraoka, S. Mouri, Y. Ohno, and K. Matsuda
  • Journal Title: Nature Commn. Volume: 6 Issue: 1 Pages: 6305-6305
  • DOI: 10.1038/ncomms7305
  • Peer Reviewed / Open Access
• [Journal Article] 透明で柔軟なオールカーボン電子デバイス (2015)
  • Author(s): 大野雄高
  • Journal Title: 応用物理 Volume: 84 Pages: 142-145
  • NAID: 130007718686
  • Peer Reviewed
• [Journal Article] One-Step Sub-10 um Patterning of Carbon-Nanotube Thin Films for Transparent Conductor Applications (2014)
  • Author(s): N. Fukaya, D. Y. Kim, S. Kishimoto, S. Noda, and Y. Ohno
  • Journal Title: ACS Nano Volume: 8 Issue: 4 Pages: 3285-3293
  • DOI: 10.1021/nn4041975
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] True Nanoの世界：カーボンナノチューブ：特異な物性を活かした電子デバイス (2014)
  • Author(s): 大野雄高
  • Journal Title: パリティ Volume: 29 Pages: 18-21
  • Peer Reviewed
• [Presentation] Bio-electronics applications of carbon nanotube thin film (2015)
  • Author(s): Y. Ohno
  • Organizer: The International Chemical Congress of Pacific Basin Societies, PACIFICHEM
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2015-12-19
  • Int'l Joint Research / Invited
• [Presentation] Carbon nanotube flexible devices for wearable healthcare electronics (2015)
  • Author(s): Y. Ohno
  • Organizer: 5th International Conference on Nanotek & Expo
  • Place of Presentation: San Antonio, USA
  • Year and Date: 2015-11-17
  • Int'l Joint Research / Invited
• [Presentation] Carbon nanotube thin film-based transistors and biosensors for flexible healthcare devices (2015)
  • Author(s): Y. Ohno
  • Organizer: The 6th A3 Symposium on Emerging Materials Nanomaterials for Electronics, Energy, and Environment
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2015-11-11
  • Int'l Joint Research / Invited
• [Presentation] Flexible bio-electronics applications of carbon nanotube thin films (2015)
  • Author(s): Y. Ohno
  • Organizer: The International Conference on Small Science
  • Place of Presentation: Phuket, Thailand
  • Year and Date: 2015-11-06
  • Int'l Joint Research / Invited
• [Presentation] Carbon nanotube thin films for flexible and formable electronics (2015)
  • Author(s): Y. Ohno
  • Organizer: 4th International Conference and Exhibition on Materials Science and Engineering
  • Place of Presentation: Orlando, USA
  • Year and Date: 2015-09-15
  • Int'l Joint Research / Invited
• [Presentation] Wafer-scale investigation of electrical characteristics of carbon nanotube thin-film transistors (2015)
  • Author(s): Y. Ohno
  • Organizer: Pre-NT15 Workshop of Carbon Nanotubes and Graphene at U Tokyo
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2015-05-13
  • Int'l Joint Research / Invited
• [Presentation] Electronic and optoelectronic device applications of carbon nanotube thin films (2015)
  • Author(s): Y. Ohno
  • Organizer: Nanotechnology-2015
  • Place of Presentation: Dubai, UAE
  • Year and Date: 2015-04-13
  • Int'l Joint Research / Invited
• [Presentation] カーボンナノチューブ薄膜によるフレキシブルエレクトロニクス (2015)
  • Author(s): 大野雄高
  • Organizer: 附置研究所間アライアンスG1分科会
  • Place of Presentation: 名古屋
  • Year and Date: 2015-03-05
  • Invited
• [Presentation] カーボンナノチューブ薄膜のウェアラブルセンサーデバイス応用 (2015)
  • Author(s): 大野雄高
  • Organizer: 環境調和セラミックス材料研究会
  • Place of Presentation: 名古屋工業大学、名古屋
  • Year and Date: 2015-01-15
  • Invited
• [Presentation] Carbon nanotube thin films for transparent and flexible electronics (2014)
  • Author(s): Y. Ohno
  • Organizer: US JSPS Alumni Association 5th Multidisciplinary Science Forum
  • Place of Presentation: Gainesville, USA
  • Year and Date: 2014-11-07
  • Invited
• [Presentation] Electronic/optoelectronic device applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: 5th A3 Symposium of Emerging Materials
  • Place of Presentation: Tianjin, China
  • Year and Date: 2014-10-19
  • Invited
• [Presentation] Carbon nanotube thin films for transparent and flexible electronics (2014)
  • Author(s): Y. Ohno
  • Organizer: 1st Annual Bis-Ocean Carbon Nanotube International Workshop
  • Place of Presentation: Seoul, Korea
  • Year and Date: 2014-09-26
  • Invited
• [Presentation] Carbon nanotube thin-film devices for transparent and flexible electronics (2014)
  • Author(s): Y. Ohno
  • Organizer: Japan-Korea Joint Symposium on Semiconductor Physics and Technology – Nano-carbon materials including graphene –
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2014-09-17
  • Invited
• [Presentation] Flexible electronics applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: The Fourth International Workshop on Nanocarbon Photonics and Optoelectronics
  • Place of Presentation: Polvijarvi, Finland
  • Year and Date: 2014-08-01
  • Invited
• [Presentation] Flexible electronics applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: The 6th IEEE International Nanoelectronics Conference
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2014-07-28
  • Invited
• [Presentation] カーボンナノチューブ薄膜の形成とデバイス応用 (2014)
  • Author(s): 大野雄高
  • Organizer: 第6回窒化物半導体研究会
  • Place of Presentation: 名城大学、名古屋
  • Year and Date: 2014-07-25
  • Invited
• [Presentation] Flexible electronics applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: CARBON2014
  • Place of Presentation: Jeju, Korea
  • Year and Date: 2014-06-30
  • Invited
• [Presentation] Flexible electronics applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: The Fifteenth International Conference on the Science and Application of Nanotubes
  • Place of Presentation: Los Angeles, USA
  • Year and Date: 2014-06-06
  • Invited
• [Presentation] Flexible electronics applications of carbon nanotube thin films (2014)
  • Author(s): Y. Ohno
  • Organizer: The 41st International Symposium on Compound Semiconductor
  • Place of Presentation: Montpellier, France
  • Year and Date: 2014-05-11
  • Invited
• [Book] Frontiers of Grapheme and Carbon Nanotubes, K. Matsumoto Ed., High-Mobility Thin-Film Transistors for Flexible Electronics Applications (2015)
  • Author(s): Y. Ohno
  • Total Pages: 15
  • Publisher: Springer
• [Remarks] 名古屋大学大野研究室
  • URL: http://qed63.qd.nuqe.nagoya-u.ac.jp/public-j/
• [Remarks] 大野研究室
  • URL: http://qed63.qd.nuqe.nagoya-u.ac.jp/public-j/