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グラフェンによるフレキシブルデバイスのパシベーション

Publicly Offered Research

Project AreaScience of Atomic Layer Systems
Project/Area Number 26107521
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionNagoya University

Principal Investigator

大野 雄高  名古屋大学, 未来材料・システム研究所, 教授 (10324451)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2015: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2014: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Keywordsカーボンナノチューブ / フレキシブルデバイス / グラフェン / 保護膜
Outline of Annual Research Achievements

本研究では、透明で柔軟な全カーボン集積デバイスの高機能化・高性能化に加え、素子特性安定化技術を創出することを目指している。昨年度はCNT薄膜のバイオセンサ応用の開拓やグラフェン薄膜の大面積転写技術について検討した。特に、転写プロセスは確立したものの、パーティクルの除去が課題であった。今年度は、パーティクルの原因を明らかにするとともに、除去処理を検討した。具体的には、SEM/EDXによりパーティクルの組成を調べ、2種類のパーティクルを見出した。ひとつは球状のパーティクルでありSiが検出された。これはCVD炉の石英管に由来すると考えられる。成長温度である1050degCにおいて、石英は水素ガスによりエッチングされることが知られており、分解したSiがCu箔上に再付着したことによるものと考えられる。もうひとつはMg, Ti, Alなどの合金であった。酸で除去できなかったことから、こららの金属の酸化物と思われる。これらの元素はCu箔に含まれていた不純物と推測できる。
これらのパーティクルを除去するため、フッ酸処理を行った。オールカーボン素子を作製する上で問題となる20 nm以上のパーティクルはほとんど除去された。一方で、15 nm以下のパーティクルは依然として半数以上が残っていた。これらはグラフェンの下側に存在するものと推測している。

Research Progress Status

27年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

27年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (31 results)

All 2016 2015 2014 Other

All Int'l Joint Research (1 results) Journal Article (8 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 8 results,  Acknowledgement Compliant: 2 results,  Open Access: 1 results) Presentation (19 results) (of which Int'l Joint Research: 7 results,  Invited: 19 results) Book (1 results) Remarks (2 results)

  • [Int'l Joint Research] アアルト大学(フィンランド)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Highly individual SWCNTs for high performance thin film electronics2016

    • Author(s)
      A. Kaskela, P. Laiho, N. Fukaya, K. Mustonen, T. Susi, H. Jiang, N. Houbenov, Y. Ohno, and E. I. Kauppinen
    • Journal Title

      Carbon

      Volume: 103 Pages: 228-234

    • DOI

      10.1016/j.carbon.2016.02.099

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Angular Sensitivity of VHF-Band CNT Antenna2015

    • Author(s)
      H. Tanaka, Y. Ohno, and Y. Tadokoro
    • Journal Title

      IEEE Trans. Nanotechnol.

      Volume: 14 Issue: 6 Pages: 1112-1116

    • DOI

      10.1109/tnano.2015.2477813

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Overcoming the quality-quantity tradeoff in dispersion and printing of carbon nanotubes by a repetitive dispersion-extraction process2015

    • Author(s)
      H. Shirae, D. Y. Kim, K. Hasegawa, T. Takenobu, Y. Ohno, and S. Noda
    • Journal Title

      Carbon

      Volume: 91 Pages: 20-29

    • DOI

      10.1016/j.carbon.2015.04.033

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Printed, short-channel, top-gate carbon nanotube thin-film transistors on flexible plastic film2015

    • Author(s)
      M. Maeda, J. Hirotani, R. Matsui, K. Higuchi, S. Kishimoto, T. Tomura, M. Takesue, K. Hata, and Y. Ohno
    • Journal Title

      Appl. Phys. Exp.

      Volume: 8 Pages: 045102-045102

    • NAID

      210000137473

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Considerably improved photovoltaic performance of ​carbon nanotube-based solar cells using metal oxide layers2015

    • Author(s)
      F. Wang, D. Kozawa, Y. Miyauchi, K. Hiraoka, S. Mouri, Y. Ohno, and K. Matsuda
    • Journal Title

      Nature Commn.

      Volume: 6 Issue: 1 Pages: 6305-6305

    • DOI

      10.1038/ncomms7305

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] 透明で柔軟なオールカーボン電子デバイス2015

    • Author(s)
      大野雄高
    • Journal Title

      応用物理

      Volume: 84 Pages: 142-145

    • NAID

      130007718686

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] One-Step Sub-10 um Patterning of Carbon-Nanotube Thin Films for Transparent Conductor Applications2014

    • Author(s)
      N. Fukaya, D. Y. Kim, S. Kishimoto, S. Noda, and Y. Ohno
    • Journal Title

      ACS Nano

      Volume: 8 Issue: 4 Pages: 3285-3293

    • DOI

      10.1021/nn4041975

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] True Nanoの世界:カーボンナノチューブ:特異な物性を活かした電子デバイス2014

    • Author(s)
      大野雄高
    • Journal Title

      パリティ

      Volume: 29 Pages: 18-21

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Presentation] Bio-electronics applications of carbon nanotube thin film2015

    • Author(s)
      Y. Ohno
    • Organizer
      The International Chemical Congress of Pacific Basin Societies, PACIFICHEM
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2015-12-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Carbon nanotube flexible devices for wearable healthcare electronics2015

    • Author(s)
      Y. Ohno
    • Organizer
      5th International Conference on Nanotek & Expo
    • Place of Presentation
      San Antonio, USA
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Carbon nanotube thin film-based transistors and biosensors for flexible healthcare devices2015

    • Author(s)
      Y. Ohno
    • Organizer
      The 6th A3 Symposium on Emerging Materials Nanomaterials for Electronics, Energy, and Environment
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2015-11-11
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Flexible bio-electronics applications of carbon nanotube thin films2015

    • Author(s)
      Y. Ohno
    • Organizer
      The International Conference on Small Science
    • Place of Presentation
      Phuket, Thailand
    • Year and Date
      2015-11-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Carbon nanotube thin films for flexible and formable electronics2015

    • Author(s)
      Y. Ohno
    • Organizer
      4th International Conference and Exhibition on Materials Science and Engineering
    • Place of Presentation
      Orlando, USA
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Wafer-scale investigation of electrical characteristics of carbon nanotube thin-film transistors2015

    • Author(s)
      Y. Ohno
    • Organizer
      Pre-NT15 Workshop of Carbon Nanotubes and Graphene at U Tokyo
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-05-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electronic and optoelectronic device applications of carbon nanotube thin films2015

    • Author(s)
      Y. Ohno
    • Organizer
      Nanotechnology-2015
    • Place of Presentation
      Dubai, UAE
    • Year and Date
      2015-04-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] カーボンナノチューブ薄膜によるフレキシブルエレクトロニクス2015

    • Author(s)
      大野雄高
    • Organizer
      附置研究所間アライアンスG1分科会
    • Place of Presentation
      名古屋
    • Year and Date
      2015-03-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] カーボンナノチューブ薄膜のウェアラブルセンサーデバイス応用2015

    • Author(s)
      大野雄高
    • Organizer
      環境調和セラミックス材料研究会
    • Place of Presentation
      名古屋工業大学、名古屋
    • Year and Date
      2015-01-15
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Carbon nanotube thin films for transparent and flexible electronics2014

    • Author(s)
      Y. Ohno
    • Organizer
      US JSPS Alumni Association 5th Multidisciplinary Science Forum
    • Place of Presentation
      Gainesville, USA
    • Year and Date
      2014-11-07
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Electronic/optoelectronic device applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      5th A3 Symposium of Emerging Materials
    • Place of Presentation
      Tianjin, China
    • Year and Date
      2014-10-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Carbon nanotube thin films for transparent and flexible electronics2014

    • Author(s)
      Y. Ohno
    • Organizer
      1st Annual Bis-Ocean Carbon Nanotube International Workshop
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2014-09-26
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Carbon nanotube thin-film devices for transparent and flexible electronics2014

    • Author(s)
      Y. Ohno
    • Organizer
      Japan-Korea Joint Symposium on Semiconductor Physics and Technology – Nano-carbon materials including graphene –
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Flexible electronics applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      The Fourth International Workshop on Nanocarbon Photonics and Optoelectronics
    • Place of Presentation
      Polvijarvi, Finland
    • Year and Date
      2014-08-01
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Flexible electronics applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      The 6th IEEE International Nanoelectronics Conference
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2014-07-28
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] カーボンナノチューブ薄膜の形成とデバイス応用2014

    • Author(s)
      大野雄高
    • Organizer
      第6回窒化物半導体研究会
    • Place of Presentation
      名城大学、名古屋
    • Year and Date
      2014-07-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Flexible electronics applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      CARBON2014
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2014-06-30
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Flexible electronics applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      The Fifteenth International Conference on the Science and Application of Nanotubes
    • Place of Presentation
      Los Angeles, USA
    • Year and Date
      2014-06-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Flexible electronics applications of carbon nanotube thin films2014

    • Author(s)
      Y. Ohno
    • Organizer
      The 41st International Symposium on Compound Semiconductor
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2014-05-11
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Book] Frontiers of Grapheme and Carbon Nanotubes, K. Matsumoto Ed., High-Mobility Thin-Film Transistors for Flexible Electronics Applications2015

    • Author(s)
      Y. Ohno
    • Total Pages
      15
    • Publisher
      Springer
    • Related Report
      2015 Annual Research Report
  • [Remarks] 名古屋大学大野研究室

    • URL

      http://qed63.qd.nuqe.nagoya-u.ac.jp/public-j/

    • Related Report
      2015 Annual Research Report
  • [Remarks] 大野研究室

    • URL

      http://qed63.qd.nuqe.nagoya-u.ac.jp/public-j/

    • Related Report
      2014 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-28  

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