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ワイドレンジプラズモンフィルタを実装したSOI量子イメージセンサの開発

Publicly Offered Research

Project AreaInterdisciplinary research on quantum imaging opened with 3D semiconductor detector
Project/Area Number 26109505
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionShizuoka University

Principal Investigator

小野 篤史  静岡大学, 電子工学研究所, 准教授 (20435639)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥12,740,000 (Direct Cost: ¥9,800,000、Indirect Cost: ¥2,940,000)
Fiscal Year 2015: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2014: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Keywords量子イメージング / プラズモン / SOI
Outline of Annual Research Achievements

本研究目的は,紫外域から赤外域にかけて波長選択性の高いイメージセンサを開発することである.本研究目的達成のため,申請者の専門分野であるプラズモニックデバイスを応用する.提案するイメージセンサは,金属凹凸構造を有するプラズモニックデバイスをSOI基板部にオンチップ形成し,SOI基板をセンサとし(裏面照射型),薄膜SOIに検出回路を集積化した3次元構造である.凹凸周期に対応した波長をもつ光のみが,金属中の伝導電子と共鳴し,センサ部にて高効率に吸収される.金属構造を工夫し,任意波長の光を任意の位置に集光,局在させることにより,従来の裏面照射型の課題であった光クロストークを極限にまで低減することが可能となり,色純度の極めて高いイメージセンサを実現する.
昨年度実施した計算にて最適化した構造をもとに,今年度は,電子線リソグラフィと集束イオンビーム加工を駆使してプラズモンフィルタを作製した.作製したプラズモンフィルタの透過光強度分布と透過スペクトルを観測するため,透過型顕微光学系を構築した.緑色用のプラズモンフィルタを作製し,そのフィルタリング特性を実証した.

Research Progress Status

27年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

27年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (8 results)

All 2016 2015 2014

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (5 results) (of which Int'l Joint Research: 3 results,  Invited: 3 results)

  • [Journal Article] Plasmon-Enhanced Autofluorescence Imaging of Organelles in Label-Free Cells by Deep-Ultraviolet Excitation2016

    • Author(s)
      Masakazu Kikawada, Atsushi Ono, Wataru Inami, and Yoshimasa Kawata
    • Journal Title

      Analytical Chemistry

      Volume: 88 Issue: 2 Pages: 1407-1411

    • DOI

      10.1021/acs.analchem.5b04060

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intensity distribution analysis of cathodoluminescence using the energy loss distribution of electrons2016

    • Author(s)
      Masahiro Fukuta, Wataru Inami, Atsushi Ono, and Yoshimasa Kawata
    • Journal Title

      Ultramicroscopy

      Volume: 160 Pages: 225-229

    • DOI

      10.1016/j.ultramic.2015.10.024

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface plasmon-enhanced fluorescence cell imaging in deep-UV region2015

    • Author(s)
      Masakazu Kikawada, Atsushi Ono, Wataru Inami, and Yoshimasa Kawata
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 7 Pages: 072401-072401

    • DOI

      10.7567/apex.8.072401

    • NAID

      210000137576

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Presentation] Transmission characteristics of metallic ultra thin film for optical color filter2015

    • Author(s)
      Atsushi Ono and Atsutaka Miyamichi
    • Organizer
      Optics & Photonics Taiwan, International Conference 2015
    • Place of Presentation
      Hsinchu, Taiwan
    • Year and Date
      2015-12-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Analysis of transmission characteristics of corrugated metal structure2015

    • Author(s)
      Atsutaka Miyamichi, Atsushi Ono, and Vygantas Mizeikis
    • Organizer
      Inter Academia 2015
    • Place of Presentation
      Congress center, Hamamatsu, Japan
    • Year and Date
      2015-09-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deep ultraviolet plasmonics for enhanced photoelectron emission2015

    • Author(s)
      Atsushi Ono, Naoya Shiroshita, Masakazu Kikawada, Wataru Inami, and Yoshimasa Kawata
    • Organizer
      Applied Optics and Photonics China 2015
    • Place of Presentation
      Beijing, China
    • Year and Date
      2015-05-05
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ナノスリット付き金属回折格子のプラズモニック透過特性2015

    • Author(s)
      宮道篤孝,小野篤史,ミゼイキスビガンタス
    • Organizer
      第9回関東学生研究論文講演会
    • Place of Presentation
      浜松市,静岡大学
    • Year and Date
      2015-03-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Plasmonics for sensor applications2014

    • Author(s)
      Atsushi Ono, Satoh Hiroaki, and Hiroshi Inokawa
    • Organizer
      2nd Asian Image Sensors and Imaging Systems Symposium
    • Place of Presentation
      Tokyo Institute of Technology, Tokyo, Japan
    • Year and Date
      2014-12-01 – 2014-12-02
    • Related Report
      2014 Annual Research Report
    • Invited

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Published: 2014-04-04   Modified: 2018-03-28  

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