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2020 Fiscal Year Annual Research Report

Computational materials design for hetero-bond manipulation

Planned Research

Project AreaMaterials Science and Advanced Elecronics created by singularity
Project/Area Number 16H06418
Research InstitutionMie University

Principal Investigator

伊藤 智徳  三重大学, 工学研究科, 招へい教授 (80314136)

Co-Investigator(Kenkyū-buntansha) 秋山 亨  三重大学, 工学研究科, 准教授 (40362363)
正直 花奈子  三重大学, 工学研究科, 助教 (60779734)
河村 貴宏  三重大学, 工学研究科, 助教 (80581511)
寒川 義裕  九州大学, 応用力学研究所, 教授 (90327320)
Project Period (FY) 2016-06-30 – 2021-03-31
Keywords計算科学 / 特異構造 / 窒化物半導体 / ナノ構造
Outline of Annual Research Achievements

今年度は、各種成長手法との対応を念頭に、対象材料をGaNのみならずAInN、 InGaN等の混晶系に拡張するとともに「特異構造創成指針」の検討を行った。(1)表面ステップでの吸着・脱離に関して、Al(0001)表面におけるステップ端での吸着・脱離の挙動におけるキャリアガス依存性を検討した。その結果、AlN(0001)表面でのキャリアガスに依存した表面モルフォロジーの変化が、ステップ端でのマイグレーション障壁の非対称性(シュエーベル障壁)に起因することを明らかにした。(2)InGaN/GaN(0001)系における量子ドット形成における成長雰囲気依存性、格子不整合度依存性を検討し、それぞれの支配因子を明らかにした。成長雰囲気依存性は表面再構成、格子不整合度依存性はドット形成によるエネルギー利得と強い相関があることを見出した。これらの結果に基づき、量子ドット創成指針を明らかにした。(3)新奇特異構造探索として、III-V族化合物半導体とグラフェンおよびBNで構成される原子層ヘテロ構造での安定性を検討し、III-V族化合物半導体は2層ハニカム(DLHC)構造をもつヘテロ構造を形成し得ること、III-V族半導体に起因する特異な電子状態が発現する可能性を見出した。(4)GaN結晶中の0次元特異構造(Nサイト置換O:ON)の形成プロセスについて、第一原理計算とBCF理論を基に解析を行った。+c([0001]方向)および-c([000-1]方向)に5度オフした場合を比較すると前者の方が残留酸素濃度が約1桁高くなることが報告されており、その原因をステップ端の電荷バランスの観点から明らかにした。また、+c成長において、Mgアクセプタを添加するとMg-O複合欠陥の形成・安定化により残留酸素濃度が増加する現象を見出した。

Research Progress Status

令和2年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和2年度が最終年度であるため、記入しない。

  • Research Products

    (49 results)

All 2021 2020 Other

All Int'l Joint Research (1 results) Journal Article (16 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 16 results,  Open Access: 1 results) Presentation (32 results) (of which Int'l Joint Research: 18 results,  Invited: 10 results)

  • [Int'l Joint Research] ポーランド科学アカデミー高圧物理学研究所(ポーランド)

    • Country Name
      POLAND
    • Counterpart Institution
      ポーランド科学アカデミー高圧物理学研究所
  • [Journal Article] Computational discovery of stable phases of graphene and h-BN van der Waals heterostructures composed of group III-V binary compounds2021

    • Author(s)
      Akiyama Toru、Kawamura Takahiro、Ito Tomonori
    • Journal Title

      Applied Physics Letters

      Volume: 118 Pages: 023101~023101

    • DOI

      10.1063/5.0032452

    • Peer Reviewed
  • [Journal Article] Reaction of NO molecule at 4H-SiC/SiO2 interface: an ab initio study for the effect of NO annealing after dry oxidation2021

    • Author(s)
      Shimizu Tsunashi、Akiyama Toru、Nakamura Kohji、Ito Tomonori、Kageshima Hiroyuki、Uematsu Masashi、Shiraishi Kenji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Pages: SBBD10~SBBD10

    • DOI

      10.35848/1347-4065/abdcb1

    • Peer Reviewed
  • [Journal Article] Activation free energies for formation and dissociation of N-N, C-C, and C-H bonds in a Na-Ga melt2021

    • Author(s)
      Kawamura Takahiro、Imanishi Masayuki、Yoshimura Masashi、Mori Yusuke、Morikawa Yoshitada
    • Journal Title

      Computational Materials Science

      Volume: 194 Pages: 110366~110366

    • DOI

      10.1016/j.commatsci.2021.110366

    • Peer Reviewed
  • [Journal Article] Progress in Modeling Compound Semiconductor Epitaxy: Unintentional Doping in GaN MOVPE2021

    • Author(s)
      Kangawa Yoshihiro、Kusaba Akira、Kempisty Pawel、Shiraishi Kenji、Nitta Shugo、Amano Hiroshi
    • Journal Title

      Crystal Growth & Design

      Volume: 21 Pages: 1878~1890

    • DOI

      10.1021/acs.cgd.0c01564

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Facet stability of GaN during tri-halide vapor phase epitaxy: an ab initio-based approach2021

    • Author(s)
      Yosho Daichi、Matsuo Yuriko、Kusaba Akira、Kempisty Pawel、Kangawa Yoshihiro、Murakami Hisashi、Koukitu Akinori
    • Journal Title

      CrystEngComm

      Volume: 23 Pages: 1423~1428

    • DOI

      10.1039/D0CE01683G

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effect of Step Edges on Adsorption Behavior for GaN(0001) Surfaces during Metalorganic Vapor Phase Epitaxy: AnAb InitioStudy2020

    • Author(s)
      Ohka Takumi、Akiyama Toru、Pradipto Abdul Muizz、Nakamura Kohji、Ito Tomonori
    • Journal Title

      Crystal Growth & Design

      Volume: 20 Pages: 4358~4365

    • DOI

      10.1021/acs.cgd.0c00117

    • Peer Reviewed
  • [Journal Article] Roles of growth kinetics on GaN non-planar facets under metalorganic vapor phase epitaxy condition2020

    • Author(s)
      Seta Yuki、Akiyama Toru、Pradipto Abdul Muizz、Nakamura Kohji、Ito Tomonori
    • Journal Title

      Applied Physics Express

      Volume: 13 Pages: 065505~065505

    • DOI

      10.35848/1882-0786/ab9182

    • Peer Reviewed
  • [Journal Article] Ab initio calculations for the effect of wet oxidation condition on the reaction mechanism at 4H-SiC/SiO2 interface2020

    • Author(s)
      Shimizu Tsunashi、Akiyama Toru、Pradipto Abdul-Muizz、Nakamura Kohji、Ito Tomonori、Kageshima Hiroyuki、Uematsu Masashi、Shiraishi Kenji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Pages: SMMD01~SMMD01

    • DOI

      10.35848/1347-4065/ab85dd

    • Peer Reviewed
  • [Journal Article] Equilibrium Morphologies of Faceted GaN under the Metalorganic Vapor‐Phase Epitaxy Condition: Wulff Construction Using Absolute Surface Energies2020

    • Author(s)
      Seta Yuki、Pradipto Abdul-Muizz、Akiyama Toru、Nakamura Kohji、Ito Tomonori
    • Journal Title

      physica status solidi (b)

      Volume: 257 Pages: 1900523~1900523

    • DOI

      10.1002/pssb.201900523

    • Peer Reviewed
  • [Journal Article] Effects of Wet Ambient on Dry Oxidation Processes at 4H-SiC/SiO2 Interface: An Ab Initio Study2020

    • Author(s)
      Shimizu Tsunashi、Akiyama Toru、Nakamura Kohji、Ito Tomonori、Kageshima Hiroyuki、Uematsu Masashi、Shiraishi Kenji
    • Journal Title

      ECS Transactions

      Volume: 98 Pages: 37~46

    • DOI

      10.1149/09803.0037ecst

    • Peer Reviewed
  • [Journal Article] A Simple Approach to Growth Mode of InN and InGaN Thin Films on GaN(0001) Substrate2020

    • Author(s)
      Nagai Katsuya、Akiyama Toru、Nakamura Kohji、Ito Tomonori
    • Journal Title

      ECS Transactions

      Volume: 98 Pages: 155~164

    • DOI

      10.1149/09806.0155ecst

    • Peer Reviewed
  • [Journal Article] Absolute surface energies of oxygen-adsorbed GaN surfaces2020

    • Author(s)
      Kawamura Takahiro、Akiyama Toru、Kitamoto Akira、Imanishi Masayuki、Yoshimura Masashi、Mori Yusuke、Morikawa Yoshitada、Kangawa Yoshihiro、Kakimoto Koichi
    • Journal Title

      Journal of Crystal Growth

      Volume: 549 Pages: 125868~125868

    • DOI

      10.1016/j.jcrysgro.2020.125868

    • Peer Reviewed / Open Access
  • [Journal Article] Modeling carbon coverage on polar GaN surfaces during MOVPE2020

    • Author(s)
      Yosho Daichi、Inatomi Yuya、Kangawa Yoshihiro
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Pages: 048002~048002

    • DOI

      10.35848/1347-4065/ab80e2

    • Peer Reviewed
  • [Journal Article] Computational study of oxygen stability in vicinal m(10-10)-GaN growth by MOVPE2020

    • Author(s)
      Shintaku Fumiya、Yosho Daichi、Kangawa Yoshihiro、Iwata Jun-Ichi、Oshiyama Atsushi、Shiraishi Kenji、Tanaka Atsushi、Amano Hiroshi
    • Journal Title

      Applied Physics Express

      Volume: 13 Pages: 055507~055507

    • DOI

      10.35848/1882-0786/ab8723

    • Peer Reviewed
  • [Journal Article] Oxygen Incorporation Kinetics in Vicinal m(10-10) Gallium Nitride Growth by Metal‐Organic Vapor Phase Epitaxy2020

    • Author(s)
      Yosho Daichi、Shintaku Fumiya、Inatomi Yuya、Kangawa Yoshihiro、Iwata Jun-Ichi、Oshiyama Atsushi、Shiraishi Kenji、Tanaka Atsushi、Amano Hiroshi
    • Journal Title

      physica status solidi (RRL) -Rapid Research Letters

      Volume: 14 Pages: 2000142~2000142

    • DOI

      10.1002/pssr.202000142

    • Peer Reviewed
  • [Journal Article] Self-formed compositional superlattices triggered by cation orderings in m-plane Al1-xInxN on GaN2020

    • Author(s)
      Chichibu Shigefusa F.、Shima Kohei、Kojima Kazunobu、Kangawa Yoshihiro
    • Journal Title

      Scientific Reports

      Volume: 10 Pages: 18570-1~11

    • DOI

      10.1038/s41598-020-75380-3

    • Peer Reviewed
  • [Presentation] Orientation dependence of growth mode for InN and InGaN on GaN substrate from nano- and macro-theoretical viewpoints2021

    • Author(s)
      Katsuya Nagai, Toru Akiyama, Tomonori Ito
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research
  • [Presentation] Effect of step edges on the adsorption behavior on vicinal AlN(0001) surface during metal-organic vapor phase epitaxy: an ab initio study2021

    • Author(s)
      Toru Akiyama, Takumi Ohka, Katsuya Nagai, Tomonori Ito
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research
  • [Presentation] Influence of Lattice Distortion on the Effective Bandgaps of Polar InN/AlN Superlattices2021

    • Author(s)
      Kouhei Basaki, Akito Korei, Takahiro Kawamura, Toru Akiyama, Yoshihiro Kangawa
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research
  • [Presentation] Computational materials science for growth mode of semiconductor heteroepitaxial systems2021

    • Author(s)
      Tomonori Ito and Toru Akiyama
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research
  • [Presentation] First-Principles Calculation of Electronic Structure of GaN with Point and Complex Defects2021

    • Author(s)
      Satoshi Ohata, Takahiro Kawamura, Akira Kitamoto, Masayuki Imanishi, Masashi Yoshimura, and Yusuke Mori
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research
  • [Presentation] Quantitative compatibility of ab initio thermodynamics with real growth processes of III nitrides semiconductors2021

    • Author(s)
      Pawel Kempisty, Konrad Sakowski, Akira Kusaba, and Yoshihiro Kangawa
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Int'l Joint Research / Invited
  • [Presentation] Bandgaps of InN/AlN superlattices and AlInN alloys: Influence of composition and strain2021

    • Author(s)
      Takahiro Kawamura, Akito Korei, Kouhei Basaki, Toru Akiyama, Yoshihiro Kangawa, Izabela Gorczyca, Tadeusz Suski, Malgorzata Wierzbowska, and Stanislaw Krukowski
    • Organizer
      Virtual Workshop on Materials Science and Advanced Electronics Created by Singularity
    • Int'l Joint Research
  • [Presentation] More quantitative prediction of III-nitride growth: theoretical and data-driven approaches2021

    • Author(s)
      Akira Kusaba, Yoshihiro Kangawa
    • Organizer
      International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation 2021
    • Int'l Joint Research / Invited
  • [Presentation] Ab initio atomistic thermodynamics of pseudo-hot surfaces in the context of GaN growth and doping2021

    • Author(s)
      Pawel Kempisty, Stanislaw Krukowski, and Yoshihiro Kangawa
    • Organizer
      International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation 2021
    • Int'l Joint Research / Invited
  • [Presentation] Recent progress in computational materials science for III-nitride epitaxial growth: effects of growth kinetics on surface morphologies and nanostructures2021

    • Author(s)
      Toru Akiyama, Yuki Seta, Takumi Ohka, Tomonori Ito
    • Organizer
      International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation 2021
    • Int'l Joint Research / Invited
  • [Presentation] Change of the effective bandgaps of InN/AlN superlattices due to lattice distortion2021

    • Author(s)
      Takahiro Kawamura, Akito Korei, Kouhei Basaki, Toru Akiyama, Yoshihiro Kangawa, Izabela Gorczyca, Tadeusz Suski, Magorzata Wierzbowska, and Stanisaw Krukowski
    • Organizer
      International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation 2021
    • Int'l Joint Research
  • [Presentation] A systematic approach for the interfacial reaction of O2 molecule under wet oxidation condition at 4H-SiC/SiO2 interface2021

    • Author(s)
      T. Shimizu, T. Akiyama, K. Nakamura, T. Ito, H. Kageshima, M. Uematsu, and K. Shiraishi
    • Organizer
      International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation 2021
    • Int'l Joint Research
  • [Presentation] Impurity incorporation mechanism in GaN MOVPE: ab initio-based approach2021

    • Author(s)
      Yoshihiro Kangawa
    • Organizer
      SPIE Photonic West OPTO
    • Int'l Joint Research / Invited
  • [Presentation] Surface coverage of impurities during GaN and AlN MOVPE2021

    • Author(s)
      Daichi Yosho, Yoshihiro Kangawa
    • Organizer
      13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science
    • Int'l Joint Research
  • [Presentation] Modeling semiconductor epitaxy for next generation power device application2021

    • Author(s)
      Yoshihiro Kangawa
    • Organizer
      IMI Workshop on Fiber Topology Meets Applications
    • Invited
  • [Presentation] ドライおよびウェット酸化種が共存する4H-SiC/SiO2界面での反応機構の理論的検討2021

    • Author(s)
      清水紀志, 秋山亨, 伊藤智徳, 影島博之, 植松真司, 白石賢二
    • Organizer
      2021年第68回応用物理学会春季学術講演会
  • [Presentation] 第一原理計算によるIII-V族化合物-グラフェン超格子の構造および電子状態解析2021

    • Author(s)
      秋山亨, 河村貴宏, 伊藤智徳
    • Organizer
      2021年第68回応用物理学会春季学術講演会
  • [Presentation] 表面・界面制御による特異構造創成2021

    • Author(s)
      伊藤智徳
    • Organizer
      2021年第68回応用物理学会春季学術講演会
    • Invited
  • [Presentation] Reaction of NO molecule at 4H-SiC/SiO2 interface: an ab initio study for the effect of NO annealing after dry oxidation2020

    • Author(s)
      T. Shimizu, T. Akiyama, K. Nakamura, T. Ito, H. Kageshima, M. Uematsu, and K. Shiraishi
    • Organizer
      2020 International Conference on Solid State Devices and Materials
    • Int'l Joint Research
  • [Presentation] Computational prediction for stable structures of graphene van der Waals heterostructures composed of group-III-V compounds2020

    • Author(s)
      T. Akiyama, K. Nakamura, T. Ito
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid State Science
    • Int'l Joint Research
  • [Presentation] Effects of wet ambient on dry oxidation processes at 4H-SiC/SiO2 interface: an ab initio study2020

    • Author(s)
      T. Shimizu, T. Akiyama, K. Nakamura, T. Ito, H. Kageshima, M. Uematsu, and K. Shiraishi
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid State Science
    • Int'l Joint Research
  • [Presentation] A Simple Approach to Growth Mode of InN and InGaN Thin Films on GaN(0001) Substrate2020

    • Author(s)
      Katsuya Nagai, Toru Akiyama, Kohji Nakamura and Tomonori Ito
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid State Science
    • Int'l Joint Research
  • [Presentation] 窒化物半導体成長プロセスの理論解析:不純物混入機構2020

    • Author(s)
      寒川義裕
    • Organizer
      日本物理学会2020年秋季大会
    • Invited
  • [Presentation] 不純物混入と深紫外デバイス特性の相関2020

    • Author(s)
      寒川義裕
    • Organizer
      2020年第81回応用物理学会秋季学術講演会
    • Invited
  • [Presentation] 第一原理計算を用いた4H-SiC/SiO2界面での酸化過程の検討:ウェット酸化の影響2020

    • Author(s)
      清水紀志, 秋山亨, A. -M. Pradipto, 中村浩次, 伊藤智徳, 影島博之, 植松真司, 白石賢二
    • Organizer
      2020年第81回応用物理学会秋季学術講演会
  • [Presentation] モンテカルロ計算によるGaAs(001)基板上InAsぬれ層の表面構造変化の理論検討2020

    • Author(s)
      秋山亨, 米本和弘, 日紫喜文昭, A. -M. Pradipto, 中村浩次, 伊藤智徳
    • Organizer
      2020年第81回応用物理学会秋季学術講演会
  • [Presentation] Data Analysis for Sputtering and High-Temperature Annealing in AlN Templates Fabrication2020

    • Author(s)
      A. Kusaba, Y. Kangawa, K. Norimatsu, and H. Miyake
    • Organizer
      37th Electronic Materials Symposium
  • [Presentation] A theoretical model for carbon coverage on GaN polar surfaces during MOVPE2020

    • Author(s)
      D. Yosho, Y. Inatomi, and Y. Kangawa
    • Organizer
      37th Electronic Materials Symposium
  • [Presentation] 窒化物半導体プロセス・インフォマティクス:不純物混入の抑制2020

    • Author(s)
      寒川義裕
    • Organizer
      第49回薄膜・表面物理度基礎講座
    • Invited
  • [Presentation] GaN(0001)基板上におけるInNおよびInGaN薄膜の成長様式に関する理論的検討2020

    • Author(s)
      永井勝也, 秋山亨, 中村浩次, 伊藤智徳
    • Organizer
      第49回結晶成長国内会議
  • [Presentation] 微傾斜m-GaN MOVPEにおける酸素混入機構:量子論に立脚したBCFモデル2020

    • Author(s)
      用正大地, 新宅史哉, 稲富悠也, 寒川義裕, 岩田潤一, 押山淳, 白石賢二, 田中敦之, 天野浩
    • Organizer
      第49回結晶成長国内会議
  • [Presentation] 機械学習によるスパッタAlN膜の高温アニール最適プロセス探索2020

    • Author(s)
      草場彰, 寒川義裕, 則松研二, 三宅秀人
    • Organizer
      第49回結晶成長国内会議

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Published: 2021-12-27  

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