2010 Fiscal Year Final Research Report
Thick epitaxial growth of AlN and AlGaN by using controlling molecules of source precursors
| Project Area | Optoelectronics Frontier by Nitride Semiconductor -Ultimate Utilization of Nitride Semiconductor Material Potential- |
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| Project/Area Number |
18069004
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| Research Category |
Grant-in-Aid for Scientific Research on Priority Areas
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| Allocation Type | Single-year Grants |
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| Review Section |
Science and Engineering
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
KOUKITU Akinori Tokyo University of Agriculture and Technology, 大学院・工学研究院, 教授 (10111626)
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| Co-Investigator(Kenkyū-buntansha) |
KUMAGA Yoshinao 東京農工大学, 大学院・工学研究院, 准教授 (20313306)
MURAKAMI Hajime 東京農工大学, 大学院・工学研究院, 助教 (90401455)
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| Project Period (FY) |
2006 – 2010
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| Keywords | 窒化物半導体 / 厚膜エピタキシー / 自立基板結晶 / Al系窒化物 / 原料分子制御法 / HVPE成 |
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| Research Abstract |
In this project, we have researched the growth of the high-quality and thick epitaxial layer of the group III nitrides by using a new HVPE growth method with controlling the molecules of source precursors. For Al-related nitrides, the molecule which doesn't react with quartz reactor was used and for In-related nitrides, the molecule which has a large formation energy of InN was used. As a result, we succeeded the growth of the high-quality and thick epitaxial layers of AlN, AlGaN and InN.
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[Presentation] Growth of InN Films by Hydride Vapor Phase Epitaxy2010
Author(s)
Yoshinao Kumagai, Rie Togashi, Hisashi Murakami, Akinori Koukitu
Organizer
The 16th International Conference on Crystal Growth in Conjunction with The 14th International Conference on Vapor Growth and Epitaxy (ICCG-16/ICVGE-14) DK1
Place of Presentation
Beijing, China 招待講演
Year and Date
2010-08-12
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[Presentation] Progress in Preparation of Freestanding AlN Substrates by Hydride Vapor Phase Epitaxy2008
Author(s)
Y.Kumagai, J.Tajima, Y.Kubota, M.Ishizuki, R.Togashi, H.Murakami, T.Nagashima, K.Takada, A.Koukitu
Organizer
International Workshop on Nitride Semiconductors 2008 (IWN2008) We2b-C1
Place of Presentation
Montreux Music and Convention Center, Montreux, Switzerland 招待講演
Year and Date
2008-10-08
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