Spatial-arrangement of nano-objects based on monolayer lithography

2009 Fiscal Year Self-evaluation Report

• Project Area: Strong Photons-Molecules Coupling Fields for Chemical Reactions
• Project/Area Number: 19049010
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Kyoto University
• Principal Investigator: SUGIMURA Hiroyuki Kyoto University, 工学研究科, 教授 (10293656)
• Project Period (FY): 2007 – 2010
• Keywords: 微細加工 / リソグラフィ / ナノ粒子 / 自己集積化単分子膜

Research Abstract

本計画研究では、
○光-分子強結合反応場の構成要素となるナノオブジェクト(金属・誘電体等)を、
○リソグラフィ技術に基づくトップダウン微細加工プロセスによって
○μm～nmの精度で自在なパターン形状に成形した反応サイト上へ、
○反応サイトの化学的相互作用を推進力としてナノオブジェクトを精密配置する、
意図的な設計に基づく自在な形状を有する光-分子強結合反応場を構築するための微細加工・微細組立技術を開発する。
さらに、本特定領域研究で蓄積される光-分子強結合場に関する知見を基に、
○強結合場の局所性を利用した高分解能光リソグラフィ技術の開発に挑む。

Research Products

• [Journal Article] Gold nanoparticle arrays fabricated on a silicon substrate covered with a covalently bonded alkyl monolayer by electroless plating combined with scanning probe anodization lithography (2009)
  • Author(s): Hiroyuki Sugimura, Sin-ichiro Nanjo, Hikaru Sano, Kuniaki Murase
  • Journal Title: J. Phys. Chem. C Vol.113No.27 Pages: 11643-11646
• [Journal Article] Structural Organization of Gold Nanoparticles onto the ITO Surface and Its Optical Properties as a Function of Ensemble Size (2008)
  • Author(s): Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: Langmuir Vol.24No.8 Pages: 3787-3793
• [Journal Article] Regulation of Pattern Dimension as a Function of Vacuum Pressure: Alkyl Monolayer Lithography Om P. Khatri (2008)
  • Author(s): Hikaru Sano, Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: Langmuir 24(20) Pages: 12077-12084
• [Journal Article] Self-Assembly Guided One-Dimensional Arrangement of Gold Nanoparticles: A Facile Approach Om (2008)
  • Author(s): P. Khatri, Jiwon Han, Takashi Ichii, Kuniaki Murase, Hiroyuki Sugimura
  • Journal Title: J. Phys. Chem. C 112(42) Pages: 16182-16185
• [Journal Article] Patterning of Self-assembled Thin Films Using Vacuum Ultraviolet Irradiation Through Anodic Porous Alumina Mask (2007)
  • Author(s): Masahiro Harada, Sunao Murata, Takashi Yanagishita, Hiroyuki Sugimura, Kazuyuki Nishio, Hideki Masuda
  • Journal Title: Chem. Lett. Vol.36No.10 Pages: 1266-1267
• [Presentation] Chemical Manipulation of Metal Nanoparticles via Self-Assembled Monolayer Lithography (2010)
  • Author(s): H. Sugimura, O. P. Khatri, J. Han, H. Sano, M. Kanda, J. Yang, T. Ichii and K. Murase
  • Organizer: The 3rd Taiwan-Japan Joint Symposium on Organized Nanomaterials and Nanostructures Related to Photoscience
  • Place of Presentation: Hualien, Taiwan
  • Year and Date: 20100321-24
• [Presentation] Gold Nanodot Array on Silicon Fabricated by Scanning Probe Lithography (2009)
  • Author(s): M. Kanda, T. Ichii, K. Murase, H. Sugimura
  • Organizer: AVS 56th International Symposium
  • Place of Presentation: San Jose, California, USA
  • Year and Date: 20091108-20091113
• [Presentation] Gold Naonparticles Anchoring on Predefined Sites in Linear Fashion by Combined Approach of Self-Assembly and Scanning Probe Anodization (2008)
  • Author(s): Om P. Khatri, J. Han, T. Ichii, K. Murase, H. Sugimura
  • Organizer: Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2008): 214th Meeting of the Electrochemical Society and 2008 Fall Meeting of the Electrochemical Society of Japan
  • Place of Presentation: Honolulu, Hawaii(MEETING ABSTRACTS, CD)
  • Year and Date: 20081012-20081017
• [Presentation] Fabrication and Photopatterning of Nitrophenyl Terminated Organisilane Self-Assembled Monolayer (2008)
  • Author(s): H. Sugimura, K. Adachi, T. Ichii, K. Murase
  • Organizer: XXIInd IUPAC Symposium on Photochemistry, Gothenburg, Sweden
  • Place of Presentation: Gothenburg, Sweden
  • Year and Date: 20080728-20080801
• [Presentation] Modification and electrical characterization of self-assembled monolayer/silicon samples with and without an interfacial oxide layer by the use of scanning probe microscopes (2007)
  • Author(s): J. Han, H. Sano, T. Ichii, K. Murase, H. Sugimura
  • Organizer: International Conference on Nanoscience and Technology (ICN+T2007)
  • Place of Presentation: Stockholm, Sweden
  • Year and Date: 20070702-20070706