New semiconductor devices using regulated nano materials

2009 Fiscal Year Self-evaluation Report

• Project Area: New Materials Science Using Regulated Nano Spaces －Strategy in Ubiquitous Elements
• Project/Area Number: 19051017
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: TOSHIHIKO Kanayama National Institute of Advanced Industrial Science and Technology, ナノ電子デバイス研究センター, 研究センター長 (70356799)
• Project Period (FY): 2007 – 2011
• Keywords: 原子分子処理 / ナノ材料 / 超薄膜

Research Abstract

本研究の目的は、同種元素の組み合わせで金属・半導体・絶縁体が合成できる配列ナノ空間物質の利点を最大限に活用し、ナノスケールの電界効果トランジスタを、シリコン系材料で、異種物質界面の不整合や材料構造のランダムネスを伴わずに作製するための物質構成原理を構築することである。特に、シリコンの配列ナノ空間の内部に遷移金属原子を配置することにより、半導体物質を形成効果トランジスタ動作、即ち、外部電界による伝導度変調が行えることを実証する。さらに、遷移金属内包シリコンクラスターの構造および電子状態が、荷電状態によって変化することを利用し、電界効果の物理的限界を超えうる、半導体デバイスの新動作原理を探索する。

Research Products

• [Journal Article] First principles structure modeling for amorphous Si-rich transition metal silicides (2010)
  • Author(s): Takehide Miyazaki, Noriyuki Uchida, Toshihiko Kanayama
  • Journal Title: Phys. Status Solidi (c) 7 Pages: 636-639
  • Peer Reviewed
• [Journal Article] Structure determination of W-capsulated Si cage clusters by x-ray absorption fine structure spectra (2009)
  • Author(s): Zhihu Sun, Hiroyuki Oyanagi, Noriyuki Uchida, Takehide Miyazaki, Toshihiko Kanayama
  • Journal Title: J. Phys D: Appl. Phys. 42 Pages: 015421-1-6
  • Peer Reviewed
• [Journal Article] Synthesis of New Amorphous Semiconductors Assembled from Transition-Metal-Encapsulating Si Clusters (2008)
  • Author(s): Noriyuki Uchida, Hiroshi Kintou, Yusuke Matsushita, Tetsuya Tada, Toshihiko Kanayama
  • Journal Title: pplied Physics Express (APEX) 1 Pages: 121502-1-3
  • Peer Reviewed
• [Journal Article] First-principles theory for Si-based, atomically thin layered semiconductor crystal (2007)
  • Author(s): Takehide Miyazaki, Toshihiko Kanayama
  • Journal Title: Applied Physics Letters 91 Pages: 082107-1-3
  • Peer Reviewed
• [Journal Article] Local modification of electronic st ructure of Si (111)-7x7 surfaces by forming molybdenum-encapsulating Si clusters (2007)
  • Author(s): Noriyuki Uchida, Hiroshi. Yahata, To shihiko Kanayama, Leonid Bolotov
  • Journal Title: Applied Physics Letters 91 Pages: 063109-1-3
  • Peer Reviewed
• [Presentation] First principles structure modeling for amorphous Si-rich transition metal silicides (2009)
  • Author(s): Takehide Miyazaki, Noriyuki Uchida, Toshihiko Kanayama
  • Organizer: The 23rd International Conference on Amorphous and Nanocrystalline Semiconductors
  • Place of Presentation: Utrecht, The Netherlands
  • Year and Date: 20090823-20090828
• [Presentation] Amorphous Si-Rich Silicide Semiconductors Assembled from Transition-Metal-Encapsulating Si Clusters (2009)
  • Author(s): Noriyuki Uchida, Takehide Miyazaki, Toshihiko Kanayama
  • Organizer: The 23rd International Conference on Amorphous and Nanocrystalline Semiconductors
  • Place of Presentation: Utrecht, The Netherlands
  • Year and Date: 20090823-20090828
• [Presentation] Synthesis of Amorphous Semiconductors Assembled from Transition-Metal-Encapsulating Si Clusters (2009)
  • Author(s): Noriyuki Uchida, Yusuke Matsushita, Hiroshi Kintou, Tetsuya Tada, Toshihiko Kanayama
  • Organizer: International Conference on Nanoscience and Quantum Physics (nanoPHYS'09)
  • Place of Presentation: Minato-ku, Tokyo, Japan
  • Year and Date: 20090223-20090225
• [Presentation] Synthesis and Characterization of Clusters Assembled Films Composed of Transition-Metal Encapsulating Si Clusters" (2008)
  • Author(s): Noriyuki Uchida, Hiroshi Kintou, Yusuke Matsushita, Tetsuya Tada, Kazuhiho Kirihara, Hiroyuki Oyanagi, Toshihiko Kanayama
  • Organizer: 2008 International Conference on Solid State Devices and Materials (SSDM 2008)
  • Place of Presentation: Tsukuba, Ibaraki, Japan
  • Year and Date: 20080923-20080926
• [Presentation] Formation of Si6 ring clusters stabilized by a transition metal atom (2008)
  • Author(s): Noriyuki Uchida, Yusuke Matsushita, Takehide Miyazaki, Hidefumi Hiura, Toshihiko Kanayama
  • Organizer: 14th International Symposium on Small Particles and Inorganic Clusters
  • Place of Presentation: Valladolid, Spain
  • Year and Date: 20080915-20080919
• [Remarks] Phys. Status Solidi (c), 7, 3-4の表紙を遷移金属内包シリコンクラスター物質の第一原理計算に基づく構造図が飾った
• [Patent(Industrial Property Rights)] 金属珪素化合物薄膜及びその製造方法 (2009)
  • Inventor(s): 金山敏彦、内田紀行
  • Industrial Property Rights Holder: (独)産業技術総合研究所
  • Industrial Property Number: 特許・PCT/JP2009/053422
  • Filing Date: 2009-02-25
• [Patent(Industrial Property Rights)] 薄膜トランジスタ (2009)
  • Inventor(s): 内田紀行、金山敏彦
  • Industrial Property Rights Holder: (独)産業技術総合研究所
  • Industrial Property Number: 特許・特願2009-191603
  • Filing Date: 2009-08-21
• [Patent(Industrial Property Rights)] 金属珪素化合物薄膜及びその製造方法 (2008)
  • Inventor(s): 金山敏彦、内田紀行
  • Industrial Property Rights Holder: (独)産業技術総合研究所
  • Industrial Property Number: 特許・特願2008-048520, 国内優先出願・特願2008-230650, 特願2009-037261
  • Filing Date: 2008-02-28