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1990 Fiscal Year Final Research Report Summary

Photodissociation Dynamics on Surface Probed by Vacuum uv Laser.

Research Project

Project/Area Number 01044008
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionHokkaido University

Principal Investigator

KAWASAKI Masahiro  Research Institute of Applied Electricity, Hokkaido University, 応用電気研究所, 教授 (70110723)

Co-Investigator(Kenkyū-buntansha) DAS Puspendu K.  Dept. of Inorganic and Physical Chemistry, Indian Institute of Science, 講師
HASHIMOTO Satoshi  Research Institute of Applied Electricity, Hokkaido University, 応用電気研究所, 助手 (60164787)
KIM Hong Lae  Brookhaven National Laboratory, 研究員
OKABE Hideo  Dept. of Chemistry, Haward University, 化学科, 教授
BERSOHN Richard  Dept. of Chemistry, Columbia University, 化学科, 教授
MATSUMI Yutaka  Research Institute of Applied Electricity, Hokkaido University, 応用電気研究所, 助教授 (30209605)
SATYAPAL Sunita  Dept. of Chemistry, Columbia University
TOYOSHIMA Isamu  Research Center for Catalysis, Hokkaido University
Project Period (FY) 1989 – 1990
KeywordsPhotoelectron / Spectroscopy / Gallium / Photodissociaiton / Hydrogen / Vacuum uv / Chloride / Multiphoton
Research Abstract

Pyrolytic and photolytic dissociation of trimethylgallium on Si, Au, and Al substrates was studied by X-ray and UV photoelectron spectroscopy technique. On an Si (111) substrate, gallium metal and CH_n radicals are deposited by pyrolytic dissociation up to 670 K. On a polycrystalline Au substrate, gallium metal was observed while Cls signal disappeared at 470 K. Photodissociation of monolayered Ga(CH_3)_2 at 266 nm gives XPS spectra for CH_n radicals and Ga metal on the Si wafer while at 355 nm no decomposition was observing.
Laser irradiation at 193 or 351 nm of a multilayer of Cl_2 or CH_3Cl on an Si wafer at 100 K leads to both photodissociation of these molecules and formation of photoetching products. The kinetic energy distributions of photofragments (Cl, CH_3) and etching products (SiCl, SiCiC_2) were measured. The kinetic energy distribution of Cl or CH_3 is bimodal for the case of thin deposition of parent molecules on substrates.
The Doppler profiles of the hydrogen atom photo fragments from the photodissociation of HCl and HBr at vacuum UV region are observed to determine the symmetries of the higher electronic states by using a resonance enhanced multiphoton ionization technique.
Alkyl chlorides (R = CH_3, C_2H_5, C_3H_7, and C_4H_9), chloromethanes (CH_nCl_<4-n>), and chlorofluoromethanes (CF_nCl_<4-n>) are photodissociated at vacuum UV region. The chlorine atom photo fragments are detected by a resonance-enhanced multiphoton ionization technique. The symmetries of the electronic states are determined from angular distributions of photofragments.

  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] Masahiro Kawasaki: "Laser Photodissociation of Chlorine and Methyl Chloride on Lowーtemperature Silicone Substrates." Journal of Applied Physics. 65. 792-798 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yutaka Matsumi: "Photodissociation of Chlorine Molecules at UV Region." Chemical Physics Letters. 155. 486-490 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Eikichi Kawai: "Vacuum UV Photoabsorption Spectra of Silicone and Disilane: Molecular Orbital Calculation of Electronic States." Japanese Journal of Applied Physics. 28. 247-251 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Masahiro Kawasaki: "Photodissociation of Chlorine Molecules under Collision Conditions; Laserーinduced Luminescence Ascribable to Cl_3 Species." Journal of Physical Chemistry. 93. 7571-7575 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshio Ibuki: "He(I) Photoelectron Spectra and VUV Absorption Cross Sections of Ga(CH_3)_3 and In(CH_3)_3." Chemical Physics Letters. 160. 152-156 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Masahiro Kawasaki: "Fluorescence Lifetime of SD(A^2Σ^+,v′=O,N′) Radicals and Rotational Distribution of SD(X^2Π_<3/2>,v″=O,J″) Photofragments Generated in Photodissociation of D_2S and C_2H_5SD at 193 nm." Journal of Chemical Physics. 91. 6758-6764 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yutaka Matsumi: "Dop^^′pler Spectroscopy of Chlorine Atoms Generated from Photodissociation of Hydrogen Chloride and Methyl Chloride at 157 and 193 nm." Journal of Chemical Physics. 92. 1696-1701 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshio Ibuki: "Vacuum Ultraviolet Photochemistry of CHFCl_2 and CHFBr_2; Absorption Spectra and CHF(A^1A^″) radical Formation." Journal of Chemical Physics. 92. 4277-4282 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yutaka Matsumi: "Fine Structure Branching Ratios and Doppler Spectroscopy of Chlorine Atoms from the Photodissociation of Alkyl Chlorides and Chlorofluoromethanes at 157 and 193 nm." Journal of Chemical Physics. 93. 7981-7986 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Satoshi Shogen: "Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si, Al and Au Substrates." Journal of Applied Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Arun Chattopadhyay: "Proofs of the Inversion Mechanism for the Reaction H + CD_4 → CD_3H + H." Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Yutaka Matsumi: "Fineーstructure Branching Ratios and Doppler Spectra of O( ^3Pj) produced by the reaction of H +O_2 → OH + O." Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川崎 昌博: "最先端レ-ザ加工技術" (株)シ-・エム・シ-, 62-74 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川崎 昌博: "レ-ザ-研究" レ-ザ-学会, 194-202 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川崎 昌博(金原ら編集): "薄膜ハンドブック (第6章 気相反応)" 共立出版, (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Matsumi, P. K. Das, and M. Kawasaki: "Doppler Spectroscopy of Chlorine Atoms Generated from Photodissociation of Hydrogen Chloride and Methyl Chloride at 157 and 193 nm" Journal of Chemical Physics. 92. 1696-1701 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Matsumi, N. Shafer, K. Tonokura, M. Kawasaki and H. L. Kim: "Fine-structure Branching Ratios and Doppler Spectra of O(^3P_j) produced by the reaction of H + O_2 -- OH + O." Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Matsumi, K. Tonokura, M. Kawasaki, S. Satyapal, and R. Bersohn: "Fine Structure Branching Ratios and Doppler Spectroscopy of Chlorine Atoms from the Photodissociation of Alkyl Chlorides and Chlorofluoromethanes at 157 and 193 nm." Journal of Chemical Physics. 93. 7981-7986 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Shogen, M. Kawasaki, Y. Matsumi, I. Toyoshima, and H. Okabe: "Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si, Al and Au Substrates." Journal of Applied Physics.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Chattopadhyay, S. Tasaki, R. Bersohn, and M. Kawasaki: "Proofs of the Inversion Mechanism for the Reaction H + CD_4 --- CD_3H + H." Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masahiro Kawasaki: Laser Society of Japan. Review of Laser Engineering, 194-202 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masahiro Kawasaki: Kyoritsu Publishers Co.Handbook for Thin Layer, (1991)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-08-12  

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