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1990 Fiscal Year Final Research Report Summary

Formation of Inorganic Thin Films by Laser Ablative Cluster Emission

Research Project

Project/Area Number 01550624
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 工業物理化学
Research InstitutionOsaka University

Principal Investigator

KAWAI Tomoji  Osaka Univ., Associate Professor, 産業科学研究所, 助教授 (20092546)

Project Period (FY) 1989 – 1990
KeywordsLaser Ablation / Inorganic Thin Films / Oxidation Gases / Low Temperature Oxidation / Low Temperature Crystallization
Research Abstract

It has been revealed that the laser irradiation of the surface of inorganic substances, such as copper containing oxide superconductor, leads to the emission of ions, atoms and clusters. This process is dependent on the laser influence. By utilizing this laser ablation process, inorganic thin films are formed on substrates in the oxygen atmosphere. In 1989, we have demonstrated that clusters are emitted from the Bi_2Sr_2CaCu_2O_8 and Bi_2Sr_2CuO_6 surface, and these phases are formed using this cluster formation process. We have developed this process to decompose the targets into smaller pieces, that is ions and atoms. These ions and atoms are accumulated on the substrates. In the case of Bi_2Sr_2CuO_6 ablation, atomic species of Bi, Sr and Cu are observed. The thin film formation of Bi_2Sr_2CuO_6 is carried out in the various oxidation gases. As a result, it has been revealed that NO_2>N_2O>O_2 are effective in this order for the oxidation process. In the NO_2 atmosphere, even the low pressure of 10^<-4> torr is effective to crystallize the thin films. In the N_2O atmosphere, the Bi_2Sr_2CuO_6 phase is crystallized at 50 to 100C lower temperature than in the O_2 gas. This is explained by the strong oxidation power of O radical formed by the laser irradiation. In the mixed N_2O and O_2 gas, the oxygen is incorporated enough in the films. In the O_2 atmosphere alone, the impurity CuO is segregated an the surface to make a rough surface. The irradiation of laser light during the thin film formation is effective for the low temperature thin film formation. Even the low intensity light of the order of 10mJ/cm^2 is effective enough. Thus, the laser ablation method is effective for the formation of inorganic thin films and also it is important to choose the atmosphere, such as NO_2 and N_2O, to form thin films at lower temperature.

  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] T.KAWAI: "New cuprate superconductors" Nature. 349. 200-200 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.KANAI: "Effect of oxidation gases on the formation of Bi_2Sr_2CuO_6" Appl.Phys.Lett.57. 2716-2718 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.KANAI: "Superconducting superlattices" Appl.Phys.Lett.57. 198-200 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.TABATA: "Tailored thin films of a superconducting BiーSrーCaーCuーO prepared by incorporation of exotic atoms." Appl.Pyhs.Lett.56. 1576-1578 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川合 知二: "人工的な層構造制御による酸化物高温超伝導薄膜の設計" 応用物理. 59. 610-617 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川合 知二: "積み上げ法による高温超伝導格子の設計と合成" 日本金属学会会報. 29. 733-739 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川合 知二: "化学総説:表面励起プロセスの化学・第6章" 日本化学会, (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Egami, H. Tabata, M. Kinugasa, T. Kawai and S. Kawai: ""Phase Control of Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Laser Ablation Method." Jpn. J. Appl. Phys. 478 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Kawai, Y. Egami, H. Tabata and S. Kawai: ""New layered bismuth cuprites"" Nature. 200 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Kanai, K. Horiuchi, T. Kawai and S. Kawai: ""Effect of Oxidation Gases on the Formation of Bi_2Sr_2CuO_6 Thin Films. "" Appl. Phys. Lett.2716 (1990)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-08-12  

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