1989 Fiscal Year Annual Research Report

パルス法、フロー法、およびビーム法によるプラズマ内反応素過程の研究

Research Project

Project/Area Number	01632004
Research Institution	Tokyo Institute of Technology
Principal Investigator	旗野嘉彦東京工業大学, 理学部, 教授 (90016121)
Co-Investigator(Kenkyū-buntansha)	新坂恭士金沢工業大学, 工学部, 助教授 (50016135) 嶋森洋福井工業大学, 工学部, 助教授 (80139815) 田中大上智大学, 理工学部, 助教授 (20119134) 高柳俊暢上智大学, 理工学部, 助手 (00154914) 西村幸雄九州大学, 機能物質科学研究所, 教授 (50038577)
Keywords	プラズマ内反応素過程 / エネルギー移動過程 / 電子・分子衝突解離過程 / 電子・分子衝突励起過程 / 電子付着過程 / パルス法 / フロー法 / ビーム法
Research Abstract	反応性プラズマの制御を行うためには、プラズマ内反応素過程を明らかにしその素過程の断面積または速度定数、反応生成物についての系統的な研究を行うことが不可欠である。本研究ではこの目的にもっとも適していると考えられるパルス法、フロー法、ビーム法を互いに相補的に用いて、励起希ガス原子からシラン、ジシラン、ゲルマンなどの分子へのエネルギー移動過程、電子衝突によるこれら分子の励起・解離過程、そして電子付着過程について研究を行うことを目的とした。本年度の実施計画に基づきパルス法により励起ヘリウム・アルゴン原子から上記分子へのエネルギー移動過程の断面積絶対値を励起原子の電子的励起状態を選別して測定するとともに、フロー法を用いた生成物からの発光の分光を行ってこの反応の生成物の種類・状態について明らかにした。また放射光を用いたパルス同時計数測定系を確立し予備的な実験を行った。ビーム法を用いた実験については、電子と多原子分子との衝突における解離的イオン化過程を明らかにするための電子・イオン同時計数装置の製作を完了し予備的なデータの取得を行った。またシラン・ジシラン等の分子と低速電子との衝突における弾性散乱、振動励起過程について低速電子のエネルギー損失分光法により角度微分断面積の測定を行い、これらの分子における共鳴過程・三重項励起などの現象をはじめ見出した。最後にパルス法による電子付着過程の研究についてはマイクロ波空洞法を用いることにより種々の分子への付着速度定数を測定するとともにマイクロ波加熱法を確立し、付着過程の電子エネルギー依存性を調べることに成功した。以上により本年度の研究計画はそれぞれの手法を相補的に用いることにより遅滞なく、かつ効率的に逐行された。

Research Products

(32 results)

All Other

All Publications (32 results)

[Publications] 小泉均: "VUV-optical oscillator strengh distributions of melocules and their implications to early events in radiation chemistry." Radiation Physics and Chemistry.34. 87-92 (1989)
[Publications] 新坂恭士: "Electron-ion recombination rate constants in liquid and dense gaseous methane." Radiation Physics and Chemistry.34. 519-526 (1989)
[Publications] 籏野嘉彦: "Gas-Phase collisios dynamics by means of pulse-radiolysis method." Radiation Physics and Chemistry.34. 675-685 (1989)
[Publications] 鵜飼正敏: "準安定状態または共鳴状態にあるアルゴン最低励起原子の分子との衝突における脱励起過程" 日本化学会誌. 1989. 1188-1194 (1989)
[Publications] 市川行和: "Cross sections for collisions of electrons and photons with oxygen molecules." Journal of Physical and Chemical Reference Date. 18. 23-42 (1989)
[Publications] 籏野嘉彦: "Some aspects of recent progress in experimental techinques of studying atomic and molecular processes in reactive plasmas." Proceedings Japanese Symposium on Plasma Chemistry.2. 15-22 (1989)
[Publications] 吉田啓晃: "Deexcitation cross sections of the lowest excited helium atoms by germane." Proceedings of the 7th symposium on PLASMA PROCESSIG.473-476 (1990)
[Publications] 亀田幸成: "Photoabsorption cross section and ionization quantum yield of silane in the EUV region." Proceedings of the 7th symposium on PLASMA PROCESSING.249-252 (1990)
[Publications] 鵜飼正敏: "An attempt of fluorescence lifetime measurements using the pulse structure of Photon Factory." Photon Factory Activity Reports 1989. #7. (1990)
[Publications] 吉田啓晃: "Deexcitation cross sections of He(2^3S,2^1S,and 2^1P)by CH_4,SiH_4,and GeH_4." Chemical Physics Letters.
[Publications] 籏野嘉彦: "Fundamental processes in radiolysis.-Collision dynamics data on some elementary processes." Atomic and Molecular Data for Radiotherapy.IAEA-TECDOC-506,(IAEA,1989,Vienna). 200-214 (1989)
[Publications] 籏野嘉彦: "Electronic and atomic collision prosesses in ionized gases as studied by means of the pulse radiolysis method." Proceedings of the 19th Conference on the Phenomena in Ionized Gases.(invited paper). (1989)
[Publications] 辻正治: "Dissociative excitation of SiH_4 by collisions with metastable argon atoms." Chemcal Physics Letters.155. 481-485 (1989)
[Publications] 辻正治: "Dissociative excitation of SiH_4 by collisions with helium active species." Chemical Physics Letters.158. 470-474 (1989)
[Publications] 関谷博: "Ar(^3P_<2.0>)とCH_3x(X=Cl,Br,I),SiH_4,Si_2H_6との解離性励起移動におけるCH,SiHラジカルのレーザー誘起蛍光法による検出" 日本化学会誌. 1989. 1210-1216 (1989)
[Publications] 高柳俊暢: "Measurement of electron impact excitation cross sections and oscillator strength for Kr." Physical Review. (1990)
[Publications] 稲葉貴之: "Differential cross sections for F_2 I^1Σ^+_u(v=0,1)by electron impact." Abstracts of contributed papers,XVI International Conference on the Physics of Electronic and Atomic Collisions. 327 (1989)
[Publications] 吉野益弘: "Multiple photoionization of rare-earth atoms;Eu and Yb." Abstracts of contributed papers,XVI International Conference on the Physics of Electronic and Atomic Collisions. 17 (1989)
[Publications] 檀上篤徳: "Electron scattering from Kr.II.Differential cross section for the 5s[11/2]_1 and 5s[01/2]]_1" Journal of Physics B.22. 951-961 (1989)
[Publications] 山田一博: "Electron impact excitation of F^+,Ne^+,Cl^+,and Ar^+ ions." Journal of Physical Society of Japan.58. 3151-3156 (1989)
[Publications] 田中大: "Observation of the lowest triplet state in silane." Journal of Chemical Physics. (1990)
[Publications] 田中大: "Crossed beam experiment for scattering of low-energy electrons form SiH_4." Journal of Physics B.(1990)
[Publications] L.ボーステン: "Vibrational excitation of ethane by electron impat." Journal of Physics B. (1990)
[Publications] 田中大: "Low energy shape resonance in the ground electronic state vibrational excitation of silane and disilane." Proceedings,The 42nd Gaseous Electronics Conference(Palo Alto,1989). E36 (1989)
[Publications] 田中大: "Elastic ,scattering cross section measurements for collisions of 1.5-100eV electrons with silane and disilane." Proceedings,The 42nd Gaseous Electronic Conference,(Palo Alto,1989). E36 (1989)
[Publications] 嶋森洋: "On the mechanism of thermal electron attachment to SO_2." Abstracts of 6th International Swarm Seminar.(Glen Cove,NY,USA). V4 (1989)
[Publications] 嶋森洋: "Electron-energy dependence of electron attachment tomolecules as studied by a pulse radiolysis microwave cavity technique." Abstracts of 6th International Swarm Seminar.(Glen Cove,NY,USA). P10 (1989)
[Publications] 嶋森洋: "Thermal electron attachment to carbon suboxide." Journal of Chemical Physics.91. 4148-4154 (1989)
[Publications] 中谷佳次: "Measurements of rate constants for low energy electron attachment by attachment microwave cavity technique combined with microwave heating." Proceedings of the 7th symposium on PLASMA PROCESSING.(Tokyo). 465-468 (1990)
[Publications] 繁政英治: "Ionic fragmentation of SiH_4 following the K-shell excitation." Physica Scripta.(1990)
[Publications] 籏野嘉彦: "“Pulse Radiolysis" edited by Y.Tabata" CRC press,New York., (1990)
[Publications] 新坂恭士: "“Non-equilibrium Effects in Ion and Electron Transports"eds.E.E.Kunhardt,E.Van Brunt,J.Gallagher and D.Hudson." Prenum,press,New York., (1990)

1989 Fiscal Year Annual Research Report

パルス法、フロー法、およびビーム法によるプラズマ内反応素過程の研究

Principal Investigator

旗野 嘉彦 東京工業大学, 理学部, 教授 (90016121)

Research Products

[Publications] 小泉均: "VUV-optical oscillator strengh distributions of melocules and their implications to early events in radiation chemistry." Radiation Physics and Chemistry.34. 87-92 (1989)

[Publications] 新坂恭士: "Electron-ion recombination rate constants in liquid and dense gaseous methane." Radiation Physics and Chemistry.34. 519-526 (1989)

[Publications] 籏野嘉彦: "Gas-Phase collisios dynamics by means of pulse-radiolysis method." Radiation Physics and Chemistry.34. 675-685 (1989)

[Publications] 鵜飼正敏: "準安定状態または共鳴状態にあるアルゴン最低励起原子の分子との衝突における脱励起過程" 日本化学会誌. 1989. 1188-1194 (1989)

[Publications] 市川行和: "Cross sections for collisions of electrons and photons with oxygen molecules." Journal of Physical and Chemical Reference Date. 18. 23-42 (1989)

[Publications] 籏野嘉彦: "Some aspects of recent progress in experimental techinques of studying atomic and molecular processes in reactive plasmas." Proceedings Japanese Symposium on Plasma Chemistry.2. 15-22 (1989)

[Publications] 吉田啓晃: "Deexcitation cross sections of the lowest excited helium atoms by germane." Proceedings of the 7th symposium on PLASMA PROCESSIG.473-476 (1990)

[Publications] 亀田幸成: "Photoabsorption cross section and ionization quantum yield of silane in the EUV region." Proceedings of the 7th symposium on PLASMA PROCESSING.249-252 (1990)

[Publications] 鵜飼正敏: "An attempt of fluorescence lifetime measurements using the pulse structure of Photon Factory." Photon Factory Activity Reports 1989. #7. (1990)

[Publications] 吉田啓晃: "Deexcitation cross sections of He(2^3S,2^1S,and 2^1P)by CH_4,SiH_4,and GeH_4." Chemical Physics Letters.

[Publications] 籏野嘉彦: "Fundamental processes in radiolysis.-Collision dynamics data on some elementary processes." Atomic and Molecular Data for Radiotherapy.IAEA-TECDOC-506,(IAEA,1989,Vienna). 200-214 (1989)

[Publications] 籏野嘉彦: "Electronic and atomic collision prosesses in ionized gases as studied by means of the pulse radiolysis method." Proceedings of the 19th Conference on the Phenomena in Ionized Gases.(invited paper). (1989)

[Publications] 辻正治: "Dissociative excitation of SiH_4 by collisions with metastable argon atoms." Chemcal Physics Letters.155. 481-485 (1989)

[Publications] 辻正治: "Dissociative excitation of SiH_4 by collisions with helium active species." Chemical Physics Letters.158. 470-474 (1989)

[Publications] 関谷博: "Ar(^3P_<2.0>)とCH_3x(X=Cl,Br,I),SiH_4,Si_2H_6との解離性励起移動におけるCH,SiHラジカルのレーザー誘起蛍光法による検出" 日本化学会誌. 1989. 1210-1216 (1989)

[Publications] 高柳俊暢: "Measurement of electron impact excitation cross sections and oscillator strength for Kr." Physical Review. (1990)

[Publications] 稲葉貴之: "Differential cross sections for F_2 I^1Σ^+_u(v=0,1)by electron impact." Abstracts of contributed papers,XVI International Conference on the Physics of Electronic and Atomic Collisions. 327 (1989)

[Publications] 吉野益弘: "Multiple photoionization of rare-earth atoms;Eu and Yb." Abstracts of contributed papers,XVI International Conference on the Physics of Electronic and Atomic Collisions. 17 (1989)

[Publications] 檀上篤徳: "Electron scattering from Kr.II.Differential cross section for the 5s[11/2]_1 and 5s[01/2]]_1" Journal of Physics B.22. 951-961 (1989)

[Publications] 山田一博: "Electron impact excitation of F^+,Ne^+,Cl^+,and Ar^+ ions." Journal of Physical Society of Japan.58. 3151-3156 (1989)

[Publications] 田中大: "Observation of the lowest triplet state in silane." Journal of Chemical Physics. (1990)

[Publications] 田中大: "Crossed beam experiment for scattering of low-energy electrons form SiH_4." Journal of Physics B.(1990)

[Publications] L.ボーステン: "Vibrational excitation of ethane by electron impat." Journal of Physics B. (1990)

[Publications] 田中大: "Low energy shape resonance in the ground electronic state vibrational excitation of silane and disilane." Proceedings,The 42nd Gaseous Electronics Conference(Palo Alto,1989). E36 (1989)

[Publications] 田中大: "Elastic ,scattering cross section measurements for collisions of 1.5-100eV electrons with silane and disilane." Proceedings,The 42nd Gaseous Electronic Conference,(Palo Alto,1989). E36 (1989)

[Publications] 嶋森洋: "On the mechanism of thermal electron attachment to SO_2." Abstracts of 6th International Swarm Seminar.(Glen Cove,NY,USA). V4 (1989)

[Publications] 嶋森洋: "Electron-energy dependence of electron attachment tomolecules as studied by a pulse radiolysis microwave cavity technique." Abstracts of 6th International Swarm Seminar.(Glen Cove,NY,USA). P10 (1989)

[Publications] 嶋森洋: "Thermal electron attachment to carbon suboxide." Journal of Chemical Physics.91. 4148-4154 (1989)

[Publications] 中谷佳次: "Measurements of rate constants for low energy electron attachment by attachment microwave cavity technique combined with microwave heating." Proceedings of the 7th symposium on PLASMA PROCESSING.(Tokyo). 465-468 (1990)

[Publications] 繁政英治: "Ionic fragmentation of SiH_4 following the K-shell excitation." Physica Scripta.(1990)

[Publications] 籏野嘉彦: "“Pulse Radiolysis" edited by Y.Tabata" CRC press,New York., (1990)

[Publications] 新坂恭士: "“Non-equilibrium Effects in Ion and Electron Transports"eds.E.E.Kunhardt,E.Van Brunt,J.Gallagher and D.Hudson." Prenum,press,New York., (1990)

旗野嘉彦東京工業大学, 理学部, 教授 (90016121)