1991 Fiscal Year Final Research Report Summary
Development of New Ultra-Precision Machining Using Solid Lasers in Ultraviolet
| Project/Area Number |
01850034
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
機械工作
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| Research Institution | Chubu University |
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Principal Investigator |
NAMBA Yoshiharu Chubu University, Faculty of ENGG., Prof., 工学部, 教授 (40029129)
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| Co-Investigator(Kenkyū-buntansha) |
MOCHIZUKI Takayasu Hoya Corp., Director, オプトロニクス事業センター, 所長
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| Project Period (FY) |
1989 – 1991
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| Keywords | Laser Machining / UV Laser / Non-linear Optical Material / Laser Ablation / Laser CVD / Ultra-Precision Machining / Shaping Unconventional Machining / 特殊加工 |
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| Research Abstract |
There is a big demand for getting more precise parts in modern industries, so that the ultra-precision machining has been developed recently. However, there are three drawbacks on the machining accuracy in the mechanical machining process, and the drawbacks are the tool wear, deflection and thermal deformation. The laser machining process using laser ablation is one of the most important process for ultra-precision machining in future because of non-contact and non-thermal machining process. This process can solve the abovementioned problems in mechanical machinings, and also this process can deposit material on a sample as well as remove material from the sample without introducing much heat. This process also has a feature that the surface figure can be monitored by a laser interferometer during the machining process. Research results are summerized as follows :
1. There has been developed an ultra-precision laser machining system which consists of UV lasers, a 32-bit computer, a mechanical scanning apparatus, a vacuum chamber for laser CVD, and an interferometer for measuring a surface figure on a sample.
2. New solid state UV laser system of a small size has been developed by using a YAG laser and nonlinear optical crystals for micro-fabrication process.
3. Pure metals and fused silica canbe easily removed by UV lasers rather than YAG lasers, in spite of having a loss for frequency conversion.
4. A metal tungsten film can be deposited on a slicon substrate at a rate of 0.1 angstrom/pulse in thickness by laser ablation of tungsten hexacarbonyl.
5. A table mesa has been generated as an example for making shapes by laser CVD. A flat surface has been obtained by laser deposition of metal into a pit on a substrate.
6. A much smoother surface can be obtained on a laser-irradiated surface by photo-chemical process of UV lasers by comparison with thermal process of YAG lasers.
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