• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

1990 Fiscal Year Final Research Report Summary

Development of Line-Focus-Beam Acoustic Microscopy System for Evaluation of Electronic Device Materials

Research Project

Project/Area Number 01850058
Research Category

Grant-in-Aid for Developmental Scientific Research (B).

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionTohoku University

Principal Investigator

SANNOMIYA Toshio  Tohoku Univ. Faculty of Engr. Research Staff, 工学部, 教務職員 (40222418)

Co-Investigator(Kenkyū-buntansha) KANAI Hiroshi  Tohoku Univ. Faculty of Engr. Lecturer, 工学部, 講師 (10185895)
KUSHIBIKI Junichi  Tohoku Univ. Faculty of Engr. Assoc. Prof., 工学部, 助教授 (50108578)
CHUBACHI Noriyoshi  Tohoku Univ. Faculty of Engr. Professor, 工学部, 教授 (20006224)
Project Period (FY) 1989 – 1990
KeywordsLine-Focus-Beam Acoustic Microscopy / V(z) Curve Analysis / Leaky Surface Acoustic Wave / Velocity and Attenuation / Electronic Device Materials / Quantitative Measurements / Acoustic Inhomogeneity / Nondestructive Evaluation
Research Abstract

A system of the line-focus-beam (LFB) acoustic microscope applicable to quantitative characterization of electronic device materials has been developed. Some serious problems, such as mechanical precision and temperature, has been experimentally and theoretically discussed from the point of view of measurement accuracy. It has been shown that stabilization of the temperature of coupling liquid of water in the LFB system is most important for accurate measurements, which are carried out by determining propagation characteristics of leaky surface acoustic waves (LSAWs) on the water/sample boundary. The system has been installed in a temperature controlled room around 23<plus-minus>0.1^゚C. The relative accuracy of LSAW velocity measurements has been estimated to be better than <plus-minus>0.005% at a point and <plus-minus>0.02% over a scanning area of 3-inch diameter.
The system has been applied to investigate the elastic properties of piezoelectric LiNbO_3 and LiTaO_3 crystals. Experiment … More al relations between chemical composition ratios of Li/Nb and leaky surface acoustic wave (LSAW) velocities for 128^゚YX LiNbO_3 wafers have been determined. LSAW velocity measurements have been carried out for commercial wafers obtained from a series of crystal growths. Small changes of 0.092% have been detected due to the compositional variation. It has been estimated that the "effective" congruent composition in the production line is 48.440 Li_2O mol% with the density of 4647.4 kg/m^3. A serious problem regarding the elastic properties of X-112.2^゚Y LiTaO_3 during industrial preparation has been examined with the system. Various types of elastic inhomogeneities have been detected quantitatively as a significant variation of LSAW velocities. In some wafers, large changes, about 2.5%, in LSAW velocities have been observed, which have corresponded to a difference between the velocities for single- and multi-domains. One of the causes has been found to be in the poling process during wafer fabrication.
One of the potential applications is thin-film characterization. A new method of determining the elastic constants, density, and thickness of thin-film materials has been developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region, in addition to those of leaky Rayleigh waves. It has been demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C_<44>, and density have been, respectively, about 11% and 5.5% less than those for polycrystalline bulk gold, and the thickness has been determined as 6370A. Less

  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] J.Kushibiki: "Cut off characteristics of leaky Sezawa and pseudoーSezawa wave modes for thinーfilm charaterization" Appl.Phys.Lett.57. 1967-1969 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Kushibiki: "Quantitative evaluation of elastic properties of LiTaO_3 crystals by lineーfocus beam acoustic microscopy" Appl.Phys.Lett.(1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Kushibiki: "Characterzation of LiNbO_3 crystals by lineーfocusーbeam acousfic microscopy" Appl.Phys.Lett.(1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.K.Jen: "Long acoustic imaginy probes" Proc.1990 IEEE Ultrasonics Symp. (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J. Kushibiki: "Cut-off characteristics of leaky Sezawa and pseudo-Sezawa wave modes for thin-film characterization" Appl. Phys. Lett.Vol. 57. 1967-1969 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J. Kushibiki: "Quantitative evaluation of elastic properties of LiTaO_3 crystals by line-focus-beam acoustic microscopy." Appl. Phys. Lett.(1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J. Kushibiki: "Characterization of LiNbO_3 crystals by line-focus-beam acoustic microscopy" Appl. Phys. Lett.(1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C. K. Jen: "Long acoustic imaging probes" Proc. 1990 IEEE Ultrasonics Symp.(1991)

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 1993-08-12  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi